MHZ

2 w i @5 !4 e !7 !1 @4 !5 !6 r t u q @3 !3 @0 !9 !

CNG

t t t B1 H1 Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Applicable bore size (mm) Part no.

ZP

t Component Parts No.

Stroke Reading Cylinder and Counter

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

Compact Manifold Regulator

t y u A B N 1.

High Vacuum Angle Valve, XL Series

5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi) XLA Normally closed XLC Double acting (dual operation) Valve type Model 1200 1200 1000 1000 800 800 T msec T msec 600 600 Bellows seal 400 400 200 200 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

4 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) e t q r w w q t r A B A B SY SYJ u u R P R R P R SX y VK 3 position closed center/exhaust center/pressure center VZ 3 position closed center VF (A) 4 (B) 2 w t q r VFR 5 (R) 3 (R) 1 (P) 3 position exhaust center A B (A) 4 (B) 2 VP7 5 (R) 3 (R) 1 (P) VP4 3 position pressure center u (A) 4 (B) 2 R P R (This construction

CQS

Long stroke Standard stroke Without auto switch With auto switch A Long stroke (mm) Standard stroke (mm) Bore (mm) C D E OA OB Q RA RB T H I K M N With/Without auto switch A L F 7.5 7.5 9 11 B 32 32 41 44 A L 3.5 3.5 4.5 5 B 22 22 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 F 5 5 5.5 5.5 12 16 20 25 45.5 13.5 25.5 5 to 30 5 to 30 5 to 50 5 to 50 35 to 100 35 to 100 75 to 200 75 to 300 6 8 7 12

2/3 Port Valve

Description VNC811-65F VNC911-80F e FPM NBR Plate assembly Valve seal t Pilot solenoid valve VN8-A3CA VN8-A3CB VN9-A3CA VN9-A3CB VO301-00T-X302(Refer P.4.2-27for How to Order) 4.2-26 VNC How to Order Pilot Solenoid Valve Valve size 1 Valve sizes 2 to 9 SF4 1 D Z 23 VO301-00 T X302 Coil rated voltage 1 2 3 4 5 6 7 9 Manual override A B Indicator and surge voltage suppressor S Z Coil rated

MQQ

TH TY TX TV TW 2-TC ZZ + Stroke (mm) Bore size (mm) BB CD CX GB H NB R U Z ZZ S 12 3.3 3.3 17.5 27.5 22 8 106 117 6 70.5 5 12 3.3 3.3 19 28 24 8 101 112 10 65 5 18 5 6.6 24 30 30 10 114 128 16 74 8 T-bracket related dimensions Note) Applicable bore size (mm) Part no.

Integrated Controller

10 15 0 5 10 15 20 25 0 1 2 3 4 5 6 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L8 [mm] L8 [mm] L8 [mm] L8 [mm] 600 600 600 600 Z 400 400 400 400 Mep m 200 200 200 200 0 0 0 5 10 15 0 0 0 5 10 15 0 5 10 15 20 25 0 1 2 3 4 5 6 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

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Modular F.R.L. Unit

N.C. 0.2MPa Note 2) AD38 AD38NNote 6) AD38 AD38NNote 6) AD48 AD48NNote 6) AD48 AD48NNote 6) Note 3) AD37 AD37NNote 6) AD37 AD37NNote 6) AD47 AD47NNote 6) AD47 AD47NNote 6) Float type auto drain Y300 IS1000M-30 Y300 IS1000M-30 Y400 IS1000M-40 Y500 IS1000M-50 Spacer Pressure switch Note 5) Note 4) Note 5) 01 (02) Y310(01) 02 Y510(02) 03 Y310(01) 02 Y410(02) 03 T-interface Y210Note 5) 02 03

Air Cylinder NCQ7 Series Compact Cylinder

400 (4') Auto-switch Mounting Kit 056-150 BQ-z 20G400 BQ-3 Series NCDQT Magnet Center D, S, DC Type T Type Borc D Type S T y p e ' DC Type ' -T rtpe A B , " , ,.

asilltr

400 (4') Auto-switch Mounting Kit 056-150 BQ-z 20G400 BQ-3 Series NCDQT Magnet Center D, S, DC Type T Type Borc D Type S T y p e ' DC Type ' -T rtpe A B , " , ,.

7ND9071en

J Applicable to 6. sign "N", "N7", "X", "X7", "Z", "E1" ,"E2" or "E7". Y Special construction. 64 7 ND90 71 en INTELLIGENT VALVE CONTROLLER ND7000 1. 2. 3. 4. 5. 6. 7. *) 8. 9. ND 7 1 03 H X T / I02 1. PRODUCT GROUP 6.

3 Port Solenoid Valve/

release valve X538 VP 4 1 5 4 R 5 D Z 03 M A Dual residual pressure release valve with soft start-up function X555 VP 4 1 5 4 5 D Z 03 M Throttle Thread Series Nil Variable throttle 10 1 xed orice 15 1.5 xed orice 20 2 xed orice Nil Rc F G N NPT 5 VP500 7 VP700 Body 2 Body ported 4 Base mounted VP700 only Note) X536 only body ported (option2).

PF2A/PF2W

ZSE ISE PSE Z I SE3 Sensor 1 l/min 5 l/min 10 l/min 20 l/min 50 l/min 100 l/min 200 l/min 500 l/min Flow rate range PS 1 l/min 10 l/min Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com PF2A510 0.5 l/min 10.5 l/min ZSP 5 l/min 50 l/min PF2A550

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of

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O OIN cffnector type t . 'i,-.1-)^' l z N F Noz l!