Compact Hydraulic Cylinder

5 V 3-wire (NPN equiv.)

3 Port Solenoid Valve Rubber Seal Series SY100 1

For manifold type 30, 31 Large flow type (Cv: 0.012) 1 SY1 3 A 5 L M3 : Body ported Large flow type (Cv: 0.012) 5 SY1 4 A M 1 : Base mounted 3 port Rated voltage Port size 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Nil: Without sub-plate M3: With sub-plate Sub-plate type For manifold type S41 Large flow type (With gasket and screws) Electrical entry Manual override 24 V, 12 V, 6 V, 5 V, 3

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

and speed of 500mm/s.

CG1

5 !6 !7 !8 !

Series CQ2

(different sides, same side) 10 (0.4) 5 (0.2) 15 (0.6) 1 pc. 5 (0.2) 5 (0.2) 10 (0.4) Theoretical Output/Double Acting Type OUT IN Unit: N Operating Pressure MPa (psi) Bore size (mm) Operating direction 0.7 (101.5) 0.6 (87) 0.5 (72.5) 0.4 (58) 0.3 (43.5) 0.2 (29) IN 16933 14514 12095 9676 7257 4838 180 OUT 17812 15268 12724 10179 7634 5089 IN 21112 18096 15080 12064 9048 6032 200 OUT 21991

MLGC

Maximum piston speed: 500mm/s Able to operate at 50 to 500mm/s, if within the allowable kinetic energy range. MGG Characteristics MGC MGF Air cushion provided as standard equipment Enables the impact to be absorbed at the stroke end when the cylinder is operated at high speeds.

Angular Air Gripper Series MHC2/MHCA2/MHCM2

5 !4 u Parts list No. Description Parts list No.

Multi-Axis Step Motor Controller

5 !6 No.

COQ2BP

M1 0Xl.5 15 50 131 20 28 22 SO.6 44 B " M l 0)(1.5 M10)(I .S 63 138. 5 18 124 .5 SO.6 44 I. 8 Ml0Xl .5 15 20 30 22 " M12xl .75 M1 2x 1.75 lB 150 27 M1 6X2.0 21 80 168 22 38 28 64 56 18 10 10 0SM:: Series CDQ2BP High Magll8lic Field Resistance ," , [).P70 ' , D-~i4,,;'; ' ; ::~::Y_iidiz!C:::i Auto SWitch No.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

) (44) W T R (Y) Z T 25 IN port 2-3/8 l=280 l=300 (V) (X) 2.5 (N) (U) E C D G Q S A C B L1 L2 16 L3 D side U side Stations 1 2 3 4 5 n 21 16 H H P=J (Pitch) OUT port n-1/4 n-1/8 2 5.5 : Thread type L dimensions (mm) n (stations) Model Dimension 4 3 5 9 2 6 10 7 8 138 103.5 172.5 310.5 L1 69 207 345 241.5 276 VV2CW2 150 115.5 184.5 322.5 L2 81 219 357 253.5 288 162 127.5 196.5 334.5 L3 93

IDX-OM-W094

IN IDFA60/70/80/90 Series 4-1 IDX-OM-W094 / 4.3 OFF 4.4 3 3 6 4.5 OFF z z z z z z 4.6 z 24H z IDFA60/70/80/90 Series 4-2 IDX-OM-W094 5 1 0 OFF 501015 () 5.1 6 z z z z z z IDFA60/70/80/90 Series 5-1 IDX-OM-W094 5.2 5.2.1 5.2.2 1 1 OFF INOUT O : O IDFA60/70/80/90 Series 5-2 IDX-OM-W094 30 O 2 O DUPONT KRYTOX GPL207 S O AD52-A 1 KA00463 O 1

Ionizer

10 5 5 0 0 500 1500 2000 0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Series AF modular style air filter is a cost effective, clean looking solution to your filtration needs. Its' modular design allows connection with other SMC air preparation equipment. The series is available in six size options with a wide range of accessories.Modular air filter , Prevents contamination , Lighter weight than old style modular AF , Thickness reduction of resin case provides

Series AF modular style air filter is a cost effective, clean looking solution to your filtration needs. Its' modular design allows connection with other SMC air preparation equipment. The series is available in six size options with a wide range of accessories.Modular air filter , Prevents contamination , Lighter weight than old style modular AF , Thickness reduction of resin case provides

CG5-S

218.6 KA 4-J LT C0.1 63 22.4 19.8 18.8 52.6 7.9 1/2-20 183.6 198.6 218.6 NA S + Stroke Z + Stroke LZ + Stroke LP LG LF LV LX H 80 4-LD 5/8-18 25.4 22.9 23.9 63.5 9.7 225.6 248.6 282.6 100 3/4-16 31.8 29.3 27.8 69.9 10.7 233.9 256.9 290.9 80 and 100mm-X165US are a future release.

MXU

MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 4.8 M4 x 0.7 2.5 6 IN port OUT port (2 on both sides) M4 x 0.7 2.5 6 8-3-5 6 Series MXU Dimensions: MXU6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 45.5

MXU

(2 on both sides) M4 x 0.7 2.5 6 8-3-5 6 Series MXU Dimensions: MXU6 (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 45.5 46 37.5 14 20 10 50.5 51 42.5 14 20 15 55.5 56 47.5 24 25 20 60.5 61 52.5 24 30 25 65.5 66 57.5 34 40 30 70.5 71 62.5 34 40 35 8-3-6 7 Compact Slide Series MXU Dimensions: MXU10 MX MTS MY CY MG CX D-X 20Data (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 52.5 53 41.5

Ejector Valve Unit Series ZYY/ZYX 1

LOZ 10 X3 ZY 5 M Z S 15 M ZX Series Wiring specifications (Vacuum switch) X3 SX3000 ZR Lead wire length 0.6 m Nil L C CL CN Grommet type Lead wire length 3 m Rated voltage ZM Lead wire length 0.6 m DC specifications Connector type Lead wire length 3 m Connector type 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC ZH Output specifications (Vacuum switch) ZU Courtesy of Steven Engineering, Inc.-

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.