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Metric size 4, 6 Inch size 5/32", 1/4" Port size Rc, NPT 1/8 2 2 1 1 Pressure gauge port size Rc, NPT 1/8 (Width across flats) 11 M5 x 0.8 (Female thread) 26 26.1 3 R, NPT1/8 13.6 18.3 26.1 Made to Order Specifications Please contact SMC for detailed dimensions, specifications and lead times.

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2024 SMC Corporation All Rights Reserved Specifcations are subject to change without prior notice and any obligation on the part of the manufacturer. D-G

Regulator AR30 to 60 Related Equipment How to Order AR 30 BE F 1N 03 Optional specifications Regulator Contents 0.02 to 0.2MPa setting Non-relieving Flow direction: Right to left Symbol 1 N R Z Applicable models AR30 to 60 AR30 to 60 AR30 to 60 AR30 to 60 Note 1) Body size 30 40 50 60 1 3 8 1 2 3 4 Display units for product name plate and pressure gauge: PSI, F.

Please use them as guidelines. +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 9 11 13 16 142.5 150.5 8 10 10 14 9 11 13 16 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 159 169 CD-MU03 171 181 CD-MU04 205.5 221.5 CD-MU05 Single clevis (Double clevis bracket) Double clevis (Single clevis bracket) DX -01 -03 CX -02 -04 DY+0.4 +0.2 R (CJ) R (DJ) CDH10 DDH10 2-DT 2-CT 2-

Cylinder with Lock Series MNB Taper ring Steel ball P f R R High locking efficiency Improved locking efficiency, as well as stable locking and unlocking (unlocking pressure 0.25MPa. 0.05MPa compared to conventional P/A products) have been realized by arranging a large number of precision steel ball bearings in two circular rows.

Filter Regulator AW30, 40 Related Equipment How to Order Integration of a filter and regulator allows simple wiring. 03 BE 30 1N AW F Optional specifications Filter regulator Applicable models AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 Symbol 1 2 6 8 J N R W Z Contents 0.02 to 0.2MPa setting Metal bowl Nylon bowl Metal bowl with level gauge Drain guide

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Air Saving Speed Controller AS-R/AS-Q Series How to Order Port size 01 1/8 02 1/4 03 3/8 04 1/2 2 02 06 AS R 2 With pressure reduction function Knob color: White With pressure reduction function 2 02 06 AS Q 2 With rapid supply and exhaust function Knob color: Light blue Applicable tubing O.D.

CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !

VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19 32 50 50 118 96 120 60 7 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 133 96 140 66 9 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 64 50.8 163 196 68 60.5 1 2, 3 4 4-16-7

Location and size A, B port 02 Side 1/4 03 Side 3/8 04 Side 1/2 06 Side 3/4 10 Side 1 02B Bottom 1/4 03B Bottom 3/8 04B Bottom 1/2 Size of P, EA, EB port 02 1/4 03 3/8 04 1/2 06 3/4 10 1 Option No option TBU With terminal box SU With SI unit W Splash proof DISTRIBUTED BY: NATIONAL AND WORLDWIDE SERVICE NETWORK FOR A BRANCH OFFICE NEAR YOU, CALL United States Branch Offices Oceania SMC Corporation

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2009 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NT printing NT 6000SZ Printed in Japan.

Bracket 2S-22-D With four M3 tappings Digital pressure switch Ser,"es ZSE5 115E5 for general purpose fluid 1 ' How to Order Piping Piping '---r--'I Vacuum pressure switch Positive pressure switch ZSESB L ISESB L Switch specifications t~'1'~"o", 26 Anal 3-wire L Grommct:3m specifications specifications 02 Direct plpmg R(PT)1 /4 T2 Direct pin NPTF 1/4 27 2 out ut NPN 4-wire 67 20ul ul {PNP

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

Description Material Note q PBT PBT Body A Body A Electroless nickel plated Electroless nickel plated Brass Brass Seat ring Seat ring w w Electroless nickel plated Electroless nickel plated Brass Brass Valve seat Valve seat e e Stainless steel 304 POM Silenser cover Elbow union body r r PVA sponge POM Silencer Spacer t t POM POM/Stainless steel Spacer Cassette y y POM/Stainless steel NBR

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

As a result, the vacuum pressure valve t which is linked to the diaphragm r opens, VAC and OUT are connected, and the set pressure becomes negative. This negative pressure feeds back to the control circuit i via the pressure sensor u.