Series 10-MGF ø40, ø63, ø100 Guide Table

X T V 1/4 1/4 1/8 40 P 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C M6 M6 M5 18.5 KA KB 100 63 30, 50, 75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 8 200 160 20 20 11.5 11.5 9.5 846 Guide Table 10-MGF Specific Product Precautions Be sure to read this before handling.

Information

CQ-C100 100 120 45 13 67 32 22 94 117 70 13.5 M12 x 30L 75, 100 The double clevis pin and retaining ring are not included.

Compact Cylinder with Solenoid Valve/

D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310

Slider Type/Ball Bushing Bearing

105 M10 x 1.0 40 16.5 25.5 117 130 10 10.5 29 20 28 Rc 1/8 RB1411 60 M6 x 1.0 0.5 100 130 105 1.0 M14 x 1.5 50 16.5 25.5 127 130 10 12.5 49 40 22 DRc 1/8 70 M8 x 1.25 0.5 120 160 121 1.0 M20 x 1.5 60 18.5 28.5 157 149 12 13.5 52 42 33 RB2015 Rc 1/4 90 M8 x 1.25 1.0 140 190 159 1.0 M20 x 1.5 84 20.5 35.5 187 194 12 12.5 51 36 35 -X PA dimensions are for split from center.

15

73 14 28 87 30 1 CY1S20-Z M10 x 1 RJ1007LN 40 70 90 90 4.5 9 73 16.5 87 18.5 37 106 M6 x 1 Rc1/8 NPT1/8 G1/8 38 1.5 CY1S25-Z M14 x 1.5 RJ1412LN 73 M6 x 1 Rc1/8 NPT1/8 G1/8 40 70 99 90 4.5 9 16.5 96 18.5 37 106 42 1.5 CY1S32-Z M20 x 1.5 RJ2015HN 91 M8 x 1.25 Rc1/8 NPT1/8 G1/8 40 75 119 110 5.5 11 18.5 116 18.5 37 128 50 3 CY1S40-Z M20 x 1.5 RJ2015LN M8 x 1.25 Rc1/4 NPT1/4 G1/4 65 105 142 120

Process Valve

8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) Manual override (Non-locking push type) P2 P1 F E D B A A J B C Main port 1(A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNB5-32A VNB6-40A VNB7-50A 1 8 1 4 1 4 1 4 1 2 1 1 2 105 120

Coolant Valve

port 12(P1), 10(P2) Port size: refer to table below F H (Air operated) J (External pilot solenoid) Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) P2 P1 E D 32 A K B C Main port 1(A) [Back side 2(B)] Port size: refer to table below Main port 1, 2 Pilot port 12(P1), 10(P2) A B K C D E F H J Note) Model 1 8 1 4 1 4 VNC5-32A VNC6-40A VNC7-50A 1 4 1 2 1 1 2 105 120

Steam Valve

2.3 2.3 30 35 43 49 61.5 74 637 A VND Series Port size: 32A, 40A, 50A H (Valve open) Indicator (Option) Pilot port 12(P1), 10(P2) Port size: refer to table below P1 P2 F G E A 32 B D J Main port 1(A) (Back side 2(B)) C A B Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32A VND60D-40A VND70D-50A 1 8 1 4 1 4 1 4 1 2 1 1 2 105 120

3

VXS VXS VXB VXE (3) Formula for flow rate When P2 + 0.1 0.5, choked flow P1 + 0.1 293 Q = 120 x S (P1 + 0.1) (3) 273 + T When P2 + 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + T Conversion with sonic conductance C: VXP VXR VXH VXF VX3 VXA S = 5.0 x C(5) Q : Air flow rate[L/min(ANR)] S : Effective area [mm2] P1 : Upstream pressure [MPa] P2 : Downstream

WRF100

When clamping with the clamping position offset horizontally, ensure that the offset is 120 mm or less from the center of cylinder. With a large offset, twisting forces will be applied to the cylinder. This twisting force can potentially accelerate wear and breakage of parts with the abrasion of sliding parts.

XLAQ/XLDQ

B A A XLAQ Series Case A (mm) Weight (kg) Conductance (L/s) B (mm) Model XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 0.33 40 120 5 0.6 50 133 14 65 1.3 178 45 70 190 2.0 80 : Common to the XLAQ/XLDQ series Variations Variations Bellows seal, Single acting/XLAQ 2-step control, Single acting/XLDQ Bellows type is particulate free and completely cleaned. Pressure balancing mechanism.

