Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

(mm) Model CXS32-10 S SS ZZ Z 10 104 134 40 20 114 144 50 30 124 154 50 40 134 164 50 21-/2210-/11-/12CXS32-20 CXS32-30 CXS32-40 CXS32-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 144 174 60 21-/2210-/11-/12100 194 224 90 CXS32-75 CXS32-100 75 169 199 70 21-/2210-/11-/1221-/2210-/11-/1287 Dual rod cylinder CXSL 1221CXS / 10-/1122Specific product precautions Be sure to read before

IDX-OM-W020

13-1 . 13-1 IDFB Series 2 IDX-OM-W020 i i i 1 () OFF 3 ON OFF i 1 1 3 i-1 IDFB Series i 1 IDX-OM-W020 i i 2 5 i 2 1 i-2 IDFB Series i 2 IDX-OM-W020 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 i-2-2 IDFB Series i 3 IDX-OM-W020 i i 2 6 WARNING !

Rubber seal 5 Port Solenoid Valve Series SYJ5000

50 5000 mm 3 M With lead wire [115 VAC 50/60 Hz] M plug MN Without lead wire 220 VAC 50/60 Hz connector 4 MO Without connector [230 VAC 50/60 Hz] W0 Without connector cable M8 connector For type W, DC voltage is only available.

MXH Series Compact Slide

9 7 22 14 4 11 15 12 3 24 13 23 22 7 4 11 MXH16, 20 (16, 20) 20 6 21 17 2 1 19 5 18 18 8 10 4 7 22 23 13 24 3 12 11 Parts list Parts list Description Material Note Description Material No.

FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

VS 8-2/VS 8-4

SOL.A 1 Station 1 Station 2 Station 3 Station 4 SOL.A 14 SOL.A 2 1 SOL.A 14 15 2 SOL.A 15 3 3 4 5 6 7 8 9 Station 5 16 17 18 19 20 SOL.B 16 SOL.A 4 External pilot port Station 6 SOL.B 17 SOL.A 5 Station 7 21 22 23 SOL.B 18 10 SOL.A 6 11 12 13 Station 8 SOL.B 24 Port plug AXT95419 25 18 mm and 26 mm sizes mixed COM. 13 Connector terminal no.

MHF2

Note 2) Refer to page 12-13-1 for further information on auto switches.

MHF2

Note 2) Refer to page 12-13-1 for further information on auto switches.

Compact Electric Actuator Series LG1

(They can also be validated by parameters.) 6) A sequence should be implemented to turn ON the RDY relay after confirming that there is no trouble with the servo (ALM signal is ON). 13 Series LG1H Nonstandard Motors / Yaskawa Electric Corporation Drivers Dimensions 45 2-6 149 160 6 50 55 130 Summary of input/output signals (connector CN-1/F) Pin No. 1 2 3 4 5 6 7 8 10 13 Pin No. 14 15 16

Series AS-FM/AS-M/ASD-FM

Port threads AS-FM Elbow type R Metric size P.1 New New NPT Inch size Universal type R Metric size P.1 New New NPT Inch size In-line type New New Metric size Inch size P.9 Speed controller (metal body) Cylinder side Tube side AS-M R R Elbow type P.7 NPT NPT Dual speed controller with One-touch fitting (resin body) Port threads Connecting tube ASD-FM Metric size R Universal type New New P.13

RB/RBL/RBQ

34 25 52 80 M27 x 1.5 50 M12 10-18-16

IP80-OM00019

)50% (25)50% (3) 0%100% (26 24 25 26 90 27 25 12.

JXCx-OMT0028CN

200 50 200 3 3 CN2 CN2TB/PC 27 - 6.CN4 6.1 No.

IDX-OM-W093

V . 12-5 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDF60/70/80/90 Series IDX-OM-W093 1 1.1 () 6.2 1.1.1 3 IDF60/70/80/90 Series 1-1 IDX-OM-W093 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDF60/70/80/90 Series 1-2 IDX-OM-W093 1.2.4 IDF60/70/80/90 Series 1-3 IDX-OM-W093 1.2.5 HFC 1-5 HFC 1 2 3 4GWP R134a R407C R410A R404A GWP 1430 1770 2090 3920 4033722 IDF60/70/80/90 Series

PFxx-OMJ0005CN

(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I

MLGC

160 176 125 165 M 8 160 115 4 12 11 142 95 19 18 67 190 210 135 96 200 M10 42 194 35 J K L U I O T GR N S W P GL GQ M Q R V Bore size (mm) 20 25 32 40 93 60 5.5 80 35 16 4 25 26 50 M5 x 0.8 4 50 14 53 105 M6 x 1 112 103 70 9 95 40 20 7 32 31 60 M5 x 0.8 7 60 14 63 125 M8 x 1.25 132 104 70 9 95 40 20 7 32 38 60 Rc 1/8 Rc 1/8 7 60 13 63 125 M8 x 1.25 132 115 82.5 11 115 45 25 8 38 47 70 8

MLGC

160 176 125 165 M 8 160 115 4 11 12 142 95 18 19 96 42 35 67 190 210 135 200 M10 194 P GL GQ GR I J K L M N O Q R S T U V W Bore size (mm) 20 25 32 40 93 60 5.5 80 M5 x 0.8 4 4 35 50 25 14 26 16 53 50 105 M6 x 1 112 103 70 9 95 M5 x 0.8 7 7 40 60 32 14 31 20 63 60 125 M8 x 1.25 132 104 70 9 95 Rc 1/8 Rc 1/8 7 7 40 60 32 13 38 20 63 60 125 M8 x 1.25 132 115 82.5 11 115 8 8 45 75 38 14 47

Refrigerated Air dryer Series IDU/IDF

(C) IDF 1D 30 35 40 50 25 IDF 2D to 240D 30 35 40 45 50 Outlet air press. dew point (C) Ambient temp.

ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 13-9-10