VCB

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 52 42 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 65 56 Two mounting screws (for mounting

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 42 52 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 56 65 Two mounting screws (for mounting

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

Secondary Batteries

Mounting screw material changed to stainless steel D-M9BWSDPC-900 Series *The lead wires and connector pins are made of copper. 90-J Series Front matter 3 Actuators Improved service life Improved service life 91Series Material restriction + Lub-retainer Service life has been improved with a lub-retainer compared with SMCs standard models. Compatible with a low dew point (40C).

Card Motor

Load mass [g] I Items to enter Target position [mm] G + Positioning time [s] Thrust setting value J H Force to be applied Load mass [g] I H I J G Refer to the operation manual for details. Features 2 Series LAT3 Model Selection 1 Selection Procedure for Positioning Operation (Refer to Front matter 3 and 4 for Fig.1, 2, 3, 4, 5 and Table 1, 2, 3 .)

Hydraulic Cylinders

J 8-L counter bore A + Stroke M M CHKDB20 & 25 CHKDB32 to 100 Width across flats f c a b g e h + Stroke Rod end male thread (mm) F L A B C D E G H J K M P Q R Bore size (mm) 20 M8 x 1.25 9.5 depth 5.4 51 43 8 12 10 10 6 30 5.5 43 1/8 16.5 6 25 M10 x 1.5 9.5 depth 5.4 53 45 8 14 12 12 6 36 5.5 49 1/8 17 8 32 M12 x 1.75 11 depth 6.5 61 51 10 18 14 15 7 47 6.6 63 1/4 19.5 10 40 M16 x 2 14 depth

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

O Auto switch mounting groove dimensions U X V AM AL 10 16 to 25 W AZ Finger option: Narrow type (N) AX When open AU AW AV AY (mm) H Q A J R B K S C L T D M E N F P G Model 11220 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.1 0 -0.1 0 -0.1 0 -0.1 MHZ2-10D 4 12 57 5 7.6 29 11.4 5.2 16.4 27 10 23 16 37.8 23 6 18 12 0.02 0.02 0.05 112211221122MHZ2-16D 5 15 67.3 8 11 38 16 6.5 23.6 30 13 30.6 24 42.5 24.5

CQS

For details, refer to pages 7-9-23 and 7-9-21. 7-4-45

Regulator

AR-OMX0055-B PRODUCT NAME Regulator MODEL / Series / Product Number AR20(K)-(F,N)01(F,N)02(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR30(K)-(F,N)02(F,N)03(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR40(K)-(F,N)02(F,N)04(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR40(K)-(F,N)06(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR50(K)-(F,N)06(F,N)10(B,E,E1,E2,E3,E4,G,M)(-1,N,R,Y,Z,ZA)-D AR60(K)-(

CV/MVGQ

28 36 10 12 16 20 25 8 8 8 0 0 RZQ MI W S CEP1 Double Clevis Style: CVS1D CE1 Lube type (CVS1D), Non-lube type (CVS1DN) CE2 ML2B With rod boot C J G5-S Width across flats B1 CV Rod d9 MVGQ CC Connection port A ZZ + l + Stroke Z + l + Stroke h + l RB S + Stroke Z + Stroke ZZ + Stroke J Stroke range Bore size (mm) DA AL B B1 C D E F H1 HX CX CDH10 CZ J K L (mm) 40 50 63 80 100 32 40 40 52

Mist Separator Regulator

Bowl assembly / auto drain for AWM30-D Option symbol Semi-standard symbol 6 J 6J Semi-standard: J Semi-standard: (Standard) (9) Part No. Piping port thread ty pe Piping port thread ty pe (9) Part No. Rc C3SF-J-D G C3SFF-J-D NPT C3SFN-J(Z)-D Rc G NPT C3SF(-Z)-D C3SF-D Appearance and part No.

Ｍ icro Mist Separator Regulator

Bowl assembly / auto drain for AWD30-D Option symbol Semi-standard symbol 6 J 6J Semi-standard: J Semi-standard: (Standard) (9) Part No. Piping port thread ty pe Piping port thread ty pe (9) Part No. Rc C3SF-J-D G C3SFF-J-D NPT C3SFN-J(Z)-D Rc G NPT C3SF(-Z)-D C3SF-D Appearance and part No.

AIR FILTER

AF-OMQ0004-C PRODUCT NAME AIR FILTER MODEL / Series / Product Number AF10-M5(C)(-2,6,R,Z)-A AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A AF50-(F,N)06(F,N)10(B)(-2,6,8,J,R,W,Z)-A AF60-(F,N)10(B)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2.

RSH/RS1H

RE A B 0.2 53 REC 67 CX CY MQQ M RHC 4-6.6 through 8-11 depth of recessed area 5 Load carrying direction MK(2) 12 3 RS Q G 28 13 6 10.3 6 RS H A RZQ 12 Conveyor lower limit position MI W S 1 3 R25 CEP1 CE1 Stroke 73 87 CE2 2-P 20 ML2B C J G5-S 16 8 160 CV MVGQ Rear pressure port 16 CC Front pressure port RB J D-X 6.5 23 14 2-Plug 46 2051.5 (Width across corners 62) Data P (Piping port) TN

VDW

Please consult with SMC regarding other voltages. 30 Manifold Options Blanking plate assembly P Series 10, 20 VVCW20 3A P Series 30 VVDW 0 3A 2 Series Material 1 2 Material 10 20 Plate material Seal material NBR FKM EPDM Symbol G H J Plate material Seal material NBR FKM EPDM Symbol G H J Stainless steel Stainless steel Plate material is stainless steel only. 248 Series VDW10/20/30 Compact

RSH/RS1H

G5-S 16 8 160 CV MVGQ Rear pressure port 16 CC Front pressure port RB J D-X 6.5 23 14 2-Plug 46 2051.5 (Width across corners 62) Data P (Piping port) TN NPT 1/8 Nil Rc 1/8 TF G 1/8 Note 1) The figure shows dimensions at the maximum energy absorption capacity.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

steel L LQ-GP 2 J 07 Tubing size symbol (Refer to Table 1) Body class (Refer to Table 1) Insert pin (Single) Insert pin material (J/K type only) Type Nil S Resin Stainless steel LQ-GH J 07 Holder (Single) Tubing size symbol (Refer to Table 1) Type Note1) Replacement part type J shows the parts for LQ-GJ and LQ-GK.

53

Fluid supply 9 Overflow port (Option J) Tank drain port To wastewater collection pit 5 No.

Electric Actuator with Integrated Guide

READY 23 System ready signal General purpose input/output terminal: CN2 Indicates that the SET-UP operation (start ready operation: return to home position after servo ON) is complete when ON. The state in which the program can be run. SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON.

SZ3000

Type 60P Flat Ribbon Cable Type (26 pins) Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 26 26 26 Positive pin (Common) Positive pin 25 25 25 SOL.B 24 24 Negative pin Negative pin (Common) Station 12 24 23 23 SOL.A 23 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B Station 11 SOL.B Station