NCA1

CB CD DD E F FL LR M MR R NCA1-P150 3/4 1/2 13/32 2 1/2 3/8 1 1/8 3/4 1/2 9/16 1.63 NCA1-P325 1 1/4 3/4 17/32 3 1/2 5/8 1 7/8 1 1/4 3/4 7/8 2.56 CD dia. DD dia. Clevis Bracket AA 2.3 3.6 1 5/8 2 9/16 0.785 1.265 1/2 3/4 1/2 5/8 3/8 -24 1/2 -20 2 1/2 3 1/2 3/8 5/8 1 1/8 1 7/8 1/2 1 1/16 1/2 3/4 9/16 1 1/16 Part no. BA CB CD CW DD E F FL LR M MR NCA1-CB150 NCA1-CB325 DD dia.

energy saving effect

Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions.

EXxx-OMW0014CN

EX245-DX1 . 13-7 EX245-DX1 No. / SI US1 1 / US1 / / / 2 LED 1 24V3 0V 13.3. EX245-DY1 . 13-8 EX245-DY1 No. SI US2 1 US2 / 2 LED 2/4 3 0V 83 No.EX-OMW0014CN-A 13.4. EX245-LA1/LB1 . 13-9 EX245-LA1/LB1 No.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

SS5Y3-60Stations B (Light/surge voltage suppressor) Manual override (non-locking) Stations 2 3 4 5 6 7 8 9 10 (Station n) (Station 1) 43.3 (3.2) L1 110.5 123 135.5 148 160.5 173 173 185.5 198 33.4 (3) L2 100 112.5 125 137.5 150 162.5 162.5 175 187.5 L3 86 96.5 107 117.5 128 138.5 149 159.5 170 [44.7] L4 12 13 14 15 16 17 12 13 14 38.2 28.2 25.8 20.7 19.2 11 12 13 14 15 16 17 18 19 20 Stations

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

IDX-OM-W017

V 13 V V 12-2 13-1 1. 1 2 2. 3.

NCA1

CB CD DD E F FL LR M MR R NCA1-P150 3/4 1/2 13/32 2 1/2 3/8 1 1/8 3/4 1/2 9/16 1.63 NCA1-P325 1 1/4 3/4 17/32 3 1/2 5/8 1 7/8 1 1/4 3/4 7/8 2.56 CD dia. DD dia. Clevis Bracket AA 2.3 3.6 1 5/8 2 9/16 0.785 1.265 1/2 3/4 1/2 5/8 3/8 -24 1/2 -20 2 1/2 3 1/2 3/8 5/8 1 1/8 1 7/8 1/2 1 1/16 1/2 3/4 9/16 1 1/16 Part no. BA CB CD CW DD E F FL LR M MR NCA1-CB150 NCA1-CB325 DD dia. CD dia.

TABLE OF CONTENTS

T orque 4 : 4.4 LB . in 1 .39 (9.9) RECEPTACLE WITH .37 (9.4) SPACING 1.02 (25.9) .13 (3.3) DIA.

V

for Main & Pilot Pilot Exhaust Internal Pilot Individual Exhaust for Pilot Valve External Pilot Free Mounting Position 0.3 0.7 1.2 Cv Factor M O D E L R E S P O N S E T I M E S E R I E S S Y 3 / 5 / 7 0 0 0 Response Time ms 71 PSI / 0.5MPa Model Configuration W/O Indicator Light With Indicator Light & Surge Suppressor & Surge Suppressor 12 or less 15 or less 2 Position Single 10 or less 13

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Inch Size Holder for speed controller Applicable tubing 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1002FS TMH-01J TMH-03J TMH-07J AS2002FS AS2052FS TMH-07 TMH-09 AS3002FS TMH-10 AS4002FS TMH-13 Tubing size Applicable model Dimensions D2 through Part no.

New

9/32 5/32 9/32 C8 VX220 2 C10 13/64 5/16 C10 25/64 13/64 VX230 3 5/16 C12 25/64 Note) Weight of grommet type.

Fluoropolymer Piping Equipment

136 127.5 49 22 13 50 55 (E, E) (E, E) L1, L1 L2, L2 Panel hole diameter K Inch Size Model Applicable tubing O.D.

EXxx-OMY0006CN

EX245-DX1EX245-DY1 EX600-ZT1 1 88 EX600-ZT1 Fig. 13-1 EX600-ZT1 80 No.EX##-OMY0006CN 13.2. Y Y (EX245-DX1EX245-DY1) Y 2 2 x M12 M12 2 x M8 M12 PCA-1557785 Y (2 x M12 M12) Fig. 13-2 PCA-1557785 81 No.EX##-OMY0006CN PCA-1557798 Y (2 x M8 M12) Fig. 13-3 PCA-1557798 13.3. EX245-FPS1/2/3EX245-DX1EX245-DY1 M12IP65 EX9-AWTS (M12 10 ) Fig. 13-4 EX9-AWTS 0.2Nm 82 No.EX##-OMY0006CN 14. 14.1.

HRX-OM-W038

Press the [SEL] key 13 times. The set screen of data reset is displayed on the digital display. PV SV 3. Select from the table below with [] key or [] key, and confirm by pressing SEL. Select , then all data returns to default setting. The display returns to the main screen.

HRX-OM-O021

Fig. 3-12 Tightening of piping Recommended piping circuit Fig. 3-13 Recommended piping circuit No. Description Size Recommended part no. Note 1 Valve Rc1/2 2 If foreign objects with a size of 20 m or more are likely to enter, install the particle filter.

HRX-OM-R005

Fig. 3-12 Tightening of piping Recommended piping circuit Fig. 3-13 Recommended piping circuit No. Description Size Recommended part no. Note 1 Valve Rc1/2 2 If foreign objects with a size of 20 m or more are likely to enter, install the particle filter.

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

JXCx-OMT0061CN

PLC 5 (PLC) 15ms30ms ->/P.55 12.4 () () (LED() ->/P.13 3.2 ) ->/P.47 11. ->/P.47 11. ->/P.47 11. ->/P.12 3. (CN1: EMG ->/P.12 3. ) 92 - 22. 10.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

26 5 8 22.3 34 M8 X 1.25 M20 X 1.5 41 8 15 116 18 13 28 5 15 24 62 20 Up to 300 7.5 10 33.5 M10 X 1.25 19.5 17 32 6 8 25.3 37 M26 X 1.5 45 8 15 120 22 13 5.5 15 30 62 26 Up to 300 7.5 12 37.5 M10 X 1.25 19.5 17 32 6 8 27.6 M26 X 1.5 39.3 34.5 45 8 15 122 22 13 5.5 15 64 26 Up to 300 14 22 41 8 10 33.6 46.5 21 10.7 47.8 M14 X 1.5 21.5 42.5 M32 X 2 50 11 154 24 16 7 19 88 32 With rod boot

ZU

Pmax P1 Vacuum pressure Qmax Q1 Suction flow rate 13-6-4