VK3000

255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 3-2-7 Series VK3000 Base mounted (Bottom ported) Type 40 Manifold Grommet: G DIN terminal: D VV5K3-40Station -M5 ( ) ( ) ~ = L Dimension n: Stations n L 1 50 27 2 69 46 3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16

MIW/MIS

30 20 10 Transfer speed V m/min Transfer speed V m/min Allowable lateral load MIW20 MIS20 MIW12 MIS12 200 0.2MPa 0.3MPa 0.4MPa 0.5MPa 0.6MPa 0.7MPa 70 180 0.2MPa 0.3MPa 0.4MPa 0.5MPa 0.6MPa 0.7MPa 60 160 50 140 Lateral load N 40 120 Lateral load N Point of application L 30 100 20 80 Lateral load F 10 60 40 80 70 60 50 40 30 30 20 Point of application L mm 80 60 40 120 100 Point of application

Escapements Series MIW/MIS

30 20 10 Transfer speed V m/min Transfer speed V m/min Allowable lateral load MIW20 MIS20 MIW12 MIS12 200 0.2MPa 0.3MPa 0.4MPa 0.5MPa 0.6MPa 0.7MPa 70 180 0.2MPa 0.3MPa 0.4MPa 0.5MPa 0.6MPa 0.7MPa 60 160 50 140 Lateral load N 40 120 Lateral load N Point of application L 30 100 20 80 Lateral load F 10 60 40 80 70 60 50 40 30 30 20 Point of application L mm 80 60 40 120 100 Point of application

4/5 Port Air Operated Valve SYJA3000 Series

27 34 B A 13 3 B A 1 1 R1 R2 P 1/8 (A, B port) 2 x 3.2 (For manifold mounting) 17 2 x M5 x 0.8 (Pilot port) 31.5 35 64.1 35 2 x 3.2 (For mounting) Manual override 69.6 14.1 89.2 1/8,1/4 (P , A, B port) Manual override 28 25 21 14 38.1 89.2 54 1/8 (P , R1, R2 port) 40 2 x 1.8 (Bleed port) 25.5 20 12 1.6 P R2 R1 18 22 22 18 11.5 1/4 (R1, R2 port) 31.5 27.2 2 x 1.8 (Bleed port) 63 1483

MXF

10 20 30 10 20 30 40 Load (N) Load (N) Load (N) MXF12 Lr = 30 mm 0.10 0.08 0.08 MXF12-50 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 MXF12-50 0.06 0.06 MXF12-30 0.06 MXF12-30 MXF12-50 MXF12-20 MXF12-30 0.04 0.04 MXF12-20 0.04 MXF12-20 0.02 0.02 0.02 20 40 60 0 0 0 20 40 60 80 20 40 60 Load (N) Load (N) Load (N) 8-6-4 5 Low Profile Slide

Pin Clamp Cylinders

-X 545 C(L)KU32 Series Auto Switch Mounting 2 Auto Switch Mounting Height Applicable cylinder: C(L)KU32-X2321 C(L)KU32-X2322 D-P3DWA 44.5 23.5 D-M9V D-M9WV 40 35 D-A7 40 22 546 Auto Switch Mounting C(L)KU32 Series Auto Switch Mounting Bracket Part No.

VK300

(-Q) (S) 42 (-Q) VV5K3-40 (-Q) (S) 41 (-Q) (S) 42 (-Q) VV3K3-20 (-Q) 21 (-Q) VV5K3-20 (-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.

JXCx-OMT0028CN

CN1CONT . 26 5.4 CN2PC/TB . 27 6.CN4 . 28 1 - 6.1 . 28 6.2 . 29 6.3 . 30 . 30 7.CN1(CONT) . 31 7.1 . 31 7.2 . 33 8.CNTB/PC . 34 8.1 . 34 9.LED . 35 9.1LED . 35 9.2 LED . 35 10. . 36 10.1 . 36 10.2 . 37 10.3 . 37 11.4 . 39 11. . 40 11.1 . 40 11.2 (IN Data) . 46 11.3 (IN Data). 46 11.4 (OUT Data) . 48 12.LEC . 49 12.1GW LEC . 49 12.2GW LEC . 50 13./ . 51 14./ . 52 14.1

0.5

IZF21/31 IZF10/IZF10R Technical Data With automatic cleaning unit IZF21-m-mmSm IZF31-m-mmSm 64 (144) 20.5 (40) 64 (40) (104) 20.5 153 113.4 (195) (155) With adjustable louver IZF21-m-mmWm IZF31-m-mmWm (60) (144) 14 (40) 127 (60) (104) 14 (40) 89 127 89 (195) (155) With filter IZF21-m-mmmU IZF31-m-mmmU (144) (45) 134 5 (40) (45) (104) 5 (40) 95.5 126 87 (195) (155) 18 IZF21/31 Series Dimensions

PF2D

Supersonic cleaning Drying Double-packing Sensor Clean room class 1000 Shipment 381 For Deionized Water and Chemical Liquids Digital Flow Switch PF2D Series RoHS How to Order Remote Type Sensor Unit PF2D5 13 20 1 C Flow rate range Option (Refer to page 391.) 04 20 40 None e-con connector x 1 pc.

CEx-OMI0064

8 18 [MODE], 13 OFF 6 , 8 , 13 17 8 12 11 22 5 18 +/, 16 , 40 - 11 , 18 , , 8 11 [RESET] 10ms 11 [HOLD] [BANK] [MODE] 13 RS-232C 12 RS-232C ,3 18 26 NO.

3 Port Solenoid Valve Rubber Seal Series SY100 1

13 8.7 7.7 (Pitch) n-M3 x 0.5 (A port) 12.6 P = 10.5 n-M5 x 0.8 (A port) 12.6 P = 10.5 (Pitch) M3 M5 L plug connector (L) M plug connector (M) 31.7 (For AC) 30.4 (For DC) 15.6 39.1 (For DC) 45.6 (For AC) 40 (Light/Surge voltage suppressor) (Light/Surge voltage suppressor) 26.4 Other dimensions are same as grommet type.

VHK

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

ZL3-OM00801

No.ZL3-OM00801-A / / ZL3 ZL6 No.ZL3-OM00801-A 2 1. 5 2. 6 3. 7 3.1. 7 3.2. 8 3.3. 9 3.4. 10 3.5. 12 4. 13 5. 14 6. 15 7. 16 8. 20 9. 21 10. 24 11. ,, 25 11.1. 25 11.2. 26 11.3. 26 12. 27 13. 28 1 - No.ZL3-OM00801-A /ZL3ZL6 *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

EXxx-OMZ0016

Registration of Remote 10 (Wireless channel 10) Remote Registration of Remote registration 11 (Wireless channel 11) information Wireless Registration of Remote 12 channels (Wireless channel 12) 8-15 Registration of Remote 13 (Wireless channel 13) Registration of Remote 14 (Wireless channel 14) Registration of Remote 15 (Wireless channel 15) *1: The LED indicator W-MS indicates the system

VHK

L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 L2 Q 18 61.6 58.2 2.0 2.0 29 29.1 44.5 14.5 1 27 22 16.5 26 41 29.1 16.5 3.5 11 1.2 26 23 11 30 54 51 11 M5 M5 M5 VHK-B1A VHKm-01S-M5 VHKm-M5-M5 1 8 18 41 32.6 16.5 3.5 11 44.5 14.5 1 27 22 16.5 26 8.6 1.2 13 57 13 VHK-B1A VHKm-01S-01S 1 8 1 8 32.6 65.2 VHKm-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66 17 VHK-B1A 44.5 14.5

MHS

C C 2 5 3 mm Nm 16 M2.50.45 2 0.3 20 M30.5 2.5 0.6 25 M30.5 2.5 0.6 32 M40.7 3 1.4 40 M40.7 3 1.4 50 M50.8 4 2.8 63 M50.8 4 2.8 80 M61 5 4.8 21 1.

EXxx-OMN0037CN

12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB -20No.EX-OMN0037CN-A -1010 V-55 V-2020 mA AD (ab) [V] [mA] 16 10 -1010 V -55 V -2020 mA F 65535 10.5 5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5 10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS1001FM AS2001FM AS2051FM Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 5 10 20 10 0 5 0 5 20 10 10 0 10 Number of needle rotations Number of needle rotations Number of needle rotations 725 AS-FM Series Construction Component Parts No.