Compact Type Dual-Rod Cylinder Series CXSJ

How to Order 11 CXSJ M Bore size Stroke Auto switch Bore size/Stroke 6 10 10, 20, 30, 40, 50 10, 20, 30, 40, 50 Bearing type M L Slide bearing Ball bushing bearing Only ball bushing bearing is available for clean room specification 12-.

Step Motor Controller (Servo / 24 VDC)

Operation instruction . 46 2 - (1) Power on Return to origin . 46 (2) Positioning operation . 47 (3) Pushing operation. 47 (4) HOLD . 48 (5) Reset . 48 (6) Stop . 48 (7) Area output . 49 11. Alarm Detection . 50 11.1 Parallel output for the alarm group . 50 11.2 Alarm details . 51 12. Wiring of cables/Common precautions . 57 13.

45

for 1/4" (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting for 1/4" N9: With One-touch fitting for 5/16" SX 000-50-3AP PG PH SX 000-50-4AFor 45(N) (Flat ribbon cable) SX 000-50-5ASX 000-50-6AT T1 For 45 (Terminal block) SX 000-50-7A1-6-110 Base Mounted Series SX3000/5000 How to Increase Manifold Bases (1) Loosen bolt (a) fixing the manifold base until it begins

45

for 1/4" (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting for 1/4" N9: With One-touch fitting for 5/16" SX 000-50-3AP PG PH SX 000-50-4AFor 45(N) (Flat ribbon cable) SX 000-50-5ASX 000-50-6AT T1 For 45 (Terminal block) SX 000-50-7A1-6-110 Base Mounted Series SX3000/5000 How to Increase Manifold Bases (1) Loosen bolt (a) fixing the manifold base until it begins

CXT

Q + Stroke (NA) Cylinder form 12 16 d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 x 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 x 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 x 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90 54 9

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

17 M22 x 1.5 Hexagon width across flats 30 8 50 8 Width across flats 19 10 H 70 4 x M5 x 0.8 Width across flats 60 G 11 F E Y 4 40 C A B D Dimensions (mm) A B C D E F G H Y Model ZPT100HBJ25-01-A22 104.5 178.5 50-01-A22 140.5 214.5 100 103 69 107 47.5 60.5 35.5 75-01-A22 180.5 254.5 100-01-A22 215.5 289.5 ZPT125HBJ25-01-A22 113 187 50-01-A22 149 223 125 129 89 135 56 69 44 75-01-A22 189

A_HEC-OM-K001

water 35oC 800 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig.9-11 Cooling capacity (HED007) 2) Heating capacity 3200 2800 2400 Heating capacity W Facility water 35oC 2000 1600 Facility water 10oC 1200 Facility water 25oC 800 400 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig.9-12 Heating capacity (HED007) 9.5 Performance Chart 9-16 A_HEC-OM-K001-1.7 Chapter

3 Port Solenoid Valve Series VQ100 1

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

VQ

/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Other (1) : Option Note 1) Except for large flow capacity style.

3 Port Solenoid Valve Series VQ100 1

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

Hydraulic Cylinders

depth 6.5 61 51 10 18 14 15 7 47 6.6 63 1/4 19.5 10 40 M16 x 2 14 depth 8.6 65 55 10 22.4 19 20 7 52 9 71 1/4 20.5 10 50 M20 x 2.5 17.5 depth 10.8 71 60 11 28 24 24 8 58 11 81 1/4 22 10 63 M27 x 3 20 depth 13 80 67 13 35.5 30 33 9 69 13 97 1/4 25.5 10 80 M30 x 3.5 23 depth 15.2 95 78 17 45 41 36 14 86 15 117 3/8 30 15 100 M39 x 4 26 depth 17.5 122 96 26 56 50 45 21 106 17 142 3/8 36 15 Note

IZx-OMX0087

Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

LECP6_C

W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 73 () 12 1. CW [CW] 2. CCW [CCW] 12 1. [] 2.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

48.4 18.5 28.2 39.7 35.2 8 15.2 5/16" 15.2 63 12.9 39 48.8 43.8 R 1/4 23 21 19 42.8 37.8 AS331FG-02-10 AS231FG-N02-11 32.6 54.4 47 21 31 43.7 38.7 10 18.5 3/8" 17.9 67 20.2 40 16.2 23 AS331FG-02-12 AS331FG-N02-07 34.4 56.2 50 22 25.6 44.9 38.7 12 20.9 1/4" 13.2 69 60 17 12.9 20.6 NPT 1/4 AS331FG-03-06 AS331FG-N02-09 48.8 43.8 42.8 37.8 25.2 46.1 54.4 17 28.2 38.5 39.7 6 12.8 5/16" 15.2 56

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Bore size (mm) 10, 20, 30, 40, 50 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75, 100 Standard stroke 6 10, 15 20, 25, 32 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

MHF2

15.8 58 E 5.9 11 11 14 19 E 0 -0.1 4-2.6 through (mounting hole) M3 x 0.5 17 18 0.8 18 0.8 Finger closing port M3 x 0.5 4-4.5 +0.1 0 Finger opening port Close: 0 E-E Open: 321 Use the attached hexagon socket head screws for mounting holes. 8-M2.5 x 0.45 thread depth 3 Attachment mounting thread 4-M3 x 0.5 thread depth 4 Mounting thread 50 M2.5 x 0.45 Groove for auto switch mounting 4 1.3

MXW Series Long Stroke Slide Table

direction A Taper thread plug with hexagonal hole 98.6 126 66 55 8 50 37 Y 50 Y 50 11 43 209 Operating port Rc (PT) 1/8 Operation direction B Taper thread plug with hexagonal hole Operation direction B A 28 14 28 14 13 A 12 76 62 17 36 A 38 Z Cross section AA (scale 30%) (N-1) x H G H 9 N-M8 x 1.25 thread depth 16 8H9 +0.036 depth 9 0 Bottom through hole 6.6 F E 8H9 +0.036depth 9 0 Model

HRX-OM-K003

Ph (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) * 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max. 50 2-/L) Max.200 Max.50 Sulfate ion (mgSO4 Acid consumption (Ph4.8) (mgCaCO3/L) Max.100 Max.50 Total hardness (mgCaCO3/L) Max.200 Max.70 Calcium hardness (mgCaCO3/L) Max.150 Max.50 Standards Ionic silica (mgSiO2/L) Max.50 Max.30 Iron (mgFe/L) Max.1.0 Max.0.3 Copper

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

With light/surge voltage suppressor (Non-polar type) : SY100-30-A U Without lead wire (with connector and 2 of sockets only) Lead wire length Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Rated voltage 5 6 V S R 1 2 Electrical entry 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] G H L LN LO M MN

PFxx-OMA1007

Dimensions with bracket Part number K F G H Q R S T U V W AMS20B-#C 85 71.2 103.2 76.2 35 7 14 54.5 6 47 42.5 AMS30B-#C 85 85.2 104.2 100.7 35 7 14 54.5 6 47 42.5 AMS40B-#C 85 103.2 105.2 122.2 40 9 18 65 7 55 50 AMS60B-#C 100 124.2 126.2 157.2 50 11 20 80 8 70 60 -139No.PF-OMA1007-B AMS20/30/40/60B-#00C Part number A F AMS20B-#00C 247.4 69.6 AMS30B-#00C 285.9 83.1 AMS40B-#00C 325.4 100.6