XLAQ/XLDQ

t w, r, t e Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

VT317

When an electric current is applied to the molded coil r, the armature t is attracted to the core y, and through the push rod u, it pushes down the spool valve w. Then, port P and port A are connected. At this time, there will be gaps between the armature t and the core y, but the armature will be magnetically attracted to the core y.

Body Size: 40, Pipe Thread: N (NPT), Port Size: 04 (1/2), Mounting: w/o Mounting Option, Nominal Filtration Rating: 5 (5µ), Water Removal Type: T (Large Flow Type), Semi-standard: RZ (R + Z)

Body Size: 40, Pipe Thread: N (NPT), Port Size: 04 (1/2), Mounting: w/o Mounting Option, Nominal Filtration Rating: 5 (5µ), Water Removal Type: T (Large Flow Type), Semi-standard: 6Z (6 + Z)

Body Size: 40, Pipe Thread: N (NPT), Port Size: 04 (1/2), Mounting: B (w/Bracket), Nominal Filtration Rating: 5 (5µ), Water Removal Type: T (Large Flow Type), Semi-standard: 6Z (6 + Z)

Body Size: 40, Pipe Thread: N (NPT), Port Size: 02 (1/4), Mounting: B (w/Bracket), Nominal Filtration Rating: 5 (5µ), Water Removal Type: T (Large Flow Type), Semi-standard: Z (Name Plate And Caution Plate For Bowl In Imperial Unit (PSI, °F))

Body Size: 40, Pipe Thread: N (NPT), Port Size: 04 (1/2), Mounting: B (w/Bracket), Nominal Filtration Rating: 5 (5µ), Water Removal Type: T (Large Flow Type), Semi-standard: Z (Name Plate And Caution Plate For Bowl In Imperial Unit (PSI, °F))

Body Size: 40, Pipe Thread: N (NPT), Port Size: 04 (1/2), Mounting: w/o Mounting Option, Nominal Filtration Rating: 5 (5µ), Water Removal Type: T (Large Flow Type), Semi-standard: Z (Name Plate And Caution Plate For Bowl In Imperial Unit (PSI, °F))

Series 10-, 21- AW-B Filter Regulator

R.

AR Series Modular Type Regulator

e t e q IN OUT IN OUT r r q w w Component Parts No.

•

Ii' .. , . t ~ .230 42.2 25.8 38.9 ' 39.5 33.9 44.7 28.2 35. 1 10.5 17 ~ 35 A SP330F-N01-07S 1/4" NPT1 /8 10-32UNF ASP330F-N01 -09$ 5/16" ~ 14.2 118 15.8 15 .2 :.g 1/2' 8 NP'W~ " ~ NE?'T, lta ".,I:SP'43oFi!

Electric Slide Table / High Precision Type 《 AC servo motor 》

(Equivalent lead (8)Cable length * [m] (7)Cable type (9)Driver type Power supply Without cable Nil Without cable Nil Compatible drivers voltage [V] Standard cable 3 3 S R Nil Without driver Robotic cable (Flexible cable) 5 5 200 to 230 200 to 230 M2 LECYM2-V A 10 U2 LECYU2-V C 20 * The length of the motor and encoder cables are the same.

AC Servo Motor Driver (CC-Link Type)

Please change the parameter in the initial setting. *3 The minimum unit of the travel distance of the actuator should be 1 [m]. *4 When the motor mounting position is right side parallel (LEY*R / LEYG*R) or left side parallel (LEY*L / LEYG*L), the rotation direction selection is 0(+: Counter motors side). -28- LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) 20 10 5 20 10 5 (Including

CLS

1#1 @9 #4^2^7^5^1 ^3 ^6 ^4 8%2 %3 %4 %6 q !9 w %7 $1 $2 $3 $6 $8 $9 $0 #3 #0 @5 #2 $5 $4 %0 %1 t y !2 !1 !3 CL u !4 !6 CL1 !7 !5 MLGC CNG e ^0 ^2 !

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

4 3.4 105 RB0805X552 CY1F25 CY1F25 +0.012 0 Rc1/8 NPT1/8 G1/8 5 1 5 9.5 depth 5.4 7.5 5.5 140 RB1006X552 Note 1) When adjusting the stroke, keep the T dimension within a 0 to 2 mm range.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

6 @9 r MTS $0 #6 MY A' CY $1 !1 !2 !0 !8 w $4 t e $2 !5 $3 y!7 @8 !4 !

Integrated Controller

supply connector (M12) 7.5 Auto switch groove (1 row per side)5 M4 x 0.7 thread depth 8 (F.G. terminal) 46.8 60 34.2 27.8 21.1 Motor option: With lock (16) (219.9) B + Stroke D x 150 (= E) 15 15 5 H9 (+0.030 0 ) depth 5 150 n x 5.5 60 5 6 5 H9 (+0.030 0 ) depth 5 5 H9 (+0.030 0 ) depth 5 10 G 25 1 When mounting the actuator using the body mounting reference plane, set the height of the

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

2 Port for Steam Dimensions (mm) 1in = 25.4mm T (Y) R Z 16 T 25 IN port 2-3/8 : Thread type S l = 280 l = 300 (X) 2.5 (N) E C D G Q SMC SMC C A B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 N-1/4 N-1/8 : Thread type H H P = J (pitch) 2 L dimensions (mm) n (stations) Model Dimensions 3 5 8 4 6 10 7 2 9 103.5 172.5 276 138 207 345 241.5 L1 69 310.5 VV2CS2 115.5 184.5 288 150 219

CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5