Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

For the auto switch mounting position and its mounting height, refer to page 69-20.

Thermo-con/Rack Mount Type

500 0 0 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Pump Capacity (Thermo-con Outlet) HECR002-A When high-pressure pump mounted 0.14 0.10 0.12 Discharge pressure [MPa] Discharge pressure [MPa] Tap water 0.08 Tap water 0.10 0.06 0.08 Ethylene glycol 20% Ethylene glycol 20% 0.06 0.04 0.04 0.02 0.02 0 0 1 2 3 4 0 0 1 2 3 4

Multi-Axis Step Motor Controller

(R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

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IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane

48

(16 x 2) 20, 30, 50 100, 150 38 27.5 8 7.5 3 22 12.5 7.5 11 83 11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD

Fluoropolymer Tubing Variations

How to Order Burst pressure drop curve 1.0 TL0604 Metric sizes 20 Burst pressure drop coefficient 0.8 TIL01 20 Inch sizes 0.6 Length Applicable to both metric and inch size Tubing Model 0.4 Symbol 10 20 50 100 Type Length 10 m 20 m 50 m 100 m 0.2 Roll 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Temperature (C) Straight 2 m 2S Length Applicable to inch size only Eluting fluorine ion

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Figures in body of chart are suggested minimum rod diameters Exposed Length of Piston Rod (IN) Tons 10 20 40 60 70 80 100 120 1/2 3/4 1 3/4 13/16 1-1/16 1 5/8 7/8 1-1/8 1-1/4 1-3/8 1-1/2 11/16 15/16 1-3/16 1-3/8 1-1/2 2 3/4 1 1-1/4 1-7/16 1-9/16 1-3/16 3 13/16 7/8 1-1/8 1-3/8 1-9/16 1-5/8 1-7/8 4 15/16 1 1-3/16 1-1/2 1-5/8 1-3/4 2 2-1/4 5 1 1-1/8 1-5/16 1-9/16 1-3/4 1-7/8 2-1/8 2-3/8 7-1/

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Figures in body of chart are suggested minimum rod diameters Exposed Length of Piston Rod (IN) Tons 10 20 40 60 70 80 100 120 1/2 3/4 1 3/4 13/16 1-1/16 1 5/8 7/8 1-1/8 1-1/4 1-3/8 1-1/2 11/16 15/16 1-3/16 1-3/8 1-1/2 2 3/4 1 1-1/4 1-7/16 1-9/16 1-3/16 3 13/16 7/8 1-1/8 1-3/8 1-9/16 1-5/8 1-7/8 4 15/16 1 1-3/16 1-1/2 1-5/8 1-3/4 2 2-1/4 5 1 1-1/8 1-5/16 1-9/16 1-3/4 1-7/8 2-1/8 2-3/8 7-1/

10

F F MHL2-10D Z-X85 MHL2-16D Z-X85 1 2 1 2 MHL2-10DZ-X85 MHL2-16DZ-X85 25 25 70 60 70 60 20 20 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 50 50 Pressure 0.6 MPa 0.5 MPa 0.5 MPa 15 15 40 40 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 10 10 0.4 MPa 0.4 MPa 0.30 MPa 0.3 MPa 20 20 5 5 10 10 0 0 10 20 30 40 50 60 70 0

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

. 30 10, 20, 30, 40, 50, 75, 100 40 10, 20, 30, 40, 50, 75, 100 Bore size Strokes are available in 1 mm increments by installing spacers in standard stroke cylinders. 10 16 20 25 30 40 10 mm 16 mm 20 mm 25 mm 30 mm 40 mm Port thread type M thread Rc NPT G 10 to 20 Nil 25 to 40 TN TF Series MQQ is not auto switch capable.

IN20267

Daisy Chaining Power and Ethernet . 20 11. Connecting MPCs for Daisy Chaining . 20 11.1. LED Indication . 21 12. Studio 5000 Setup . 23 13. EDS file Rockwell Studio 5000. 23 13.1. Adding a device to Ethernet Rockwell Studio 5000 . 24 13.2. Setpoint . 27 14. Example: Convert the Position to Counts . 27 14.1. Example: Pseudo Code for 100mm MPC mm . 27 14.2.

