Compact Cylinder

140 160 45 50 55 60 65 70 75 80 85 90 55 60 65 70 75 80 85 90 95 100 110 130 150 C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B80-10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40

Flow Control Equipment

Speed exhaust controller Option None P The effective area is two times larger With spatter cover C Body size than that of speed controller. Hexagonal lock nut K M3 M5 1/8 1/4 3/8 1 2 3 4 5 Note) Option should be indicated in order of C and K. Only available for ASV310F,410F and 510F.

Air Slide Table Series MXP

L2 Kinetic Energy 2 1 420 2 E = 0.2 () = 0.018 2 1000 V = 1.4 x 300 = 420 1 420 2 E = 0.2 () = 0.018 2 1000 V = 1.4 x 300 = 420 1 V 2 E = W () 2 1000 1 V 2 E = W () 2 1000 Find the kinetic energy E (J) of the load.

OMR0032

There is a raised part on the controller side. (2) Dimensions Actuator side Controller side Protruding part 86 - 15.4 Controller setting cable (1) How to Order L E C W 2 A C Communication cable L E C W 2 U USB cable PC Communication cable (LEC-W2A-C) USB cable (LEC-W2-U) Controller configuration software USB driver Download from SMCs website https://www.smcworld.com (2) Operating environment

air-filter-e

NBR FKM C S A Note 2) T N V Symbol Number of arranged elements Note 1) Not used with fiber elements.

Angle Seat Valve

400 200 VXB215 B E(H) 100 300 400 500 600 200 VXB215 C F(H) 100 300 400 500 600 700 800 200 Flow rate Q [kg/h] How to read the graph The sonic range pressure to generate a flow rate of 300 kg/h is P1 0.3 MPa for the VXB215C F(H).

Air Preparation Equipment

NBR FKM C S A Note 2) T N V Symbol Number of arranged elements Note 1) Not used with fiber elements.

CG5-S

(mm) Stroke range A Bore size (mm) P AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM S ZZ NA 20 1/8 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 83 124 29 to 200 25 1/8 22 19.5 17 50 18.5 10 36 5.5 6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 83 129 29 to 300 32 1/8 22 19.5 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 85 131 35.5 to 300 40 1/8 30

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

to 2100 300 to 2100 +3.00 to +21.00 mA 1: Follow the methods below when assigning the user set upper and lower limit by E.O.

Thermo-dryer

(Refer to page 3.) 8 Selection of accessories Correction Factors Data Inlet Air Temperature Data Outlet Air Pressure Dew Point Data Air Flow Capacity A C E Inlet air temperature F (C) Correction factor Outlet air pressure dew point F (C) Correction factor 3.5 (100) 7.1 (200) 10.6 (300) 14.1 (400) 17.6 (500) 21.2 (600) 24.7 (700) 28.3 (800) Air flow capacity scfm (L/min [ANR]) Model IDH4 IDH6

Angle Seat Valve /

400 200 VXB215 B E(H) 100 300 400 500 600 200 VXB215 C F(H) 100 300 400 500 600 700 800 200 Flow rate Q [kg/h] How to read the graph The sonic range pressure to generate a flow rate of 300 kg/h is P1 0.3 MPa for the VXB215C F(H).

Gun Type Ionizer

1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200

Solid State Auto Switches

4524, JIS C 4525, IEC 947-5-2, NECA 0402 Conformed standard 300 m/s2 Impact resistance IP67 (IEC60529 standard) Enclosure 100 M or more at 500 VDC measured via megohmmeter Insulation resistance 1500 VAC 1 minute (between contacts), Leak current 1 mA or less Withstand voltage M8-4 pin Dimensions Connector model 10 Sensor section M8-3 pin 4 pin 31.4 M12-4 pin 14 Sensor section M12-4 pin 44

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L G ZA F H K J ZX I B C E D A ZR ZM 2 x M3 countersunk head screw mounting hole ZMA ZQ ZH ZU ZFC10, 20 ZL Applicable tubing O.D.

LEJ-OM002xx

(Manufacturable stroke range:LEJB40/ 200 to 2000mm, LEJB63/ 300 to 3000mm) Product Weight Series LEJB40 Stroke [mm] 200 300 400 500 600 700 800 900 1000 1200 1500 2000 Weight (kg) 5.7 6.4 7.1 7.7 8.4 9.1 9.8 10.5 11.2 12.6 14.7 18.1 Extra weight of lock (kg) S2:0.2 / S6:0.3 / T6:0.2 Series LEJB63 Stroke [mm] 300 400 500 600 700 800 900 1000 1200 1500 2000 3000 Weight (kg) 11.5 12.7 13.8 15.0

Air Slide Table Series MXJ

400 500 600 700 0.4 MXJ8 0.3 0.5 0.35 Rubber stopper 0.4 0.30 0.2 Load mass W kg Metal stopper 0.25 0.3 0.20 0.15 0.2 100 50 200 300 0.1 100 50 200 300 400 500 Average speed Va mm/s 0.10 500 700 Average speed Va mm/s Collision speed V mm/s 0.05 400 600 0.00 200 100 300 400 500 600 0 Collision speed V mm/s (Average speed x 1.4) 700 Table (2) Max.

AC Servo Motor Driver (CC-Link Type)

Please change the parameter in the initial setting. *3 The minimum unit of the travel distance of the actuator should be 1 [m]. -27- Recommended Parameter Values [LEY] LEY25/LEYG25 LEY25D/ LEYG25D LEY32/LEYG32 LEY32D/ LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Parameter *1,*2 Para.

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

8 to 400 30 to 1200 20 to 850 10 to 300 401to 500 10 to 600 5 to 300 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 601 to 700 20 to 630 12 to 420 6 to 230 24 to 930 16 to 620 8 to 310 30 to 1200 20 to 850 10 to 300 In-line Stroke 701 to 800 20

Fieldbus system EtherNet/IP compatible SI Unit

to 2100 300 to 2100 +3.00 to +21.00 mA 1: Follow the methods below when assigning the user set upper and lower limit by E.O.

VCS

Note 1) The same bracket is used for VCS3 and VCS4 (port size 1/2). 17-2-44 7 Series VCS Direct Operated 2 Port Solenoid Valve For Steam Dimensions Grommet:G Conduit: C Q 300 F D 280 D Q F VC C G1/2 C R R VDW VQ E E B A H 2-P Port size VX2 A B H 2-P 2-M Thread depth N 2-M Thread depth N VX Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main