Oil Filter FH150 Series

(kg) Model FH150-02 FH150-03 FH150-04 1/4 80 168.5 197.5 259.5 50 15 25 7 6.5 0.7 3/8 1/2 524

Series VCL

Optional Standard 1 2 3 4 5 6 7 Clip Stainless steel Tube assembly Stainless steel, Cu (for class H coil) Stainless steel Coil assembly Class H Class B Armature assembly Stainless steel, FKM O-ring FKM Return spring Stainless steel Body Stainless steel C37 Dimensions (mm) /Bracket 1in = 25.4mm A J 4-G C 1.5 B D L E 4-H Valve mounting hole F Bracket mounting dimensions A B C D E F G H

25

7 units 6 units 7 units 8 units 8 units 4 units 5 units 5 units 4 units 6 units 6 units 7 units 7 units 3 units Wiring/Piping Connectable number of ionizers (IZS42) with transition wiring (without external sensor) Warning 1.

ALF400 to 900, ALT-5/-9

hole Applicable tubing O.D. 6, I.D. 4 Applicable tubing O.D. 6, I.D. 4 Model Number of distribution ports Applicable tubing A B C Number of distribution ports Applicable tubing A B C Model VA4-6 VA6-6 VA10-6 VA16-6 4 6 10 16 36.5 60 88 130 82.5 110.5 152.5 96.5 124.5 152.5 74 102 130 62 90 118 6 VB4-6 VB6-6 VB8-6 4 6 8 48 76 118 6 Note) Insert seal plug (PG1) into the distribution port which

Compact Electric Actuator Series LG1

How to Order B LG1 02 1 Cable length 02 03 04 05 2m 3m 4m 5m Nonstandard Motor Cables Cables for connecting nonstandard motors and drivers. Cable lengths other than those shown below should be arranged by the customer.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Note 3) Refer to p.2.10-6 for power consumption of AC type.

70pvvna

B (9.5) B (12.7) B (19.1) B (25.4) B (31.8) B (38.1) B (50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 3 8 1 2 3 4 10A 15A 20A 25A 32A 40A 50A 1 2 VNA01 VNA02 VNA03 VNA1 Port 12 (P1) 1 1 1 2 External pilot External pilot External pilot External pilot External pilot Pilot exhaust Bleed port Bleed port 1 4 1 2 10 (P2) Installing a silencer to the

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

steel, PPS, NBR Class Stainless steel, NBR 4 4 PPS, NBR Armature assembly Push rod assembly 3 4 5 6 7 NBR O-ring 5 6 7 FKM, EPDM, PTFE O-ring FKM, EPDM, PTFE NBR Stainless steel Return spring Return spring Stainless steel Brass Body Stainless steel Body Stainless steel Brass Bracket Dimensions A J 4-G C 1.5 B D L E 4-H Valve mounting hole F Bracket mounting dimensions A B C D E F G H J

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

Optional Standard 1 2 3 4 5 6 7 Clip Stainless steel Tube assembly Stainless steel, Cu (for class H coil) Stainless steel Coil assembly Class H Class B Armature assembly Stainless steel, FKM O-ring FKM Return spring Stainless steel Body Stainless steel C37 Dimensions (mm) /Bracket 1in = 25.4mm A J 4-G C 1.5 B D L E 4-H Valve mounting hole F Bracket mounting dimensions A B C D E F G H

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Note2) A (set) side energization : A light (orange) illuminates, B-(reset) side energization : B light (green) illuminates.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

B C D H SNKJ-016B SNLJ-016B SN-020B SN-032B NTJ-010A NTJ-015A NT-02 NT-03 19.6 M12 x 1 4 8.1 M4 x 0.7 3.2 6, 10 17 6, 10 7 21.9 M14 x 1 5 9.2 M5 x 0.8 4 16 19 16 8 30 M20 x 1.5 8 15 M8 x 1.25 5 20 26 20 13 37 M26 x 1.5 8 19.6 M10 x 1.25 6 25 32 25 17 T-bracket 4-TC TH 7 +0.2 0 TU -0.1 -0.3 TN TK TX TV 12 TD H10 TT TY TW Part no.

HRX-OM-W032

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector trip . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Part No. d Cotter pin l d H B Dd9 L C D m (Cut through) Note 1) 3 x 18l 4 x 25l 4 x 35l 0.040 0.076 0.050 0.093 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 10 14 22 32, 40 50, 63 80, 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 16.5 21 26 31 39 36 51 72 4 4.5 5 44 60 82 3 4

CL

6 !7 No.

Profile Design ISO/VDMA Air Cylinder Series CP95

D C d H B 32 40 50, 63 80 100 16.5 21 26 31 39 19.6 25.4 31.2 37.0 47.3 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 6 8 11 13 16 17 22 27 32 41 NT-03 NT-04 NT-05 NT-08 NT-10 Piston rod ball joint KJ (DIN 648) Zinc chromate plated steel Bore d3 Order No. d1 h d6 b3 b1 l d7 l3 sw 32 M10x1.25 KJ10D 10 43 28 10.5 14 20 19 13 14 17 40 M12x1.25 KJ12D 12 50 32 12 16 22 22 13 16 19 50/63

PA3145/3165/3185

Refer to pages 5-11-2 to 6 for Safety Instruction and Solenoid Valve Precautions.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Electro-Pneumatic Proportional Valve

: 0.12 10% or less 3% or less 1MPa 12, 24VDC 0 to 2W 0 to 4W Class B Series PVQ How to Order P V Q 13 5 L 03 M5 Valve type Body materials Symbol A Nil Body Brass C37 Note for PVQ13 for PVQ31, 33 13 31 33 N.C.

Process Valve

size: 32A, 40A, 50A Applicable cable O.D. 6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) P1 P2 F E D A B B C A J Main port 1 (A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNA5-32A VNA6