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(c)When a sensor is not connected.

Avoid using in a place that exceeds an ambient temperature range. b. Avoid using in a place that exceeds an ambient humidity range. c. Avoid using in a place where condensation occurs due to a drastic temperature change. d. Avoid using in a place in the presence of corrosive or explosive gas or where there is a volatile combustible. e.

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

bracket) are included with the above parts. 3 Series VCB Direct Operated 2 Port for Heated Water Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical

CD-P11 CD-P12 2 Contact Protection Box/Dimensions Contact SMC when using built-in contact protection circuit style (D-A34[A] [C], D-A44[A] [C], D-A54/A64, D-B54/B64, D-A59W, D-B59W) in the following conditions: q The wiring length to load is more than 30m. w When using PLC with large flow current Contact Protection Box/Specifications Load voltage CD-P11 CD-P12 Part No. 100V AC max. 200V AC

The type without the unit switching function will have a fixed SI unit (l/min, or l, m or m x 10). Output (OUT1) Indicator DOWN Button ( Button) Lights up when OUT1 is ON. UP Button ( Button) Use when decreasing a setting value. Use when increasing a setting value. MODE Button ( Button) SET Button ( Button) Use when changing a function. Use when selecting a function.

M/C Makes it possible to monitor the air flow from the main line to each branch line. A COM COM COM B DC12V GND F.G. R.S. HOLD BANK1 BANK2 MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

ON () (n1Ln1H)ON (35 ) hysteresis 35 (0FF)(ON)(OFF)(ON) 5R.D.(5) () (01 MPa 0.001 MPa 1/1000) () () F // () -15No.PS-OMU0008CN-D (20 ) () 0.50.05Nm ,, <> A(ZS-46-A1) 38L A <> C(ZS-46-E) C 310L -16No.PS-OMU0008CN-D <> (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -17No.PS-OMU0008CN-D <> AB (ZS-35-B) +(ZS-35-E) B A -18No.PS-OMU0008CN-D 812 Nm -19No.PS-OMU0008CN-D () TU0425( 4 2.5) -20No.PS-OMU0008CN-D

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

surface)) Low-noise fan: 48 dB(A) (Measured at a distance of 300 mm from the workpiece), Rapid static neutralizing fan: 57 dB(A) Offset voltage (Ion balance): 13 V With alarms for Incorrect high voltage, Maintenance warning With flow rate adjustment function (IZF10R) Based on ANSI/ESD-STM3.1-2006 standards 6 C O N T E N T S IZF21/31 IZF10/IZF10R Technical Data IZF21/31 Series IZF10/IZF10R

Body Size: 20, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 02 (1/4), Option: Standard, Attachment: SV (S + V), Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: Standard

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: Rc1/4, Piping Entry Direction: Straight, Output Specification: C [1 NPN Outputs + Analog (1 to 5 V)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: Rc1/4, Piping Entry Direction: Straight, Output Specification: C [1 NPN Outputs + Analog (1 to 5 V)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: w/o Lead Wire w/Connector, Option: -

Body Size: 20, Thread: Rc, Port Size: 02 (1/4), Option: Standard, Attachment: S (Pressure Switch), Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: Standard

Body Size: 20, Thread: Rc, Port Size: 02 (1/4), Option: Standard, Attachment: SV1 (S + V1), Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: Standard

Body Size: 20, Thread: Rc, Port Size: 02 (1/4), Option: Standard, Attachment: V (3-Port Valve for Residual Pressure Release; Mounting: AF+AR+V), Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: Standard

Body Size: 20, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 02 (1/4), Option: Standard, Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: Standard, Made to Order: X406 (0.4 MPa Setting)