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400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using the FHM-100 for one hour under the following conditions.

P tight screw (4 x 14) , 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc. P tight screw (4 x 14) , 2 pcs. (3) Intermediate support bracket EX600-ZMB1for direct mounting Enclosed parts: Round head screw (M4 x 5) , 2 pcs.

Load DOCOM (Note) 24 V DC 10% 300 mA Note. If the voltage drop (maximum of 2.6 V) interferes with the relay operation, apply high voltage (maximum of 26.4 V) from external source. -12- 4. Axis No. settings Set the control axis No. with the rotary switch.

0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)) Flow rate (/min (ANR)) VE VY1 G Pressure Characteristics PPA Inlet pressure: 2.0 MPa Outlet pressure: 0.8 MPa Flow rate: 60 /min (ANR) Inlet pressure: 2.0 MPa Outlet pressure: 0.3 MPa Flow rate: 60 /min (ANR) AL ARX20

K 4 x 13 In case of IDFA3E IDFA4E to 15E1 Dimensions (mm) B C D E F G K L M N P Q A Model Port size IDFA3E IDFA4E IDFA6E IDFA8E IDFA11E IDFA15E1 15 Rc 3/8 226 410 473 67 125 304 33 36 154 21 330 13 Rc 1/2 453 498 283 275 455 270 31 42 80 240 80 15 15 Rc 3/4 485 568 355 300 300 314 41 54 87 43 101 16 603 578 396 380 Rc 1 Meaning the foot dimensions for the IDFA3E. 94 A Refrigerant R407C

MSQ Backlash 2 or less For detailed explanation of effective output, refer to the description on p.1.5-5.

Then, port P and port A are connected. At this time, there will be gaps between the armature t and the core y, but the armature will be magnetically attracted to the core y. Component Parts Operation principles Spool valve w is pushed upward by the return spring e, port P is closed, and port A and port R are opened. Caution 1.

P-80 (D) 2nd printing April, 2002 D-DAD P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

1/2 77 60 17 80 133 168 100 25 to 1000 14.5 M42 x 2 58 42 15 257.5 M14 x 1.5 56 115 52 90 56 86 16 50 41 38 19 3/4 79 72 22 97 146 187 Transaxial foot: CHSDLA PJ + Stroke Y J MM S + Stroke H B 2 x RcP GB GA Air release LY D E V V LH LT X1 X2 K F Y1 Cushion valve G C M Y2 MA ZA + Stroke SS BB LX 4 x CD Z + Stroke A ZZ + Stroke Stroke range Bore size (mm) BB CD E F GA GB H M J LH LT LX LY P

resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)

resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Additional cylinder tube length Full stroke RHC CDQ2 MK(2) RS Q G Overall length of cylinder tube RS H A Comparison of cylinder tube overall length (mm) RZQ Full stroke = 300 mm (150 + 150 = 300 mm in case of CG1BN) MI W S CG1BN150+150-XC11 Dual stroke

400 500 600 700 800 900 1000 1200 1500 LJ1S101SC 50W to 300 LJ1S202SC 100W to 300 LJ1H101SC 50W to 500 LJ1H101PB 50W to 600 LJ1H101NB 50W to 600 Standard motor LJ1H202SC 100W to 500 [Tamagawa Seiki Co., Ltd.]

connector, refer to page 8-30-52. 8-29-1 2 Series CXS Specifications 15 6 10 20 25 32 Bore size (mm) Fluid Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Piston speed Cushion Stroke adjustable range Port size Bearing type Air (Non-lube) 1.05 MPa 0.7 MPa 0.1 MPa 0.05 MPa 0.15 MPa 10 to 60C (No freezing) 30 to 600 mm/s 30 to 700 mm/s 30 to 300

Ex. 1) Cable length: 300 mm DXT1215T-5W1U-01m(-X1) Symbol for electrical entry MNon-locking push type Push the manual override button all the way down. 2.

View port G1/2 5 10 30 50 100 300 Flow rate (L/min) Conditions Fluid: Turbine oil Class 2 VG56 Measured pressure: 14 MPa Viscosity: 45 mm2/s Filter material: Paper Nominal filtration: 10 m FH64 Series Refer to page 529 for Microswitch for differential pressure indication switch. 16 0.1 10/12 0.05 0.04 0.03 06/08 Pressure drop (MPa) 0.02 03/04 0.01 0.005 0.003 5 10 30 50 100 300 Flow rate

Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output Max. 30 V, 80 mA Residual voltage 1 V or less 1.5 MPa Withstand pressure 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at no load) Current consumption

How to see the manufacturing code P O 001 January 2011 O O 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2011 P Repeated from A to Z in alphabetical order 1 O Repeated from O to Z in alphabetical order, with O for January and Z for December 2012 Q 2 P 2013 R 3 Q Fig. 1-3 Position of product label 1.4.2 Earth Label Fig. 1-4 Earth label HRS Series 1.4 Other Labels 1-5 HRX-OM-O021

1015 10 SI (kPaMPa) ( ) 13 SI kPa,MPa 14 15 16 FUNC 17 -72No.PS-OMU0002CN-D No. 4 m 4 m FUNC (Er13) 18 10 10 () 19 () / ( ) () -73No.PS-OMU0002CN-D 80 mA 7 F.S.(3.5F.S.) 1 1F.S. 1 -74No.PS-OMU0002CN-D ZSE20A() ZSE20AF() ISE20A() 0.0-101.0 kPa -100.0100.0 kPa -0.1001.000 MPa / 10.0-105.0 kPa -105.0105.0 kPa -0.1051.050 MPa / 0.1 kPa 0.001 MPa 500 kPa 1.5 MPa DC1224 V10 (p-p