3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Aluminum die cast Body q Stainless steel Spool/Sleeve Metal seal w Aluminum/NBR Spool valve Rubber seal Resin Piston e Pilot valve r 2.10-7 VQZ100/200/300 Body Ported Dimensions: VQZ100 Valve single unit C6: One-touch fittings for 6 C4: One-touch fittings for 4 C3: One-touch fittings for 3.2 2-C3, C4, C6, M5 Grommet (G): VQZ115-lGl-C3, C4, C6, M5-PR 10 10 (2) M5: M5 thread 53 13.8 6 A 2

IIIIIII

F O F ' 14 33 lbs (6 5 kg) T T 1 2 " '75 PSIG (5 Kgf/cm2) A B c D E F G H J K il 6.97 (1771 6.26 (159) 5.98 (1521 2.13 154) 2.91 (74\ 2.O9 (53) 2.76 (70) 0.63 (16) (1e) 0.75 0.43 ( 1 1 ) 1.24 131.5 Millimeters in Parentheses MECHANICAL VALVES DIMENSIONS Series NVM NVM220-N02-01 230-N02-01 230-N02-02 F O F , I 529 lbs (2+kg) F O F 4,85 lbs (2 2ko ) P T 2 7 6 i n ( 7 m m ) O T 0 197 in (smm

17

A 65 82 98 B2 53 64 76 B3 78 88 108 C1 14 20 22 C2 39 44 54 F 96 111 131 E1 1 1 1 E2 1 1 1 MY-J25 MY-J32 MY-J40 MYAJ25 MYAJ32 MYAJ40 63 73 93.5 61 72 88 30.5 36 44 40 46 55 73 84 104 14 14 19 6 6 8 Note) Floating brackets consist of a set of right and left bracket.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

53 77 44.5 143.5 154 154 MGF The dimensions other than indicated below are the same as those of indicated on p.3.8-8.

VCW

by connecting 2 station and 3 station bases. 2stns. x 1 3stns. x 2 2stns. x 2 + 3stns. x 2 2stns. x 2 + 3stns. 2stns. + 3stns. x 2 Dimensions (mm) Electrical entry A B C D E G H J Z Model Grommet Conduit DIN connector Conduit terminal Q R S T U V W N X Y VV2CW2 49 20 24.5 28 4.5 38 17.3 34.5 65.5 22 45.5 44 43.5 46 58 41.5 66 99 77 VV2CW3 57 25.5 28.5 30 5.5 42 19.3 38.5 75.5 24 55 45.5 53

EX120/121/122

Wire color Brown Blue 1 3 4 Black 1 3 12 4 M8 SW11 Wiring Plug connector pin assignment PCA-1557743 Fieldwireable connector (M12) 53 Terminal no. Wire color 2 1 Brown 1 2 3 4 14.8 16.3 White Blue Black 4 3 M12 SPEEDCON Plug connector pin assignment A-coded (Normal key) Wiring PCA-1557756 Fieldwireable connector (M12) 55 Terminal no.

SZ3000

Note C6: With One-touch fitting for 6 C8: With One-touch fitting for 8 L6: With One-touch fitting for 6 (Elbow fetching upward) L8: With One-touch fitting for 8 (Elbow fetching upward) B6: With One-touch fitting for 6 (Elbow fetching downward) B8: With One-touch fitting for 8 (Elbow fetching downward) q SUP/EXH block assembly SZ3000-50-2Aw e r t y SZ3000-53-8A SZ3000-53-7A SZ3000-114-3A SZ3000

H/DL/L/LL

H06-03 31.1 31 H08-01 25.1 16 20 8 14 H08-02 16 29.1 21 17 14 H08-03 31.1 30 17 34 10 17 H10-02 29.1 28 Connection thread H10-03 17 31.1 37 H10-04 34.1 53 H12-02 30.1 30 22 17 17 22 51 12 19 H12-03 17 31.1 39 H12-04 34.1 Male Elbow: DL H1 (width across flats) H2 (width across flats) Connection threads R Model Applicable tubing O.D.

VS7-6

model Applicable solenoid valve Regulation port Max. operating pressure Set pressure range Ambient and fluid temperature Pressure gauge port size Weight (kg) Air supply side eff. area (mm2) S (P=0.7MPa, P1=0.5MPa) ARB350 VS7-8 A B P 1.0MPa (1) VQ5 VQZ 0.1 to 0.83MPa (2) 5 to 60 oC (3) VQD 1 8 0.83 31 34 27 27 40 31 60 mm2 P A P B A EA B EB VFS Air exhaust side eff. area S (P2=0.5MPa) VS 53

90

Fully open 10 Manual override (Release valve) 10.5 (Approx. 300: Lead wire length) 79 (Ejector system) 84 (Vacuum pump system) Manual override (Supply valve) U side D side Number of stations n 2 3 1 Individual exhaust port 6 Vacuum break flow adjustment needle PS and PD port dimensions 1,4 Common supply (PV) port 1 Metric size: 2 x 8 D Inch size: 2 x 5/16" 2 x Common supply (PD) port 4 62 53

ZP

32 40 50 ZP50U 53 7 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 0.8 0.8 0.8 1 3 3 3.5 4 4 4.5 6.5 7.5 Put in the symbol for material at the end of model no.

