TABLE OF CONTENTS

V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

CL

V IC circuit 5 V, 12 V 40 to 160 40 to 100 Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) Terminal conduit 5 V, 12 V 40 to 100 40 to 160 Relay, PLC 12 V 2-wire 3-wire (NPN) 5 V 12 V IC circuit Diagnostic indication (2-color indication) 24 V 3-wire (PNP) 40 to 100 12 V Grommet 2-wire Water resistant (2-color indication) 40 to 160 With diagnostic output (2-color indication

Fieldbus System

A B A B A B A A A B For the I/O Unit part number mounted, refer to the following pages.

energy saving effect

detected. v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v Reference item dt HED < For 400 V type and option B [With earth leakage breaker]> 3.

ZX

(For replacement) How to order (1) Valve unit (Supply valve: Air operated) (For replacement) How to Order Unit for Replacement (1) Valve unit (2) Adsorption confirmation switch unit 15 C 0X B ZSP1 D K1 B V ZX1 5 Z B D S L Applicable nozzle diameter Vacuum pump for system Single (PD port is equipped with plug.)

MY1

guide type) 63 50 Mounting position A 335.5 290.5 B 138.5 123.5 Operating range l Note) 11 11 A B 100 Solid State Switches D-F9/3 Wire, 2 Wire (Direct Mount) Series MY1 D-F9N (V), D-F9P (V), D-F9B (V) Applicable cylinder series 16 10 20 25 32 40 50 63 80 100 Bore size (mm) MY1B (Basic) G G G MY1M (Slide bearing) G G MY1C (Cam follower guide) G G MY1H (High precision guide) G G G Auto switch

7.4

V Rc1/8 V V 2 V 1(P), 3(R) 4 V Piping specifications 1/8" V 5/32" V Port size M3 V M5 V V 2 V V V Note 1) V 4(A), 2(B) 3.2 V V Note 1) 4 V V V Note 1) V 1/8" V V V 5/32" V V V Type of wiring C Kit: Connector C Kit: Connector S Kit: Serial transmission (EX510) C Kit: Connector Connector kit Connector kit Direct EXH outlet with built-in silencer V Page 755 Blanking plate assembly V V V Page

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Parts (b) Lever Description Note C4: A, B port One-touch fitting for 4 C6: A, B port One-touch fitting for 6 No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(Inch) 1 /4 3/8 1/8 5/32 1/4 5/16 M5 Pressure Specifications VP4 V V V VQZ1000 V VQZ2000, 3000 Series A, B port 2 position single 2 position double 3 position V V V VQZ2000 Metal seal only VQZ3000, 3 position 0.15 to 0.7MPa 0.1 to 0.7MPa V V V V VQZ3000 External pilot pressure range VQ Note) Millimeter sizes of One-touch fittings (Cl) are also available.

Brake mechanism added

V V V V V V Clevis pin V Single knuckle joint V V V V V V V Double knuckle joint (with pin) V V V V V V V Option With rod boot V V V V V V V * Refer to page 690 for dimensions and part numbers of the option.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

, PLC 100 V, 200 V Yes Yes 12 V PLC Terminal conduit 2-wire 24 V 100 V, 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) IC circuit 24 V 5 V, 12 V 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 2-wire IC circuit 3-wire (NPN) Terminal conduit 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC 12 V 2-wire

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC 12 V 2-wire

CL

V IC circuit 5 V, 12 V 40 to 160 40 to 100 Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) Terminal conduit 5 V, 12 V 40 to 100 40 to 160 Relay, PLC 12 V 2-wire 3-wire (NPN) 5 V 12 V IC circuit Diagnostic indication (2-color indication) 24 V 3-wire (PNP) 40 to 100 12 V Grommet 2-wire Water resistant (2-color indication) 40 to 160 With diagnostic output (2-color indication

2–4

size (mm) Solid state switch D-P5DW A B HS (mm) D-P5DW Auto switch model 40, 50 A B Hs 9 7 4.5 7.5 44 50 Symbol Bore size (mm) 40 50 8 Series CQM Auto Switches/Proper Mounting Positions and Height for Stroke End Detection HS Reed switch D-A9 V Solid state switch D-F9 V D-F9 WV A B 12 HS A B 16, 20, 25 HS A B 32, 40, 50 (mm) D-F9 V, D-F9 WV D-A9 V Auto switch model Symbol A B Hs A B Hs 12

Series CE1

A76H 5V A96 A96V IC V V A72H A73H A72 A73 200V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V Grommet Yes Reed switch Solid state switch V 100V 12V A93 A90 A93V A90V Relay PLC 2 wire A80H A80 A73C A80C A79W F7NV IC No Yes No Yes 5V,12V 100V 24V 24V 12V V V V V Connector IC 5V,12V Diagnostic indication (2 color) Grommet F79 IC 5V,12V 3 wire (NPN) 3 wire

Table of Contents

button Body O-ring Seal Stud Port B Port B Port B Port B Seal Guide Chuck Guide Chuck Collet Collet Port A Release button Port A 15-3-6 2 FR One-touch Fittings Manifold Series KRM Dimensions: KRM11 2-FB Applicable tubing O.D.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Z76 5 V IC circuit Yes Grommet Z73 12 V 100 V Relay PLC 24 V 2-wire No 5 V, 12 V Z80 100 V or less IC circuit Y69A Y59A 3-wire (NPN) IC circuit 5 V, 12 V Y7PV Y7P 3-wire (PNP) Y69B 2-wire Y59B 12 V Relay PLC Grommet Yes 24 V Y7NWV 3-wire (NPN) Y7NW IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Y7PWV 3-wire (PNP) Y7PW Y7BWV Y7BW 2-wire 12 V Improved water resistance

Soft Start-up Valve

+ 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil Without mounting option V V V V B With bracket V V V V + Option b Pressure gauge Nil Without pressure gauge V V V V G Round type pressure gauge (with limit indicator) V V V V + r c Silencer Nil Without silencer V V V V S Silencer (Built-in) V V V V + 1 100 VAC V V V V 2 200 VAC V V V V 3 110 VAC [115