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Pulse Signal Wiring Details Pulse signal output of positioning unit is differential output Positioning unit Inside of the driver NP+ 1 k NP 120 PP+ 1 k PP 120 Pulse signal output of positioning unit is open collector output Pulse signal power supply Positioning unit Inside of the driver Note) Connect the current limiting resistor R in series to correspond to the pulse signal voltage.

2 Driver type* Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1 100 to 120 A2 LECSA2 200 to 230 B1 LECSB1 100 to 120 B2 LECSB2 200 to 230 C1 LECSC1 100 to 120 C2 LECSC2 200 to 230 S1 LECSS1 100 to 120 S2 LECSS2 200 to 230 LEY25: 200 mm or less LEY32: 100 mm or less *3 Rod flange is not available for the LEY25 with stroke 30 mm and motor option With lock. *4 Head

75 IDU-FL211 IDU11E 375 265 75 360 320 90 IDU-FL212 IDU15E1 440 370 120 440 375 120 IDU-FL215 IDU22E 420 315 100 555 415 170 IDU-FL216 IDU37E 550 365 140 580 540 230 IDU-FL217 IDU55E 720 400 175 735 515 265 A filter set for the IDF-FL200 to 214 consists of 1 filter.

120 177 177 177 227 227 227 285 285 110 110 110 130 130 130 150 150 120 120 120 140 140 140 170 170 30 310 380 450 520 590 45 385 485 585 685 560 650 750 850 Fixed Connection part dimensions/ Companion flange Female threaded companion flange L-type block companion flange Differential pressure indication switch d Differential pressure indicator d (75) (50) E (Rc) L-type block Y P Z G Q

0 Driver type*6 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 11LEJS 11LEJS 25Au Vacuum port

When the source pressure is 1700 psig (11.7 MPa), achievable delivery pressure is around 125 psig (0.86 MPa ) (HF and FC option 120 psig (0.83 MPa)). 2) 250 psig outlet pressure preset at 800 psig (5.5MPa) inlet pressure. Custom inlet/outlet pressure settings available.

Error Codes 120 9. Troubleshooting 121 10. Release Notes 123 -2No.EX-OMV0017-C 1. Introduction This operation manual describes the installation, construction of screens and operation method of the I/O configurator for NFC.

PB26) kpps pulse r/min (6) (PB28) 9 14 9 9.6.4 (1) (a) PB06 GD2 4.0 PB07 PG1 100 rad/s PB08 PG2 120 rad/s PB09 VG2 3000 rad/s PB10 VIC 20 ms PB29 GD2B 10.0 PB30 PG2B 84 rad/s PB31 VG2B 4000 rad/s PB32 VICB 50 ms PB26 CDP 0001 (ON/OFF ) PB28 CDT 100 ms PB33 VRF1B Hz PB34 VRF2B Hz (b) (CDP) OFF ON OFF CDP CDT100ms 100 4.0 10.0 4.0 120 84 120 3000 4000 3000

113.10 Table A Cf Compression Factor "A" Constants for Various Pressure Drops Inlet Pressure (PSI) 2 PSI P 5 PSI P 10 PSI P 10 1.6 0.102 20 2.3 0.129 0.083 0.066 30 3.0 0.113 0.072 0.055 40 3.7 0.097 0.064 0.048 50 4.4 0.091 0.059 0.043 60 5.1 0.084 0.054 0.040 70 5.7 0.079 0.050 0.037 80 6.4 0.075 0.048 0.035 90 7.1 0.071 0.045 0.033 100 7.8 0.068 0.043 0.031 110 8.5 0.065 0.041 0.030 120

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

113.10 Table A Cf Compression Factor "A" Constants for Various Pressure Drops Inlet Pressure (PSI) 2 PSI P 5 PSI P 10 PSI P 10 1.6 0.102 20 2.3 0.129 0.083 0.066 30 3.0 0.113 0.072 0.055 40 3.7 0.097 0.064 0.048 50 4.4 0.091 0.059 0.043 60 5.1 0.084 0.054 0.040 70 5.7 0.079 0.050 0.037 80 6.4 0.075 0.048 0.035 90 7.1 0.071 0.045 0.033 100 7.8 0.068 0.043 0.031 110 8.5 0.065 0.041 0.030 120

Series ARP3000 Direct Operated Precision Regulator Modular Style Specifications 111 111 111 112 112 112 112 113 113 114 114 114 115 115 117 118 119 119 119 120 121 122 122 122 123 123 124 126 127 133 133 134 134 136 137 142 142 142 146 146 148 149 150 155 155 155 156 156 157 158 158 158 159 160 161 162 162 162 163 163 163 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

20A VNA4-25A 72.5 80.5 74.5 79.5 82.5 125.5 142.5 24.3 63 124 2.3 52 42 25 26 28 34 4.5 14 55 60.5 73 1 84 100 92 108 135.5 137 153 154 170 83.5 89.5 88.5 94.5 91.5 97.5 28.3 33.3 80 90 2.3 2.3 62 72 50 60 30 35 31 36 35 40 43 49 5.5 6.5 17.5 20 151.5 32A, 40A, 50A Port size Main Port Rc(PT) Pilot port A B C D E F G H I J K L M Model Rc(PT) 1 8 1 4 1 4 VNA5-32A VNA6-40A VNA7-50A 1 4 1 105 120

32 82.5 33 286 386 511 611 736 836 7 2 13 120 32 33 5 92 399 524 624 1049 949 749 849 Hexagon socket head cap screw is used for mounting hole. 7 0 185 46 2.5 20 120 29 D-X Technical Data 1169 Air-hydro Converter CCT Series How to Order CCT 63 100 CE-compliant Nil Q CE-compliant (Refer to Table 1.)

80 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 16 12 126 153 100 60 100 120 75 35 16 205 14 20 140 25 230 110 60 20 75 16 6.5 230 220 71 14.5 150 178 120 6-13-10 10 Series CP95 ISO/VDMA Cylinder: Standard Type Double Acting w/ End of Stroke Cushioning Dimensions: Cylinder Mounting Accessory C, D, E and CR [First angle projection] Mounting style (C) Mounting style (

wattage specification P.1003 E-P HYREG Maximum operating pressure: 0.9 MPa Pilot type 0 1 Internal pilot External pilot Note 1) Note 1) Except body size D 0 1 01 0 VY1 Thread type Nil F N T Rc G(2) Symbol Power source voltage DC Command signal DC Input impedance Power source/Command signal NPT NPTF Nil 1 to 5 V 10 k 67 k 1 0 to 10V Note 2) Not conforming to ISO1179-1. 24 V 2 4 to 20 mA 120

Weight [g] Model ZL3 ZL6 Basic type 390 470 Port exhaust +80 +25 Vacuum pressure switch (Excluding lead wire) +20 +20 Vacuum pressure switch (Including lead wire) +60 +60 With supply valve and release valve +120 +120 With supply valve and without release valve +80 +80 With pressure gauge +30 +30 With adapter assembly for bottom mounting +60 21 Multistage Ejector ZL3/ZL6 Series Internal Circuits

0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point of application L (mm) Point of application L (mm) J D-X 20Data 10-11-7 7 Escapements Series MIW/MIS 8, 12, 20, 25, 32 How to Order Finger option Nil: Basic type (Standard) 1: Tapped on upper and lower faces 2: Tapped on all faces