ZX

Stabilize the source pressure by providing a tank and a vacuum regulator. Provide a vacuum switch valve to individual lines.

Vacuum Pad: Ball Joint Type

tubing O.D.Q I 5 H R J F Hexagon width across flats 10 Hexagon width across flats 2 E Hexagon width across flats 12 Applicable tubing O.D.Q D C Y 2 R H A B Hexagon width across flats 12 Hexagon width across flats 3 F E D C 3 2 Dimensions: 10 mm Stroke A A B (mm) B C D E F H I J Model ZPR10F10-0-A10 10 12 10 12.5 23.4 39.5 50.5 84.5 Stroke: 10 mm ZPR13F10-0-A10 13 15 23 10.5 13 23.9 40 51

Shock Absorbers and Rate Controls

(I$odell A A I D E t H WT $tl oEfio.l il{s} 57.0 6i.0 l(10 x 1.0 3.0 N/A 8.6 49.4 8.6 10.? N/A r{/A N/A 0 t.t5rir(B) 8 t . 8 91.1 Ml2 x 1.0 3.3 l.l/A 8,6 71.4 0.9 14.2 N/A .0 9.7 (r.R)0Efl.251rr(r)8r.8 9 1 . ? M l { x 1 . 5 J.J /A 1.2 71.4 0.9 t4.2 N/A r2.0 12.1 (r.R)0Efti.35rJr(Bl 100,6 0.7 l l 6 x 1 . 5 4.0 N/A ).2 87.4 1.2 t4.5 0.5 t4.0 12.7 l0 [.5t](B] 9E_6 I t 0,5 [!

Power Valve: Economy Valve Series VEX5

Basic type Select type Model VEX5504 06 10 VEX57-10 12 VEX59-14 20 P1 P1 VEX VEX Description Bracket (With bolt and washer) G46-10-01 VEX7-32A VEX5-32A VEX9-32A Air operated External pilot solenoid valve 3(R) 3(R) Pressure gauge 1(P) 3(R) 3(R) 1(P) P2 P2 P3 P1 P1 3(R) 3(R) 3(R) 3(R) 1(P) 1(P) P2 P2 Note) With this valve, the port 3(R) is a supply port and port 1(P) is an exhaust port. 2441

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

D-A5/A6 Same side 10 110 110 115 125 135 145 1 pc. 10 Different sides 20 2 pcs. D-A59W Same side 20 115 115 125 130 140 150 1 pc. 15 Different sides 10 2 pcs. D-F5/J5 Same side 10 115 115 120 130 140 150 1 pc. 10 Different sides 10 2 pcs. D-F5W/J5W D-F5BAL Same side 10 120 120 120 135 140 150 1 pc. 10 Different sides 10 2 pcs.

Direct Solenoid

P80601 1 Faoltcrir*rl coll-A-c. solanold l lli/1m V 3y60 Ha. 120t60 Nt@ aa)a) qIA{S c01ar0 qIA.11 10 '| Solanold str. n!

3

C 1 B A Basic (mm) (mm) T 9 10.5 MKB20-Z MKB25-Z Model Yh9 18 23 A B C E F G 36 40 47 52 36 40 35.5 40.5 18 21 17.9 22.5 S 28 27.5 Clamp stroke Model Rod state 0 0.043 0 0.052 20 mm Q R 112.5 142 113.5 143 30 mm Q R 132.5 172 133.5 173 10 mm Q R 92.5 112 93.5 113 Retracted Extended Retracted Extended MKB20-Z 72 82 92 MKB25-Z 73 83 93 Note) The above figure is with the auto switch (D-M9) mounted

AZ1000

0.07 A 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) Connections inch A (mm) FV4 MV4 FV6 MV6 TW6 3.70 (94.0) 4.70 (119.4) 2.96 (75.2) Hastelloy is a registered trademark of Haynes International.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ2-Z Series 10, 16 Air Cylinder 10-/1121-/22RoHS How to Order Cushion Clean series 10 11 Relief type Vacuum suction type Nil A Rubber bumper (Standard) Air cushion 10 D L 16 60 A R C J 2 M9BW Z B 21 D L 16 60 R C J 2 M9BW Z B Number of auto switches Nil Built-in magnet Head cover port location Nil S n 2 pcs. 1 pc. n pcs.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Seal kit includes a grease pack (10 g). When !5 or !6 is shipped independently, a grease pack (20 g) is included. Order with the following part number when only the grease pack is needed. Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) D-X Technical Data 1213 A MY1H Series Construction End lock !9 @2 @0 @1 e w !5 !6 !3 !2 !1 !0 q t r i S u y o !4 !8 !

T

Polyurethane Coil Tubing: Series 10-TCU For details, refer to Pneumatic Clean Series catalog. Specifications 10-TCU 10-TCU 10-TCU 10-TCU 0425B-1 0425B-2 0425B-3 0604B-1 0604B-2 0604B-3 0805B-1 10-TCU 10-TCU 10-TCU Model Tubing O.D. (mm) No. of cores 2 cores 3 cores 1 core 2 cores 3 cores 1 core 1 core 4 6 4 8 5 Tubing I.D.

CA2

9 @0 @1 @2 @3 q w e r t y u i o !0 !2 A A-A' Piston rod section A' !1 !3 !4 Component Parts Note Description Material No.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Leakage voltage Particularly when using a resistor in parallel with a switching element and using a C-R element (surge voltage suppressor) to protect the switching element, take note that leakage current will flow through the resistor, C-R element, etc., creating a possible danger that the valve may not turn off. 1.

energy saving effect

-A-20/40HRSH150-W-20/4025 25 Facility water temperature 32C Ambient temperature 32C 20 20 Cooling capacity [kW] Cooling capacity [kW] 15.7 15.7 15 15 Ambient temperature 43C 10 10 Facility water temperature 40C Ambient temperature 45C 5 5 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH200-A-20/40HRSH200-W-20/4030 30 Ambient

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

10 L2 A 8 D1 KS KX 6 D2 18.5 10 10 21.8 12.8 10 H Connection threads 8 15.2 20.5 26 18 25.3 12 KM (R) (R) 2 x Applicable tubing 10 18.5 23 41 29 28.4 17 KF 17 L1 20.9 12 24 58 46 30.4 22 M D1 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

ASS Dimensions ASR AS220M-01 02 AS120M ASF H 8 (Hexagon width across flats) L1 T2 24.8 (MAX. 29.8) 28.2 (MAX. 33.2) M5 x 0.8 L2 A L3 D1 9 10.3 10 M5 x 0.8 10-32 UNF D2 T1 9 Dimensions A L2 L3 T1 T2 H L1 D1 D2 Model Min. Min. Max. Max.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Description AC servomotor Lead screw Guide frame Guide plate A Guide plate B Push bar Frame cover Coupling Bearing R Bearing F Body A Table Housing A No.

XL

Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

VHK

(mm) M5 M5 4 4 Port size R Port size R 1 8 1 8 6 6 1 4 1 4 8 8 3 8 3 8 10 10 1 2 1 2 12 12 Flame Resistant Type (UL-94 Standard V-0 equivalent) 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): Male thread 2(A) 2(A) Port size R Applicable tubing O.D. (mm) 1 8 1 4 3 8 1 2 1(P) 4 6 8 10 12 1(P) Applicable tubing O.D.

High Vacuum Angle Valve, XL Series

Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.