Oscillation Angle A: [Arbitrary Setting Type] Free setting type, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Double Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 1 to Less than 50, Valves: Not Provided, Allowable Kinetic Energy(J): 1.100, Format: With internal shock absorber, Size: 70, Switch

Bearing Style: High Precision Type, Size: 50 mm, Shock Absorber: For Low Energy, Port Location: Standard 180°, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1m, Number: -, Thread Type: -

Bearing Style: High Precision Type, Size: 20 mm, Shock Absorber: For Low Energy, Port Location: Standard 180°, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1m, Number: -, Thread Type: -

Model: MSQ, Type: Basic Type, Size: 7, Port Location: Front Port, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1m, Number: -

Model: MSQ, Type: Basic Type, Size: 2, Port Location: Side Port, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1m, Number: -

Model: MSQ, Type: Basic Type, Size: 3, Port Location: Side Port, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1m, Number: -

Model: MSQ, Type: Basic Type, Size: 7, Port Location: Side Port, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1m, Number: -

Model: MSQ, Type: Basic Type, Size: 1, Port Location: Front Port, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1m, Number: -

Model: MSQ, Precision: Basic, Size: 200, Suffix: Shock Absorbers, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1m, Number: -, Thread Type: -

Model: MSQ, Precision: Basic, Size: 100, Suffix: Shock Absorbers, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1m, Number: -, Thread Type: -

CE

screw (M3 x 0.5 x 10l ) Switch spacer Switch mounting nut Data 50 25 to 600 BQ-2 63 25 to 600 Please contact SMC regarding non-standard strokes.

CP95

, 125, 160, 200, 250, 320, 400, 500, 600 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

CE

mounting screw (M3 x 0.5 x 10l ) Switch spacer Switch mounting nut Data 50 25 to 600 BQ-2 63 25 to 600 Please contact SMC regarding non-standard strokes.

CP95

, 125, 160, 200, 250, 320, 400, 500, 600 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

Compact 5-Port Solenoid Valve

Made to Order Manifold Exploded View 16 20 25 CM2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 300 mm 32 40 50 63 CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 80 ZK2 Combination Manifold 100 Fittings, Replacement Parts, Tools 0 100 200 300 400 500 600 700 800 Average speed [mm/s] Manifold Options Specific Product Precautions * Values at extension of a directly coupled

Thermo-chiller/Rack Mount Type

] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR012 018-A-10, HRR012 018-W-10 [50 Hz] [60 Hz] 800 800 40C 32C 40C Heating capacity [W] Heating capacity [W] 600 600 32C 400

Modular Design with Uniform Body Style

0 150 100 50 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40-D AFD40-D 0.02 0.02 Pressure drop [MPa] Pressure drop [MPa] P1 = 0.5 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.3 MPa P1 = 0.7 MPa P1 = 0.7 MPa 0.01 0.01 0 0 0 600 400 200 800 1000 0 100 200 500 400 300 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 72 AFM20-D to AFM40-D Series AFD20-D to AFD40-D Series Dimensions AFM20

Series AK1000

Inlet pressure: 60 psig (0.41 MPa) 1/2 inch Connection ) 1.50 (38.1) 50 0.34 40 0.28 2.62 (66.5) Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.50 (63.5) 10 0.07 0.88 (22.4) 0 0.00 0 40 80 120 160 200 Flow Rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AK1400TA Inlet pressure: 0 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg abs) -21 600

HRX-OM-O021

Status (6): Alarm will be generated after 600 seconds that is set for "AS.23: Range over detection timer" after the circulating fluid temperature exceeds the threshold of "AS.04".

HRX-OM-R005

Status (6): Alarm will be generated after 600 seconds that is set for "AS.23: Range over detection timer" after the circulating fluid temperature exceeds the threshold of "AS.04".