High Vacuum Angle Valve

Temperature distribution of the 120C specification Comparison with a KF25 flange 140 e, r, t 120 eBody 1 Temperature [C] 100 rBody 2 tBody 3 80 q, w 60 40 Heater wBellows 20 qValve 0 0 30 60 90 Time [Minute] Lightweight, Compact Large conductance, small body, excellent resistance against fluorine corrosion (body) XLA series Model A1 [mm] B [mm] Weight [kg] Conductance1 [L/s] XLA-16-2 40 108

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Vacuum pressure reached [kPa] 91 Standard supply pressure [MPa] 0.35 Standard supply pressure Response Time [ms] ZHPBM-07ZHPBM-10ZHPBM-12ZHPBM-15 63 295 143 120 86 80 455 221 190 140 Nozzle size Pad dia.

Stability of suction position,

aging resistance Excellent heat resistance, and cold resistance Excellent mechanical strength Best heat resistance, and chemical resistance Pure gum property (specific gravity) 1.00-1.20 0.95-0.98 1.00-1.30 1.80-1.82 Impact resilience v g Abrasion resistance u to g Physical properties of blended gum Tear resistance v u to g v Flex crack resistance v u to v v Maximum operation temperature C 120

AMF

Activated carbon element with large filtration area (1420 m2/g) Easy replacement of elements Model/Piping Support Type Model 8000 AMF801 24000 AMF901 Rated flow (l/min (ANR)) 2B, 3B, 4B flange 120 Port size (Nominal size B) 2B flange Weight (kg) 40 Specifications Compressed air 1.0 MPa Fluid Max. operating pressure Min. operating pressure Proof pressure Ambient and fluid temperature Filtration

Series HAW Water Cooled Aftercooler 1

140 140 140 120 140 140 140 220 60 60 90 100 100 100 200 193 193 238 289 289 289 357 293 293 326 354 354 354 428 159 159 215 219 219 219 159 159 245 264 264 264 203 203 266 324 324 324 473 130 130 165 216 216 216 267.3 35 35 138 170 276 276 365 270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72 395 83 83 212 258 366 366 500 190 390 575 893 1038 1538 950 1 2 1 1 2 1 1 1 1 2 2 3 1 1

Heatless Air Dryer Series ID 1

Replace the adsorbent according to color of the indicator. 1 4 1 2 1 2 3 4 520 615 850 961 45 45 75 75 9 9 9 9 120 120 170 170 95 95 95 95 59.5 59.5 88 88 128.5 128.5 243.5 243.5 59.5 59.5 66.5 66.5 134.5 134.5 183 183 222 222 302 302 Dew point temperature (Atmospheric pressure) 30C or less 18C 10C 5C Color of indicator ID300 ID400 ID600 Dark blue Light blue Light pink air, the capillary

Special Specifications:

x 120 x 236 140 x 140 x 383 180 x 170 x 465 63 x 63 x 136 80 x 82 x 170 90 x 90 x 233 140 x 140 x 380 140 x 140 x 490 140 x 140 x 590 80 x 80 x 153 90 x 90 x 216 140 x 140 x 250 140 x 140 x 360 140 x 140 x 460 AFF4B AFF22B AFF37B AFF75B AM150 AM250 AM350 AM550 AM650 AMD150 AMD250 AMD350 AMD450 AMD550 AMD650 AMF250 AMF350 AMF450 AMF550 AMF650 Main Line Filter 14-20-9 Mist Separator 14-20-

CRQ2

Weight JIS Symbol (g) Standard weight Size 90 180 10 120 150 15 220 270 20 600 700 30 900 1100 40 1400 1600 Values less the weight of auto switch. Precautions Be sure to read before handling. Refer to pages 11-13-3 to 11-13-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 11-1-4 to 11-1-6 for Precautions on every series.

JA/JAH/JB/JS

152 178 191 18 18 24 38 42 49 1.25 2 2 2.5 3 3 11000 18000 28000 54000 71000 71000 0.58 1.08 1.5 2.7 4.8 5.4 Option: Heavy Load Type Hydraulic: Up to 7 MPa JAH63-24-200 JAH80-30-200 JAH100-42-300 63 80 100 24 30 42 31 41 55 35 45 66 79 96 13 14 16 27 30 36 20 22 24 41 46 55 2 2 3 74 94.5 112 120 152 178 24 38 42 2 2.5 3 28000 54000 71000 1.5 2.7 4.8 10-19-8 9 Floating Joint: Heavy Load