Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

16 20 25 12 16 20 25 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 M5 x 0.8 M5 x 0.8 Double acting Single rod 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

3 Port Solenoid Valve/

Symbol M12 connector pin number Wiring specication G1/2 terminal number Wiring specication r w (32) (12) (11) q 12 11 (12) e w w (31) e (31) (11) r q 32 31 q e (32) r VP542(R)/742(R)-X536 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) Safety limit

T

Refer to pages 15-18-3 to 4 for Safety Instructions and Common precautions on the products mentioned in this catalog, and refer to pages 15-1-10 to 11 for Precautions on every series. Min. bending radius (mm) 12 15 23 27 31 60 12 15 23 30 40 Operating temperature 20 to +60C (No freezing) Nylon 11, Nylon 12 Material Caution 1.

High Power Cylinder:

D d H Part no B C 30 M22 X 1.5 26 8 26 SOR-20 20 15.0 12.5 M8 X 1.25 5 13 NT-02 20 36.9 M24 X 1.5 32 8 32 SOR-25 25 19.6 16.5 M10 X 1.25 6 17 NT-03 25/32 43.9 M30 X 1.5 38 9 38 SOR-32 32 25.4 21.0 M14 X 1.5 8 22 NT-04 40 47.3 M33 X 2.0 41 11 41 SOR-40 40 4.10-6 High Power Cylinder Series RHC How to Rotate the Relief Valve Body The relief adjustment screw can be placed in any direction by

CE

150 -X 20 20 equivalent 25 to 300 32 25 to 400 2040 25 to 600 50 25 to 600 Data 63 25 to 600 Stroke reading cylinder Series CE1 Series CEP1 CEU1 CEU5 RS-232C RS-232C+BCD Extension Cable Count data output Output transistor mode Power supply voltage NPN PNP NPN PNP NPN PNP Cable length (m) Output transistor mode Power supply voltage 5 10 15 20 100 VAC 24 VDC 100 to 240 VAC Note) Detection

CE

150 -X 20 20 equivalent 25 to 300 32 25 to 400 2040 25 to 600 50 25 to 600 Data 63 25 to 600 Stroke reading cylinder Series CE1 Series CEP1 CEU1 CEU5 RS-232C RS-232C+BCD Extension Cable Count data output Output transistor mode Power supply voltage NPN PNP NPN PNP NPN PNP Cable length (m) Output transistor mode Power supply voltage 5 10 15 20 100 VAC 24 VDC 100 to 240 VAC Note) Detection

F

47 6 25 22.2 7.2 11.8 16.5 11.4 50 6.2 NAS2001F 3/16 33.6 28.6 17.1 AS2001F 11.8 14.5 4 8.9 43.8 5.2 32.6 27.6 11.4 17 13.2 52.2 7.1 1/4 34.5 29.5 20.1 15.5 6 11 48.5 6.3 33.7 28.7 12.4 16.5 11.4 52.2 6.2 3/16 34.6 29.6 24 AS2051F 14.8 15.5 6 11 50.7 6 34.4 29.4 19.4 14.8 17 13.2 54.4 7.1 NAS2051F 1/4 35.5 30.5 25.1 18 8 15.2 59.8 8.1 36.5 31.5 30.3 18 15.2 59.8 8.1 5/16 36.5 31.5 30.3 17

•

-m;;:r~t 1~ 2M6 Screw depth 11 1 5 2-M6 Screw depth 11 ' ~ Lsii S ~ 60 L 4L.I Applicable clamp Part No. A cylinder , Maleual :Casl iron Malerial: Carbon steel I Matefial : Cast lIon . Part No.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Center pusher assembly Through hole MHSH3 Dust cover Spring type Pushing out work piece with external cylinder Cylinder type Air blowing 2 Finger Air Gripper Parallel Type Series MHS2 16, 20, 25, 32, 40, 50, 63 How to Order Cylinder Bore Size MHS 2 D 20 16 to 25 F9N Number of auto switches Number of fingers Nil S 2 pcs. 1 pc. 2 2 fingers Auto switch type Nil Without auto switch (built-in

