Compact

1 LEF LEJ A A LEL B D-D #3 LEM LEM LEY !6 @3 @3 @5 @4 @7 @2 @4 @5 @1 LES #1 #0 u #2 i y LEPY LEPS !3 C-C A-A LER !8 @6 @8 @9 B w !2 C !7 D LEH LEY -X5 D #4 #4 11LEFS C o !0 !5 11LEJS Motor option: With lock 25A!1 LEC !2 LEC S !3 LEC SS-T @0 LEC Y !9 Motorless LAT Component Parts Component Parts LZ No. Description Material Note 1 Body Aluminum alloy Anodized No.

VQ7-6/7-8

3 3 5 3 5 Regulating port B Regulating port P Regulating port A Caution Part No.

7

size P a b d e f 3/4 1 50.5 55.5 77.5 85.5 74 81 51 58 45.5 49.5 VXD2 VXD2 5 C 6 D ( ): Denotes the Normally Open (N.O.) dimensions. 151 For Heated water/High temperature oil VXD Series 5 C 6 D Dimensions/VXD2 /2 Body Material: C37, Stainless Steel Conduit terminal (U2) E (V2) 34 C 32 25 T G1/2 M A IN OUT B K L F I 2 x P Port size (D) J Conduit (42) U E 280 C 45 T 23 G1/2 For Heated water

CG5-S

Chemical (Concentration weight %, Temperature C) Symbol FKM (40 to 150C) PVC (10 to 60C) NBR (10 to 60C) PBT (10 to 60C) AI SUS304 Hydrochloric acid (20%, Room temperature) D D B A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulfuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide

New

C 110 VAC J 6 one-touch fitting 1/8 3 D 200 VAC K L 13/64 5 Resin E 230 VAC 5/64 2 M N 8 one-touch fitting 1/8 3 F 24 VDC 13/64 5 G DIN terminal 24 VDC With surge voltage suppressor A B D E H 5/32 4 H 100 VAC 1/4 9/32 7 J 110 VAC Aluminum 5/32 4 3/8 K 200 VAC Single 9/32 7 2 Size 2 Unit L 230 VAC 5/32 4 N.C. 8 one-touch fitting J L 9/32 7 M Conduit terminal 24 VDC Resin With surge voltage

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

. 90 Drive unit 3 Basic type MSUB 7 Double vane D-R73, D-T79 D-R80, D-S79, S7P 180 20 Double vane is available with 90 rotation setting only. 11-5-2 11-5-3 3 Series MSU Precautions Be sure to read before handling.

MK

) D-F7/J79 D-F7V/F79F/J79C D-F7W/F7WV D-F79F/F7BAL/F7BAVL/F7NTL 20 to 63 Without indicator light 6.5 5.5 5 6 6 6 Reed switch 12, 16 32 to 63 4.5 4.5 5 5 D-M9/M9V D-F9W/F9WV D-F9BAL Solid state switch 5.5 5.5 5.5 6 20 to 63 With timer D-F7NTL Grommet (In-line) 5 5 5 D-P5DWL With pre-wire connector is available for D-F7NTL type, too.

51

D-A9 30 Note 1) 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) 20 + 35 D-M9V 35 20 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) 15 + 35 D-A9V 25 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) 20 + 35 35 20 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-C7 D-C80 60 + 45 (n 2) 20 + 45 60 20 5 (n = 2, 3, 4, 5

JIS Standard Hydraulic Cylinder

D-G5BA/G5NT D-G39/K39 D-A9/A9V D-A5/A6 D-A59W D-B5/B64 D-B59W D-A3/A44 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59/F59F D-F5W/J59W D-F5BA/F5NT D-G5/K59/G59F D-G5W/K59W D-G5BA/G5NT D-G39/K39 D-A9/A9V D-A5/A6 D-A59W D-B5/B64 D-B59W D-A3/A44 5.5 6 7 5.5 6.5 5.5 6 7 5.5 6.5 CHQ 4.5 4 4.5 4.5 4.5 4.5 4.5 4 4.5 4.5 4.5 4.5 CHK 4.5 5 5 6.5 6.5 4.5 5 5 6.5 6.5 CHN 8 12 9.5 11 10 8.5 13 10.5

