LVQ

Double acting Double acting 03 04 06 08 10 12 19 25 3 4 6 8 10 12 19 25 With flow rate adjustment PA N.C. B A N.C. Double acting With bypass PA PA N.C. PB B A B A Inch sizes Double acting 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 N.C. Double acting N.C. With flow rate adjustment & bypass PA B A N.C. N.C. With indicator PA Basic size With reducer N.C.

9.8

OZ Edition B Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NR printing OZ 7150SZ Printed in Japan. D-DN

Vacuum Pad with Ejector

This phenomenon occurs earlier if pushing or the high vacuum pressure is used. 27 - Revision history Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2016 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 28 -

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: BT (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: PNP; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

Valve: None; Stop Valve: None, Return Port Size: 03 (3/8), Flow Switch Output Specifications: C (Out 1: NPN; Out 2: Flow Rate: Analog 1 to 5 V; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

Valve: None; Stop Valve: None, Return Port Size: 03 (3/8), Flow Switch Output Specifications: CT (Out 1: NPN; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

Body Size: 200 (Element Length: ℓ246, Applicable Element: EJ801S, ED801S), Port Size: 03 (Rc 3/8), Element Classification: J (HEPO II), Filtration Accuracy: 2μm, 99% Filtration Efficiency

Body Size: 200 (Element Length: ℓ246, Applicable Element: EJ801S, ED801S), Port Size: 03 (Rc 3/8), Element Classification: J (HEPO II), Filtration Accuracy: 6μm, 99% Filtration Efficiency

Body Size: 100 (Element Length: ℓ117, Applicable Element: EJ701S), Port Size: 03 (Rc 3/8), Element Classification: J (HEPO II), Filtration Accuracy: 2μm, 99% Filtration Efficiency

Body Size: 100 (Element Length: ℓ117, Applicable Element: EJ701S), Port Size: 03 (Rc 3/8), Element Classification: J (HEPO II), Filtration Accuracy: 13μm, 99% Filtration Efficiency

Body Size: 100 (Element Length: ℓ117, Applicable Element: EJ701S), Port Size: 03 (Rc 3/8), Element Classification: J (HEPO II), Filtration Accuracy: 4μm, 99% Filtration Efficiency

Body Size: 100 (Element Length: ℓ117, Applicable Element: EJ701S), Port Size: 03 (Rc 3/8), Element Classification: J (HEPO II), Filtration Accuracy: 6μm, 99% Filtration Efficiency

Body Size: 5 (3/8 Basis), Port Size: 03 [Cylinder Side (R(PT) 3/8) Pilot Port (Rc(PT) 1/8)], Applicable Tube OD: Ø10, Lock Nut: J (Round)

Body Size: 5 (3/8 Basis), Port Size: 03 [Cylinder Side (R(PT) 3/8) Pilot Port (Rc(PT) 1/8)], Applicable Tube OD: Ø8, Lock Nut: J (Round)

Standby Regulator

How to Order 30 S F 03 E AR Y 15V Symbol Description Body size 20 30 40 50 Nil c Thread type Port size (Only IN port) Pressure gauge Square embedded type pressure gauge (with limit indicator) Knob Upward Nil Unit on product label: MPa, Pressure gauge in SI units: MPa Unit on product label: MPa Unit on Pressure gauge: MPa/psi dual scale Unit indication Pilot valve mounting position and

Size: 10, Base Dew Point: H (-15°C), Type: Standard, Equipment Connection: 4 (Modular Connection), Thread: N (NPT), Port Size: 03 (3/8), Draining: J (Drain Guide Port 1/4 w/o Valve)

Size: 30, Base Dew Point: H (-15°C), Type: A (Energy Saving Design), Equipment Connection: 4 (Modular Connection), Thread: N (NPT), Port Size: 03 (3/8), Draining: J (Drain Guide Port 1/4 w/o Valve)

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

0.15 MPa 0.12 MPa Min. operating pressure With end lock 0.15 MPa 0.17 MPa Maximum operating pressure 0.7 MPa MXH Proof pressure 1.0 MPa Ambient and fluid temperature MXU Bearing type Ball spline Cushion Air cushion Rubber bumper MXS Effective cushion length (mm) 11 12 9 10 17 17 Lubrication Not required (Non-lube) MXQ Piston speed (mm/s) 50 to 500 50 to 800 Allowable kinetic energy (J)

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: BT (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: PNP; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: J (Instantaneous Flow: L/min, Accumulated Flow: L, Temperature: °F), Bracket

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: B (Out 1: PNP, Out 2: Flow Rate: PNP, Temp.: None, Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: J (Instantaneous Flow: L/min, Accumulated Flow: L, Temperature: °F), Bracket: