Stopper Cylinder

5 41 4 40 5.5 9 depth 7 1/8 1/8 1/8 24.5 24 44 28 9 15 50 107 54 25 64 8 10 53 7 50 4 50 6.6 11 depth 8 1/8 1/8 1/8 24.5 24 56 28 9 19 B + stroke R R * Refer to pages 572 and 573 for the auto switch proper mounting position and mounting height. * For the single acting type, a One-touch fitting is on the rod end only. * The position of the width across flats (K) is arbitrary and is not

MXQ

(N) Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 15 23 30 38 45 53 75 OUT IN 45 68 90 113 136 158 226 12 6 34 51 68 85 102 119 IN 170 80 121 161 201 241 281 OUT 402 16 8 60 91 121 151 181 211 IN 302 OUT 628 126 188 251 314 377 440 20 10 IN

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

VCW

Made to Order Specifications Non-leak (10 6 Pam 3/sec), vacuum (0.1 Paabs) specifications VCW X35 A L Oil-free specifications VCW X40 17-2-53 6 Series VCW Construction N.C.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

SS5YJ3-32, S32Station -M5 Stations L1 L2 SS5YJ3-32, S32Station -C4 3 52 44 6 83.5 75.5 8 104.5 96.5 10 125.5 117.5 20 230.5 222.5 2 41.5 33.5 4 62.5 54.5 5 73 65 7 94 86 9 115 107 11 136 128 12 146.5 138.5 13 157 149 14 167.5 159.5 15 178 170 16 188.5 180.5 17 199 191 18 209.5 201.5 19 220 212 Stations L1 L2 3 53 44 6 84.5 75.5 8 105.5 96.5 10 126.5 117.5 20 231.5 222.5 2 42.5 33.5 4 63.5

2/3 Port Valve

80.5 74.5 79.5 82.5 125.5 142.5 24.3 63 124 2.3 52 42 25 26 28 34 4.5 14 55 60.5 73 1 84 100 92 108 135.5 137 153 154 170 83.5 89.5 88.5 94.5 91.5 97.5 28.3 33.3 80 90 2.3 2.3 62 72 50 60 30 35 31 36 35 40 43 49 5.5 6.5 17.5 20 151.5 32A, 40A, 50A Port size Main Port Rc(PT) Pilot port A B C D E F G H I J K L M Model Rc(PT) 1 8 1 4 1 4 VNA5-32A VNA6-40A VNA7-50A 1 4 1 105 120 140 77 96 113 53

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

ZH15S Max. vacuum pressure: 88 kPa Exhaust Characteristics Flow Characteristics ZH15L Max. vacuum pressure: 53 kPa Exhaust Characteristics Flow Characteristics Vacuum pressure Vacuum pressure Suction flow rate (/min (ANR)) Air consumption (/min (ANR)) Suction flow rate (/min (ANR)) Air consumption (/min (ANR)) Air consumption Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa

ZMA

53 53 53 60 40 60 40 40 40 40 27 27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction flow rate 20 13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics

MGP

MGG 42 29 11 7.5 8 8.5 9 M4 X 0.7 10 12 13 15 M4 X 0.7 4.3 4.3 5.6 5.6 M5 X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

Actuation: A (4-Position Dual 3 Port Valves, N.C./N.C.), Electrical Entry: LL (L-type Plug Connector w/Cover), Lead Wire Length: 20 (2000mm), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: T (NPTF)

Actuation: 2 (2-Position Double), Electrical Entry: TT (Terminal Type), Lead Wire Length: 100 (10000mm, Semi-standard), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: T (NPTF)

Actuation: 3 (3-Position Closed Center), Electrical Entry: TT (Terminal Type), Lead Wire Length: 100 (10000mm, Semi-standard), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: T (NPTF)

Actuation: 4 (3-Position Exhaust Center), Electrical Entry: TT (Terminal Type), Lead Wire Length: 100 (10000mm, Semi-standard), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: T (NPTF)

Actuation: A (4-Position Dual 3 Port Valves, N.C./N.C.), Electrical Entry: L (L-type Plug Connector), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: T (NPTF)

Actuation: A (4-Position Dual 3 Port Valves, N.C./N.C.), Electrical Entry: TT (Terminal Type), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: T (NPTF)

Actuation: 2 (2-Position Double), Electrical Entry: LL (L-type Plug Connector w/Cover), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: T (NPTF)

Actuation: A (4-Position Dual 3 Port Valves, N.C./N.C.), Electrical Entry: LL (L-type Plug Connector w/Cover), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: T (NPTF)

Actuation: 2-Position Double, Electrical Entry: Terminal Type, Lead Wire Length: 10000mm, Semi-standard, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: NPTF, Bracket: -

Actuation: 3-Position Closed Center, Electrical Entry: Terminal Type, Lead Wire Length: 10000mm, Semi-standard, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: NPTF, Bracket: -