3M/SMseries

How To Order Manifold Base NvvsFs<2o-H6S(T;-oo. . i r -007 serias vFsooo Manifoldl ;rY't5"r,on" Itanilold spsciticaliols+ : 1010 siations Appllcable itodel:NW5F5-2O R ' Series NVFSOO Construction,/Parts List Sngle Solenoid Symbol 3 Posiiion Cloced Center Main Parts No.

Light & Suppressor), Air Direction: R (Right to Left), Button Color: X238 (Black, Manual Model)

Body Size: 30 (3/8), Port Thread: N (NPT), Port Size: 03 (3/8, AVL3000), Option: G (Pressure Gauge, Unit: MPa), Voltage: 3 (110 to 120VAC, 50/60Hz), Electrical Entry: D (D Type DIN Connector), Air Direction: R (Right to Left), Button Color: X238 (Black, Manual Model)

Body Size: 30 (3/8), Port Thread: N (NPT), Port Size: 03 (3/8, AVL3000), Option: P (Pressure Gauge, Unit: MPa, psi), Voltage: 3 (110 to 120VAC, 50/60Hz), Electrical Entry: D (D Type DIN Connector), Air Direction: R (Right to Left), Button Color: X238 (Black, Manual Model)

Body Size: 30 (3/8), Port Thread: Rc, Port Size: 03 (3/8, AVL3000), Option: No Gauge, Voltage: Manual Lockout, Electrical Entry: Manual Lockout, Air Direction: R (Right to Left), Button Color: X238 (Black, Manual Model)

Body Size: 50 (3/4, 1), Port Thread: N (NPT), Port Size: 06 (3/4, AVL5000), Option: No Gauge, Voltage: Manual Lockout, Electrical Entry: Manual Lockout, Air Direction: R (Right to Left), Button Color: X238 (Black, Manual Model)

Body Size: 50 (3/4, 1), Port Thread: N (NPT), Port Size: 10 (1, AVL5000), Option: No Gauge, Voltage: Manual Lockout, Electrical Entry: Manual Lockout, Air Direction: R (Right to Left), Button Color: X238 (Black, Manual Model)

PF3A7xxH_eng

Before Use Digital Flow Switch PF3A701H/PF3A702H The following options are required for coupling with modular F, R, and L combinations. They are separately prepared by the user.

PF3A8xxH.eng

Before Use Digital Flow Switch PF3A801H/PF3A802H-L The following options are required for coupling with modular F, R, and L combinations. They are separately prepared by the user.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

2 w y r !0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 SUS304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Clean Regulator

Outlet pressure MPa 0.4 0.3 OUT IN 0.2 33 0.1 2 x Rc 3/4 to 1 0.0 t e y q 0 1000 2000 3000 4000 Flow rate L/min (ANR) Component parts Material No.

Sine Cylinder Series REC

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Sine Cylinder Series REC

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Quick Exhaust Valve Series AQ

Description AQ2000/3000/5000 AQ1500 AQ1510 Aluminum die-casted Zinc die-casted Zinc die-casted Body q Brass Brass Guide w Cover Aluminum die-casted e Replacement Parts Part no. Material No.

: R (w/Bracket), Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

: R (w/Bracket), Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate), Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

: °C), Bracket: R (w/Bracket), Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

: °C), Bracket: R (w/Bracket), Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

: °C, Bracket: R (w/Bracket), Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)