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

64.5 4 16 54.5 5 C1 4 x 22l SWRM B E 80 80 all types Polished round 18SPCC 71.5 4 16 61.5 5 A 5 x 30l SWRM 100 Polished round 20SPCC 100, 125 all types 82 5 20 72 5 5 x 30l SWRM 160 Polished round 22SPCC 160 all types 94 5 20 79 7.5 Knuckle Material: Carbon steel d (H8) L (F8) Applicable cylinder type Order no.

MLGP

Modification method D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Number of auto switches D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL Part number 20, 25, 32 1 to 349 Applicable stroke (mm) 40 to 80 5 to 345 1 pc. 15 5 10 20 25 100 25 to 345 2 pcs. 15 5 15 20 25 Part no.: MLGPM2039F A 1mm spacer is installed in MLGPM2040F. Dimension C is 77mm. Note) Model D-P5DW can only be mounted with bore sizes 40 to 100.

MLGP

Modification method D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Number of auto switches D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL Part number 20, 25, 32 1 to 349 Applicable stroke (mm) 40 to 80 5 to 345 1 pc. 15 5 10 20 25 100 25 to 345 2 pcs. 15 5 15 20 25 Part no.: MLGPM2039F A 1mm spacer is installed in MLGPM2040F. Dimension C is 77mm. Note) Model D-P5DW can only be mounted with bore sizes 40 to 100.

CY1F

(mm) Bore size D-A9, D-A9V D-F9, D-F9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum stroke for auto switch mounting (2pcs.) (mm) D-A90V D-A96V D-A93V 22 Bore size D-F9V D-F9WV D-F9 D-F9W D-A90 D-A96 D-A93 (mm) 32 20 Mounting patternq, w 32 35 Mounting patterne 20 12 Auto Switch Mounting As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries.

SYJ300/500/700

(For manifold type 20, 21R) 1 SYJ7 2 5 M 01 Body ported SYJ7 4 5 M 01 1 Base mounted Manual override 3 port Thread type Nil: Non-locking push type D: Push-turn locking slotted type Coil specifications F Nil Rc Nil Standard G N T NPT NPTF With power saving circuit (24, 12 VDC only) T Power saving circuit is not available in the case of D, DO, W type.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

55 NN M4 x 0.7 M5 x 0.8 A 10 16 D 15 15 F 4 5 GA 8 8 GB 5 5 H 5 5 MM 28 28 Bore size With air cushion Air cushion type is not available for 21-/22-CJ2.

CLQ

Hs A Auto switch mounting height (mm) Proper auto switch mounting positions (mm) D-F9 D-F9V D-F9W D-F9WV D-A9V D-F9BAL D-F9V D-F9WV D-A9 D-A9V Bore size (mm) D-F9BAL Bore size (mm) Hs Hs Hs 20 22 22.5 25 B A B A A B 20 25 36 6.5 37 7.5 33 3.5 24.5 27 24 25 32 41 8.5 9.5 38 5.5 42 27 29 26.5 32 40 8 9 43 5 44 40 32.5 30 30.5 40 50 10.5 49 7.5 50 11.5 46 36 36.5 38.5 50 63 48 13.5 49 14.5 45

CXS

44.5 A 19.5 29.5 35.5 43 44 53 D 7.5 5 2 5 7 7.5 MY 6 10 15 20 25 32 CY MG CX Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

CXS

32 9 6 5 10 6 15 6 20 7.5 25 8 D-A9/A9V D-F9W D-F9WV 4.5 2.5 3 3 5 5 5 D-F9BAL D-M9, D-M9V 2.5 3.5 3.5 5 5 2 2.5 3 4 4 4 MX The operating ranges are provided as guidelines including hystereses and are not guaranteed values (assuming approximately 30% variations).

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

B A C D Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

High Vacuum Angle Valve

(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C H4 With 100C heater H5 With 120C heater Hightemperature type * Size 16 is not applicable to H4, H5.