3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Note) For the special voltages, please consult with SMC.

Electromagnetic Digital Flow Switch

50 ms 50 ms * When accumulated pulse output is selected, the indicator light is turned off.

MU

Snap ring Type C 8 for axis Type C 10 for axis Type C 10 for axis Type C 14 for axis m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part no.

OMU0023

How to order L E C C G 1 L Cable length(L) K 0.3m L 0.5m 1 1m ii. Dimensions 70 - (3) Cable between branches (between the branch connectors) i. How to order L E C C G 2 L Cable length(L) K 0.3m L 0.5m 1 1m ii. Dimensions (4) Branch connector i. How to order L E C C G D Branch connector ii. Dimensions (5) Terminating resistor i. How to order L E C C G R ii. Dimensions 71 - 8.

HRX-OM-W002

Table 3-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of 3 C between inside Differential temp. of 6 C between inside radiation Model (kW) and outside of and outside of installation area installation area HRR012-A-10/20Approx.2 40 20 HRR018-A-10/20Approx.4 70 40 HRR024-A-10/20Approx.5 90 50 HRR030-A-10/20Approx.6 100 60 3.2 Installation

CM2

185 185 190 20 25 32 40 24 24 24 25 36 36 36 46 With rod boot (mm) ZZ Symbol Z 1 to 50 143 147 149 181 l 1 to 50 63 67 67 71.5 Stroke 1 to 50 12.5 12.5 12.5 12.5 Bore 51 to 100 25 25 25 25 101 to 150 37.5 37.5 37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75 75 51 to 100 76 80 80 84.5 101 to 150 88 92 92 96.5 151 to 200 101 105 105 201 to 300 126 130 130 51 to 100 156 160 162 194 101

Square Tube Type Air Cylinder Series MB1

212 B FY Rear flange type Bore size (mm) Stroke range B FD FT FX FY FZ ZZ 32 40 50 63 80 100 79 90 110 120 153 178 to 500 to 500 to 600 to 600 to 750 to 750 50 55 70 80 100 120 7 9 9 9 12 14 10 10 12 12 16 16 32 36 45 50 63 75 141 145 164 164 202 202 64 72 90 100 126 150 FX FZ FT ZZ + Stroke Without air cushion Single clevis type/(C) Bore size (mm) ZZ Z Port Cushion valve 32 40 50, 63 80

Modular Type Air Filter Series AF

B With bracket C Float type auto drain (N.C.)

Soft Start-up Valve

CAT.ES40-63A AV2000-A/3000-A/4000-A/5000-A Series Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series Improved flow rate characteristics *1: Up to 2.3 times 2(A) C[dm 3/(sbar)]: 9.2 Fill time: Up to 50% shorter (P)1 3(R) *1 For high speed air supply C[dm 3/(sbar)] Body size AV-A Current model Low speed air supply High speed air supply Pressure in the tank New New 20 9.2 4 AV2000-A Current

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

Dd9 L d l m t -0.030 -0.040 -0.040 -0.076 -0.040 -0.076 -0.040 -0.076 -0.050 -0.093 IY-J015 IY-G02 IY-G03 IY-G04 IY-G05 10 5 16.6 4.8 12.2 1.5 0.7 C type 5 for shaft 16 8 21 7.6 16.2 1.5 0.9 C type 8 for shaft 20 10 25.6 9.6 20.2 1.55 1.15 C type 10 for shaft 25, 30 10 41.6 9.6 36.2 1.55 1.15 C type 10 for shaft 40 14 50.6 13.4 44.2 2.05 1.15 C type 14 for shaft 9

MU

CD-MU02 CD-MU03 CD-MU04 CD-MU05 (mm) 25 C shape for axis8 C shape for axis10 33(10) 32 32(5) 40 36(5) 50 38(0) 63 Size C shape for axis10 L(d) 49(0) C shape for axis14 If the cylinders must be operated with the mounting pitch less than indicated above, they must be shielded with steel plates or magnetic shield plates (Part No.: MU-S025). Contact SMC for details.

Multi-Axis Step Motor Controller

5 ENC c Encoder connector (16 pins) Axis 3: Connect the actuator cable. !6 MOT c Motor power connector (6 pins) !7 ENC v Encoder connector (16 pins) Axis 4: Connect the actuator cable. !8 MOT v Motor power connector (6 pins) !

Process Valve

VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Electrical entry: D or DZ only Electrical entry: D or DZ only Coil rated voltage 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 4 Note 1) Manual override 5 6 Note 1) Non-locking push type Nil A Electrical entry CE-compliant G Non-locking push type

3

This is the same concept representing the easy to run through as sonic conductance C.

MXS Series Air Slide Table

Z ZZ (NN-1) X H G H 29 11.5 29 11.5 A B 9.5 5.1 11 11 30 1.5 A B 5H9 5 deep +0.030 0 6 NN-M6 X 1 thread 12 deep 5H9 5 deep +0.030 0 HA GA Cross section AA Cross section BB (mm) Model F 50 50 50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA M 83 83 83 93 108 147 200 254 306 NA 2 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 8 HA 35 35 35 35 35 70 70 76 88 ZZ 97 97

HRX-OM-X084

TEMP READY function setting example [1] Circulating fluid temperature at start of operation: about 20 C [2] Circulating fluid setting temperature: 15 C [3] "TEMP READY Bandwidth (Upper Limit)": Set to "2.0 C". [4] "TEMP READY Bandwidth (Lower Limit)": Set to "-2.0 C". [5] "TEMP READY stabilization time": set to "60 sec". [6] "TEMP READY monitoring start time": set to "30 sec". [7] "Time

Brake mechanism added

) 20 75 90 100 110 (Different surfaces) 100 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) Note 2) 110 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) Note 2) (n = 2, 4, 6, 8, ) Note 1) 20 + 50 (n 2) 2 90 + 50 (n = 4, 8, 12, 16, ) Note 2) (n 4) 2 D-B59W 75 + 50 (n 2) (n = 2, 3, 4, ) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 110 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) (

LEF-OM006xx

INC 100 -10.00 3000 3000 0 0 0 100 10.00 20.00 0.50 30[mm] No.1 No.1INC 10INC) C :10(INC) 50[mm] 0 10 20 30 40 50 [mm] [mm] -10INC) C :-10(INC) 10[mm] 0 10 20 30 40 50 [mm] [mm] -24- ) 1. 2. 3.No.1 4.No.2 5. 1 SVON(ON SVRE(READY 2 SETUP SETON INP(IN ) OUT0 OUT1 OUT2 3)4) OUT3 OUT4 OUT5 INP BUSY IN0 IN1 IN2 IN3 IN4 IN5 DRIVE 3)5) No.1 3 OUT0 OUT1 OUT2 3)

48

The C dimension is 77.5 mm.

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64