Angle Seat Valve /

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + t When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + t Q : Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI units are also allowed to be described by L (liter). 1 dm3 = 1 L 8 VXB Series C : Sonic conductance [dm3/(sbar)] b : Critical pressure

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

CLS

MPa 0.4 MPa ) P < 0.5 MPa CLS 4000 4000 250 CLQ 3000 3000 200 MLGP 2000 2000 180 160 RLQ 250 Load weight: m (kg) Load weight: m (kg) 140 1000 1000 700 800 900 700 800 900 125 200 MLU 180 600 600 160 400 500 500 ML1C 140 400 125 D300 300 200 200 -X 20[Example] 100 100 100 500 400 300 200 100 500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa )

CNS

0.4 MPa P < 0.5 MPa CLS 3000 3000 CLQ 2000 2000 MLGP 160 140 RLQ 1000 1000 Load weight: m (kg) Load weight: m (kg) 700 800 900 700 800 900 125 MLU 600 600 160 500 500 ML1C 400 400 140 320 125 300 300 D200 200 -X 280 20100 100 100 500 400 300 200 100 500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 3000 3000 2000 2000 160 140

Precision Regulator

0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 1000 0 200 400 600 800 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) 817 IR1000/2000/3000 Series IR3000 Series The operating conditions or external disturbance may affect each of the characteristics.

KT10

However under Japanese regulation, only MPa is available in Japan. 0 600 psig/bar 1) 6 10 20 40 4.1 MPa 7 MPa 14 MPa 28 MPa 1000 psig/bar 1) 2000 psig/bar 1) 4000 psig/bar 1) 1) Under Japanese Measurement Law, this gauge should not be used in Japan.

Modular F.R.L. Units

Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40-A AFD40-A P1=0.5 MPa P1=0.3 MPa 0.04 0.04 P1=0.7 MPa P1=0.3 MPa P1=0.7 MPa P1=0.5 MPa 0.03 0.03 Pressure drop [MPa] Pressure drop [MPa] 0.02 0.02 P1=0.5 MPa P1=0.5 MPa P1=0.3 MPa P1=0.3 MPa P1=0.7 MPa 0.01 0.01 P1=0.7 MPa 0 0 0 0 100 200 300 500 400 600 200 800 1000 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 57 Mist Separator

Vacuum Filter AFJ Series

] 8 8 AFJ40-04-80-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 80 m Large flow type Nominal filtration rating: 80 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min(ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 783 AFJ20 to AFJ40 Series Construction AFJ20 AFJ30, AFJ40 OUT IN OUT IN q q r r w w (y) e (y) t e t Component Parts No.

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Sine Rodless Cylinder Series REBR Direct Mount Type

, 800 25 1200 25 200, 300, 400, 500, 600, 800, 1000 2 axes 1500 32 Note 1) Strokes exceeding the standard strokes are available as a special order.

AC Servo Motor Driver (CC-Link Type)

300 150 600 300 150 1000 500 250 800 400 200 Different from the initial value. *5.

IDX-OM-W029

mm 600 mm 600 mm 600 mm 600 mm ( ) IDU Series 2-1 2 1 IDX-OM-W029 2 2 2 2 6 6-3 IDF-AB501 14 1 IDU22E,IDU37E,IDU55E,IDU75E 2 2 3 80 80 OUT IN (IN) IDU-BP336 1 IDU22E (OUT) IDU-BP337 1 IDU37E 1 IDU55E IDU-BP338 1 IDU75E 2 2 4 10mm IDU Series 2-2 2 2 IDX-OM-W029 2 2 2 5 6-1 IEC AC230V [30mA 10AIDU75E 20A] AC200V [30mA 10AIDU75E 15A] 216AWG 812 3 () 1.25 0.2m 30m

IDX-OM-W032

mm 600 mm 600 mm 600 mm 600 mm ( ) IDFA Series 2-1 2 1 IDX-OM-W032 2 2 2 2 6 6-3 2 2 3 50 50 OUT IN (IN) (OUT) 2 2 4 10mm IDFA Series 2-2 2 2 IDX-OM-W032 2 2 2 5 6-1 IEC AC230V [30mA 10AIDFA75E 20A] 216AWG 812mm 3 () 1.25mm 0.2m 30m M3 1.25-3 6.5mm M3 0.631Nm IDFA Series 2-2 2 3 IDX-OM-W032 2 2-3 () 2 () IDFA Series 2-3 2 4 IDX-OM-W032 3 / 3 / 3-1 INOUT

Vacuum System Peripherals:

B Electrical entry 1 Symbol 2 3 4 5 6 7 8 9 10 Order of manifold (Station) G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) 05 07 10 13 H M Common Individual J K A B P5 Q5 None E14 E15 E16 E17 E18 E19 M15 M21 Nil L C CL CN Nil L Nozzle diameter L L type plug connector LN LO With lead wire Without lead wire Without connector For AC, only L or LO is available.

Series VQ Metal Seal/Rubber Seal Body Ported

controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 4.5 (0.25) VQ1000 (Metal seal) 6 6.3 (0.35) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore size (mm) Series CJ2 Pressure 0.5MPa Load

ZR

Lead wire length Nil 6 10 15 20 25 30 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) ZR120S1-K15MZ-EC . 1 pc.

Process Pump

First, mark the intersection point for a discharge rate of 600 mL/min and a discharge pressure of 0.15 MPa. 2. Find the pilot air pressure for the marked point.

25

Since 45% of the clear water discharge is equivalent to 270 mL/min in the required specifications, 270 mL/min 0.45 = approximately 600 mL/min, indicating that a discharge rate of 600 mL/min is required for clear water. 3. Finally, find the pilot air pressure and pilot air consumption based on the flow rate characteristic graphs.