Series 10/11-C(D)A2, available for clean environment, prevent particle generation in a clean room. 21/22-C(D)A2 series offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted. The CDA2 clean series is auto switch capable.

Ionizer

(c)When a sensor is not connected.

FQ1

glycol 1, 4-dioxane 49.5 (43) Ether MTBE TAME INLET OUTLET Pyridine Amine Butyl amine Fuel C: Methanol = 75/25 Gasohol Fuel C: Methanol = 50/50 Fuel C: Methanol = 25/75 Consult SMC for fluids other than those listed. 6 Series FQ1 Made to Order Consult SMC for detailed dimensions, specifications and lead times. 4 Nonstandard Elements for Precision Cleaning -X0 X0 FQ101 Option Element size

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

E L type has 300 mm and 600 mm only. 3 C ATEX Compliant 5 Port Solenoid Valve Series 52-SY Safety Instructions Specifications 1) This product is not suitable for Zone 0.

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

Nil S n Mounting B L F G C D U T E BZ FZ UZ Basic Axial foot Front flange Rear flange Single clevis Double clevis Front trunnion Rear trunnion Integral clevis Boss-cut basic Boss-cut front flange Boss-cut front trunnion Bore size 20 25 32 40 Auto switch 20 mm 25 mm 32 mm 40 mm Nil Without auto switch (Built-in magnet) Please select the applicable auto switch model from the table below.

Magnet: D (Built-in), Mounting: C (Rear Pivot), Bore Size: 125 (1 1/4"), Stroke: 0250 (2 1/2"), Cushion: C (Rubber Bumper)

99

Filtration efficiency 99.9% Membrane FGH200 to 300 0.2 m EB ES X40 0.4 m Port size Element classification Note) 03 04 06 10 Rc3/8 Rc1/2 Rc3/4 Rc1 Element HEPO 2 Membrane Symbol J D Note) Refer to pages 70 to 73 for details about specifications, models, dimensions, etc. regarding the elements.

CG1-SMV13_en

Year Month 2015 2016 2017 2025 2026 2027 T U V D E F Bore Size (mm) Torque 10% (N.m) Jan O TO UO VO DO EO FO Instruction Manual CG1*N25&100-*Z-X2992 Air Reservoir 32 2.9 Feb P TP UP VP DP EP FP 40 4.9 Mar Q TQ UQ VQ DQ EQ FQ 50 11.8 Apr R TR UR VR DR ER FR 63, 80 24.5 Do not service or attempt to remove product and May S TS US VS DS ES FS machinery/equipment until safety

Magnet: D (Built-in), Mounting: C (Rear Pivot), Bore Size: 125 (1 1/4"), Stroke: 0500 (5"), Cushion: C (Rubber Bumper)

Magnet: D (Built-in), Mounting: C (Rear Pivot), Bore Size: 125 (1 1/4"), Stroke: 0300 (3"), Cushion: C (Rubber Bumper)

Magnet: D (Built-in), Mounting: C (Rear Pivot), Bore Size: 125 (1 1/4"), Stroke: 0150 (1 1/2"), Cushion: C (Rubber Bumper), Rod Boot: J (Nylon)

Magnet: D (Built-in), Mounting: C (Head Side Pivot), Bore Size: 125 ( 1 1/4"), Stroke: 0100 (1"), Cushion: C (Rubber Bumper), Actuation: T (Single Acting, Spring Extend), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Magnet: D (Built-in), Mounting: C (Rear Pivot), Bore Size: 125 (1 1/4"), Stroke: 0800 (8"), Cushion: C (Rubber Bumper), Rod Boot: Without Boot, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Magnet: D (Built-in), Mounting: C (Rear Pivot), Bore Size: 125 (1 1/4"), Stroke: 0050 (1/2"), Cushion: C (Rubber Bumper)

Magnet: D (Built-in), Mounting: C (Rear Pivot), Bore Size: 125 (1 1/4"), Stroke: 0050 (1/2"), Cushion: C (Rubber Bumper), Rod Boot: K (Neoprene)

Magnet: D (Built-in), Mounting: C (Rear Pivot), Bore Size: 125 (1 1/4"), Stroke: 0050 (1/2"), Cushion: C (Rubber Bumper), Rod Boot: Without Boot, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)

Magnet: D (Built-in), Mounting: C (Rear Pivot), Bore Size: 125 (1 1/4"), Stroke: 0100 (1"), Cushion: C (Rubber Bumper), Rod Boot: Without Boot, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: C (Rear Pivot), Bore Size: 125 (1 1/4"), Stroke: 0100 (1"), Cushion: C (Rubber Bumper), Rod Boot: Without Boot, Auto Switch: A93V--Reed, DC Volt, AC Volt, LED, Vertical

Magnet: D (Built-in), Mounting: C (Rear Pivot), Bore Size: 125 (1 1/4"), Stroke: 0100 (1"), Cushion: C (Rubber Bumper), Rod Boot: Without Boot, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Magnet: D (Built-in), Mounting: C (Rear Pivot), Bore Size: 125 (1 1/4"), Stroke: 0150 (1 1/2"), Cushion: C (Rubber Bumper), Rod Boot: Without Boot, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)