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

H 2.3 2.3-25

HRL

Cooling Capacity HRL100-Am-20 (CH1)1 HRL200-Am-20 (CH1)1 14 30 12 Technical Data HRS-R HRS HRS090 HRS 100/150 HRS200 HRSH090 HRSH HRSE HRR HRL HRZ HRZD HRW HECR HEC HED HEB 25 Ambient temperature 32C Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 20 8 15 6 10 Ambient temperature 45C 4 Ambient temperature 45C 5 2 0 0 15 20 25 15 20 25 Circulating fluid temperature [

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 4 Seal 1 Parts included 11 Gasket 1 11 Gasket 1 11 Gasket 1 11 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 in seal kit 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 Please refer to P19 to 21 for the product construction.

MRQB-OM0002

No.MRQB-OM02 / / / / / / / / MRQ MRQ MRQ MRQ 1 1. 1. 1. 1. 11 1-1. 11 1-2. 11 1-3. 11 2. 2. 2. 2. 12 3. 3. 3. 3. 14 3-1. 14 3-2. 14 4. 4. 4. 4. 15 4-1. 15 4-2. 16 4-3. 17 4-4. 17 4-5. 18 4-6. 18 5. 5. 5. 5. 19 5-1. 19 5-2. 21 5-3. 22 6. 6. 6. 6. 24 6-1. 24 6-2. 24 6-3. 25 7. 7. 7. 7. 26 8. 8. 8. 8. 27 9. 9. 9. 9. 28 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VQZ 285.5 21 273 No.

Series AS-FM/AS-M/ASD-FM

Applicable cylinder bore size (mm) 3.2 Metric size Inch size Model 6 8 4 1/8" 5/32" 3/16" 1/4" 5/16" 6, 10, 16, 20 AS1001FM 20, 25, 32 AS2001FM 20, 25, 32, 40 AS2051FM Specifications Proof pressure 1.5MPa Maximum operating pressure 1MPa Minimum operating pressure 0.1MPa Ambient and fluid temperature 0 to 60C Number of needle revolutions 10 revolutions (20 revolutions Note 1) ) Applicable

ML2B

Note) Although the lock plate may slightly bend due to tightening of the lock plate holding bolt, this does not affect the shock absorber and locking function. 3 25 D5 32 10 40 -X Tightening Torque for Stroke Adjusting Unit Lock Plate Holding Bolts 20(Nm) Data Bore size (mm) Tightening torque 1.2 25 3.3 32 3.3 40 10-13-11 9 Series ML2B Construction @0 i !9 !8 !7 !1 r #6 @3 #9 @7 y u t !

ML2B

Note) Although the lock plate may slightly bend due to tightening of the lock plate holding bolt, this does not affect the shock absorber and locking function. 3 25 D5 32 10 40 -X Tightening Torque for Stroke Adjusting Unit Lock Plate Holding Bolts 20(Nm) Data Bore size (mm) Tightening torque 1.2 25 3.3 32 3.3 40 10-13-11 9 Series ML2B Construction @0 i !9 !8 !7 !1 r #6 @3 #9 @7 y u t !

Nozzle Type Ionizer

saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0.7 0.7 0.6 0.6 Supply pressure [MPa] Supply pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 20 25 10 15 5 0 200 100 150 50 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] eFemale threads for piping IZN10E-11 With Stainless steel 316 One-touch fitting + Anti-static tubing Pressure gauge 0.30 O.D.

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

4 4 934 Rotary Actuated Air Gripper MHR2 1122Without Auto Switch: MHR2-15R 1122B 1122MHR2-15E port location 44 42 45 120 120 A C 36 11 11 3 x M3 x 0.5 thread depth 6 10 25 25 P.C.D.29 Finger closing port Finger opening port M3 x 0.5 M3 x 0.5 M3 x 0.5 Finger closing port (Mounting thread) M3 x 0.5 Finger opening port 35.5 12h9-0.043 0 1.5 41.5 +0.02 0 3 x 3 depth 6 (A, B, C common view) 5