Solid State Vacuum Regulator

Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Terminal q DC (+) w N.C e DC () r IN (1 to 5 V) e w q Power supply/Output connection cable (Accessory) Power supply/Output connector (8P) Pin no. 7 Green 8 Yellow 6 Red 5 Gray 4 White 3 Black 2 Blue 1 Brown i u y t r e w q Pin no.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

bolt B at ot ot (For clockwise rotation end adjustment) 5 5 r r 9 se 9 e e is e wi g w g n n k k ra oc c a o t r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m

LEF-OM002xx

Speed Speed Acceleration Deceleration Position In pos ON INP output ON OFF 25 - Step No. 1: Positioning operation a b c d e f g h i j k Step data No.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

C C C D D D D Body (material: A6063) K C C C C E E E E E E E E KF flange F F F Fn n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions

Adsorption Plate

B D F G E Element fixing nut N pcs. 4 x 5.5 drill 9.5 depth of counter bore 7 (mounting hole) A B C D E F G N Part no.

Magnet: D (Built-in), Mounting: U (Front Trunnion), Style: N (Non-lube Rubber Bumper), Bore Size: 40mm, Thread: None, Stroke: 75mm, Option: None, Lock Style: D (Spring/Air Pressure Lock)

Magnet: D (Built-in), Mounting: U (Front Trunnion), Style: N (Non-lube Rubber Bumper), Bore Size: 40mm, Thread: None, Stroke: 75mm, Option: None, Lock Style: P (Air Pressure Lock-up (Pressure Lock))

Magnet: Built-in, Mounting: Front Trunnion, Style: Non-lube Rubber Bumper, Bore Size: 40mm, Thread: None, Stroke: 75mm, Option: None, Lock Style: Spring/Air Pressure Lock, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

Magnet: Built-in, Mounting: Front Trunnion, Style: Non-lube Rubber Bumper, Bore Size: 40mm, Thread: None, Stroke: 75mm, Option: None, Lock Style: Air Pressure Lock-up (Pressure Lock), Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

MHL2

B C D E F G H 148 206 246 Model MHL2-40D MHL2-40D1 MHL2-40D2 80 138 178 188 246 286 288 406 486 116 174 214 348 466 546 72 130 170 12-4-13

Miniature Tubing & Miniature Fittings

steel J D I G F E C Thread B A Barb one-touch: M-32F-2, M-04F-2 Applicable tubing (mm) a (O.D. x I.D.) b (O.D.) 3.2 4 2 x 1 .2 Weight g B C D E M A Model M-32F-2 M-04F-2 17.7 18 1 3.7 14 7.5 8.5 2.4 2.9 4 0.9 12.7 Parts list 4 3 2 1 E Material Brass Brass NBR No. 1 2 3 4 Description Sleeve Body Seal Cassette Note Electroless nickel plated Electroless nickel plated D C POM, Stainless steel

NCY2 series

2 E 1 0 E E _ E 5 E E c r l 0 1 2 3 4 5 6 7 I I 101112131415 Distance from cylinder axis: Lo (cm) Example The required load, Fo =100(N) and the moment arm, L0 = Bcm refering to Data 1, draw a vertical line from the 8cm value of the horizontal axis.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

0 e r w o i e r w o i u y t q u y t q Component Parts No. Description Material Note Body A PBT q Body B Electroless nickel plated Brass w Needle Electroless nickel plated Brass e Spring Steel wire r U seal HNBR t Spacer POM (1) y Cassette POM, Stainless steel (2) u Seal NBR i O-ring NBR o Retaining ring for hole type C Tool steel !

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

2 E 1 0 E E _ E 5 E E c r l 0 1 2 3 4 5 6 7 I I 101112131415 Distance from cylinder axis: Lo (cm) Example The required load, Fo =100(N) and the moment arm, L0 = Bcm refering to Data 1, draw a vertical line from the 8cm value of the horizontal axis.

44

Construction e q r q q Principal Parts Material No.

Miniature Tubing & Miniature Fittings Series TU/M

steel J D I G F E C Thread B A Barb one-touch: M-32F-2, M-04F-2 Applicable tubing (mm) a (O.D. x I.D.) b (O.D.) 3.2 4 2 x 1 .2 Weight g B C D E M A Model M-32F-2 M-04F-2 17.7 18 1 3.7 14 7.5 8.5 2.4 2.9 4 0.9 12.7 Parts list 4 3 2 1 E Material Brass Brass NBR No. 1 2 3 4 Description Sleeve Body Seal Cassette Note Electroless nickel plated Electroless nickel plated D C POM, Stainless steel

ZQ

Suction filter ZF With L type plug connector ZP Vacuum pressure switch PE P EXH ZCU AMJ S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard products Nil L R S a b h g d c f e Operating direction Left Right Load weight Light Low Heavy Bore size (mm) Series Guide type Note) Plugs are installed in ports other than those indicated for the model. 6 10 15 20 25 32 40 50 63 L R S Nil Model Clean room rodless CYP High precision guide type Piping port position a b c d e f g h Right Left Right Left Right Left Right Left Operating

Transfer

2 x H A B C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.