VQZ1000/2000/3000

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB/CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQZ1121-C6 Courtesy of Steven Engineering,

Pulse Valve

MOperation sequence diagram M Operation sequence diagram 4 output points Two-time hitting only for CH2 ON for 1 s OFF for 2 s Stop signal ONt For CH1 OFFt CH2 OFFt CH3 Power supply ON time CH4 2 s 1 s tA tA 1 s CH1 2 s 2 s 2 s 2 s OFFt 1 s 1 s 1 s 1 s CH2 2 s Two-time hitting 1 s CH3 2 s 1 s CH4 Power switch ON (Output start) Power switch OFF (Output stop) Cascade Connection (Multiple-board

Escapements Series MIW/MIS

cylinder diameter. 12 12 1 A S D F9NV S MIW Double finger type 20 30 1 A S D F9BV S Single finger type MIS Scraper Cylinder bore Nil S No Yes Number of auto switches 12 2 pcs. 1 pc. 12mm 20mm Nil S Stroke adjuster 20 Type of auto switch Nil A No Yes Stroke Without auto switch (built-in magnet) Nil 10 20 30 10mm 20mm 30mm Refer to the table below for auto switch part numbers.

Multistage Ejector (N)ZL Series

reached89.3kPa Vacuum pressure in tank [kPa] 80kPa 80kPa Vacuum pressure in tank [kPa] 80 80 66.7kPa 66.7kPa 70 70 60 60 53.3kPa 53.3kPa 50 50 40kPa 40kPa 40 40 26.7kPa 26.7kPa 30 30 20 20 13.3kPa 13.3kPa 10 10 0 0 1 2 3 4 5 6 7 8 9 10 11 12 1 2 3 4 5 6 Time to reach vacuum [S] Time to reach vacuum [S] Viewing the graphs The graphics indicate the time required to reach a vacuum pressure

5 Port Solenoid Valve SY Series

Rated voltage (with connector and 2 of sockets only) Lead wire length Nil 300 mm 6 600 mm Electrical entry 5 24 VDC 6 12 VDC 10 15 20 25 30 50 1000 mm G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm V 6 VDC S 5 VDC L With lead wire L plug connector R 3 VDC LN Without lead wire 50 60 1 100 VDC Hz LO Without connector With lead wire Without lead

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Rail mounting hole pitch 12.5 C 9 8 7 6 5 4 3 2 1 0 No.

4/5 Port Air Operated Valve Series SYJA3000 1

M5 x 0.8 (Piping port) (Piping port) With fiflter (80 mesh) 21.5 R1 P 8.5 6 6 2-1.8 (Bleed port) 17 17 15 R2 21 With fiflter (80 mesh) 24 32 45.5 3 position closed center/exhaust center/pressure center SYJA5 20-M5 3 position closed center/exhaust center/pressure center SYJA5 40-01 3 4 5 3 4 5 28 2-4.3 2-M5 x 0.8 2-M5 x 0.8 37.5 23 (Pilot port) (For mounting) (Pilot port) A B 11 20 23 5 3

CEx-OMI0064

), NPN () CEU5 OUT (5m ) CEU5B COM (DC30V ) CEU5-D CEU5B-D PNP () CEU5P (5m ) OUT CEU5PB (DC30V ) COM CEU5P-D CEU5PB-D 6-5 RS-232C :EIA RS-232C RS-232C RS-232C S D R D S G LT1181 F G LT1181 R S C S D R E R 11 - 6-6 , (1)CEU5 ,CE1-R** (2),,,5m (3), (4), (5)CEU5 (6), (7)CEU5 ,10cm (8)EMC (2004/108/EC),DC24V (CEU5**-D)(CE1 ) (CEP1 ) 12 - 7 7-1 CEU5 3 ,8 7-1-1 ,,() (ON )

VEX1

(Example) VVEX2-2-7-02N VEX3222-1LN 6 pcs. VEX1-17 1 pc. VVEX4-2-6-A VEX3420 5 pcs. VEX4-5 1 pc.

Serial Transmission System Series EX250 Series EX500

Stations N R S 01 1 station Note 5) Note 6) The maximum number of stations differs depending on the electrical entry.

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm Scale: 80% With auto switch: MDSUA3-S 1) 24 : When using D-90, 90A, S99, S99V, S9P, S9PV, T99, T99V 30 : When using D-97, 93A 2) 60: When using D-90, 90A, 97, 93A 69: When using D-S99, S99V, S9P, S9PV, T99, T99V 15.5 45 29 Angle adjustment bolt 2-M5 x 0.8 (Port position: Side port type only) A port B port 1 24 2 60 (69) 18.5 34 D-97, 93A 15 30 6 Series MSUA Rotary

SL5200

6 7 8 9 10 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

Output mode Hysteresis, Window comparator, Error output, Output OFF Switch operation Normal output, Reversed output Maximum load current 80 mA Switch output (SIO mode) Maximum applied voltage 30 V (NPN output) Internal voltage drop (Residual voltage) 1.5 V or less (at load current of 80 mA) Delay time*1 1.5 ms or less, variable from 0 to 60 s/0.01 s increments Hysteresis Hysteresis mode Variable

Compact Hydraulic Cylinder Series CH
KGB

Compact Hydraulic Cylinder Series CHKGB 20, 25, 32, 40, 50, 63, 80, 100 16MPa How to Order CHKGB 32 30 32 30 Z73 CHDKGB With Auto Switch Number of auto switches With auto switch (built-in magnet) Nil S n 2 pcs. 1 pc. "n" pcs.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

10, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

closing port M3 x 0.5 Finger opening port 10 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port 25 25 6-M3 x 0.5 thread depth 6 (A, B, C common view) 3-3 depth 6 +0.02 0 34 (A, B, C common view) 12h9 0 0.043 1.5 5 19.5 12 41.5 (45) 8 17 2 8 0 0.05 2 3.5 0 0.03 3.5 0 0.03 Open: 22 Closed: 14 2-M3 x 0.5 thread depth 6 (Thread for mounting attachment) 15 15 6 5 5 6 12-5-12 13 2 Finger

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

6 t !0 !8 !2 i !9 y u MHL2 Component Parts Component Parts MHR No. !2 !3 !4 !5 !6 !7 !8 !

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Output mode Hysteresis, Window comparator, Error output, Output OFF Switch operation Normal output, Reversed output Max. load current 80 mA Max. applied voltage 30 V (NPN output) Internal voltage drop (Residual voltage) 1.5 V or less (at load current of 80 mA) Delay time*1 1.5 ms or less, variable from 0 to 60 s/0.01 s increments Switch output (SIO mode) Hysteresis Hysteresis mode Variable

VXZ

Frequency (Hz) 50 60(53) 18 60 51(44) 12 Model Power source VX3 7.5 6 8 11 9.5 11.5 AC VXZ22 VXA DC 50 80 21 60 67 17 AC VXZ23 VN DC LVC JIS Symbol LVA OUT LVH IN LVD N.O.

Clean Regulator/Fluororesin Type

Pilot port Rc, NPT 1/8 12 R 132 100 42.3 91 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 OUT IN 100 6 HEX.35 (178) With nut 80 Pilot port Rc, NPT 1/8 12 R 132 100 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 100 SRF50 19 Model A1 A2 B1 B2 OUT IN SRF50S-1S19 SRF50S-1S1925 SRF50S-1S25 SRF50S-1S2519 SRF50S-2S19 42.3 91 58 91 58 91 55 98 55 98 55 98 A1 A2 58 91 6 B1 B2 56 95 56 95 Tube extensions 80