Rotary Cylinder Series MRQ Size: 32, 40 1

(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 12.5 15 15 20 20 15 17.5 25 30 Q 20 20 20 30 E 58.5 61 61 63.5 61 63.5 63.5 66 71 73.5 11-10-12 13 Rotary Cylinder Series MRQ Flange Style: MRQFS32 Note) M6 x 1 depth 7 Number of mounting screws and distance between screws are different depending on the strokes. Refer to the Mounting screw dimensions (Distinction of stroke) below.

LECA6_C

CN1:. 18 5.1 . 18 5.2 . 18 5.3 . 19 (1) . 19 1 - (2) . 19 (3) . 19 5.4 . 20 1. 20 2. 21 (3) (). 22 6.

LECP6_C

LEC-OM08002 DC24V / / LECP6 Series 1. . 4 2. . 6 2.1. . 6 2.2. 7 2.3 . 8 2.4 (). 9 1. 9 2. 9 3. 9 4ON .10 5().10 6.10 3. .11 3.1. .11 3.2.12 3.3. .13 1 LECP6.13 2 DIN LECP6D.13 3.4.14 1.14 2.14 3.15 4. .16 4.1 CN1.16 4.2 CN2CN3:.16 4.3 CN4I/O .16 1.16 2.17 4.4 CN5I/O .17 5. CN1:.18 5.1 .18 5.2 .18 5.3 .19 (1) .19 1 - (2) .19 (3) .19 5.4 .20 1.20 2.21 3().22 6.

Speed Controller with

Size (Nominal x Length) Quantity Metric size Inch size TMH-23J TMH-01J M3 x 15 TMH-04J TMH-03J TMH-06J TMH-07J M3 x 20 TMH-06 TMH-07 M4 x 25 TMH-08 TMH-09 TMH-10 M4 x 35 TMH-12 TMH-13 1 Series Holder mounting Select the applicable holder/TMH for each speed controller from the table below.

CC

2 32 120 5 33 82.5 CC100-lSl1-lG CC100-lll1-lG 286 386 511 611 836 736 s s s CC100-lLl1-lG 7 13 2 32 120 5 33 92 CC160-lLl1-lG 399 524 624 949 849 749 1049 s s CC160-lLl1-lG 7 20 2.5 46 185 0 29 120 * Hexagon socket head cap screw is used for mounting hole.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

VQ5000

18 ( ) ( + ) Gray None 5 stations 10 23 11 SOL.A 6 ( ) ( + ) Pink None 24 12 SOL.B 19 ( ) ( + ) Orange Black 6 stations 25 Stations are counted starting from the first station on the D side. 13 SOL.A 7 ( ) ( + ) Blue None SOL.B 20 ( ) ( + ) Red White 7 stations SOL.A 8 ( ) ( + ) Purple White SOL.B 21 ( ) ( + ) Brown White 8 stations SOL.A 9 ( ) ( + ) Gray Black Connector terminal

IDX-OM-W093

IDF70-20 IDF80-20 IDF90-20 2) 12AWG (3.5mm 2) 10AWG (5.5mm 2) 16AWG (1.25mm 911 mm 1823 mm IDF60-30 IDF70-30 IDF80-30 IDF90-30 2) 14AWG (2mm 2) 16AWG (1.25mm 911 mm 1823 mm IDF60-20 IDF70-20 IDF80-20 IDF90-20 M3.5 M4.0 1.25-3.5 3.5-4 5.5-4 ( 8.5mm ) ( 9.5mm ) IDF60-30 IDF70-30 IDF80-30 IDF90-30 M3.5 M3.5 1.25-3.5 2-3.5 ( 8.5mm ) ( 8.5mm ) IDF60/70/80/90 Series 3-5 IDX-OM-W093 M3.5

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 9 12 13 13 16 16 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 10 14 18 18 22 26 22 30 35 35 40 40 Wl Stroke range (mm) Bore size (mm) ZZ S ZZ WL W V S RF P NB N MO 32 40 50 63 80 100 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 151 165 180 180 226 226 100 110 118 118 150 150 143 152 168 168 208 208 24 24