Step Motor Controller (Servo / 24 VDC)

After the parameter is changed, it is necessary to reapply the power. input 53 - The motor speed exceeds a specific level due to an external force, etc. Make improvements such that the motor speed will not exceed the maximum speed of the electric actuator.

Compact Cylinder with Air Cushion and Lock Series RLQ

32 221 351 326 373 263 63 22 53 32 288 523 498 518 263 Bore size (mm) Magnet Thread Nut Rod end male thread Foot style (including mounting bolt) Rod flange style (including mounting bolt) Head flange style (including mounting bolt) Double clevis style (including pin, retaining ring, bolt and flat washer) With bypass piping Calculation (example) RDLQD32-20M-B Basic mass: RLQA32-20. 531 g

Series VS

119 B 9 C 50.5 D 48.5 E 58.5 F 87 G 105 H 20.5 I 26.5 J 20.5 K 30.5 L 58.5 M 22 N 45.5 O 52 P 81 Q 49 R 18 S 5.5 T SIZE 1 SIZE 2 SIZE 3 189.5 125 9 52 52.5 64.5 96.5 112 26 34 26 37 64.5 31.5 58.5 67.5 97.5 58.5 20.5 3 41 52 41 52 92 36 69 82.5 121 74 28 4 234.5 142.5 13 77.5 79.5 92 108 123.5 CC 188.5 199 244 SIZE 3 SIZE 2 57.5 1.5 U V 14 25 43 W X 2 42 Y Z 133 AA BB SIZE 1 1 73 56 35 53

Drain Separator for Vacuum Series AMJ

16 41 40 23 6.5 8 53 2.3 158 (160) 53 1/4, 3/8 AMJ3000 70 205 (206) 18 70 17 50 54 26 8.5 10.5 70 2.3 194 (195) 3/8, 1/2 AMJ4000 90 284 (285) 24 90 23 70 66 35 11 13 90 3.2 273 (274) 3/4, 1 AMJ5000 Note) ( ) is the case for metal bowl. 13-13-5

Process Valve Series VNA

indicator light: DL) Pilot port 12(P1), 10(P2) L (Conduit terminal: T) Manual override (Non-locking push type) J (DIN terminal: D) I (Conduit: C) H (Grommet: G) G (Air operated) Main port (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Note) K L M Model VNA5-32A VNA6-40A VNA7-50A 1 8 1 4 1 4 1 4 1 105 120 140 77 96 113 53

Micro Mist Separator Series AFD20/30/40

.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S (mm) With bracket Accessory specifications With auto-drain Port size Standard specifications Model M 2.3 2.3 2.3 2.3 B 115 170 204 208 L 40 53 70 70 H 22 23 26 25 J 5.4 6.5 8.5 8.5 K 8.4 8 10.5 10.5 G 27 40 54 54 P 57 73 73 E 18 16 17 14 F 30 41 50 50 D 40 53 70 70 A 40 53 70

Mist Separator Series AFM20/30/40

.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 10 One-touch fitting O S 1/4 Width across flats 17 (mm) With bracket Accessory specifications Port size Standard specifications With auto-drain Model L 40 53 70 70 M 2.3 2.3 2.3 2.3 B 115 170 204 208 K 8.4 8 10.5 10.5 G 27 40 54 54 H 22 23 26 25 J 5.4 6.5 8.5 8.5 F 30 41 50 50 D 40 53 70 70 P 57 73 73 E 18 16 17 14 C 10 14 18

2/3 Port Valve for Various

# $ VXR215 VXR226 VXR227 VXR238 2 0 Material 2 0 2 0 . ' + . / . 01$ 2 0 VXR239 2 0 17-3-53 The VX series will be revised shortly. Series VXR21/22/23 Normally Closed (N.C.)

C85

cushion only) With rod boot CP95 Wh KK NCM C NCA e DKA K -X 9 Rod cross section 9 I f AM 20h (mm) Data KK BE EE N2 KW NA SW S KA KV ZZ Z G1 HR K XC RR G2 WA Bore C AM CD H9 D EW F WB H N1 U WH ND h8 4H9 8 M12 x 1.25 M5 x 0.8 M4 x 0.7 15 4.2 46 19 86 6 76 64 7 10 12 28 16 4 8 10 6 7 5 11.5 9.5 12 12 16.7 7 (5.5) 8 (5.5) 8 (5.5) 5 (5.5) 11.5 (13.5) 12.5 (12.5) 12.5 (12.5) 9.5 (13.5) 46 (53