Electric Actuator/Slider Type Motor Parallel Type Series LEFS LEFS16, 25, 32, 40 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

Applicable stroke table Standard Model Stroke (mm) 100 200 300 400 500 600 700 800 900 1000 Manufacturable stroke range [mm] LEFS16 100 to 400 LEFS25 100 to 600 LEFS32 100 to 800 LEFS40 200 to 1000 Strokes are manufacturable in 1 mm increments. Refer to the manufacturable stroke range. However, strokes other than those shown above are produced as special orders.

CRB2/CRBU2/CRB1

42 6 14 CRBU2WU30-S 0 0.043 0.005 0.014 4.5 69 52 42 4.5 29 M5 x 0.8 5.5 M5 x 0.8 13 12 1 12 17.5 2 22 29 47.5 50 8 16 Double vane type CRBU2WU10-D CRBU2WU15, 20, 30-D Illustrations below show size 20 actuators.

LX

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

(The dimensions are marked .) 8-29-29 30 Series CXSW Dimensions; 25, 32 CXSW25 ZZ SS 12 S 12 12 12 30 (30) Z 6 30 2-R3.5 2-M8 x 1.25 x 6l (Hexagon socket head set screw) 28 1 8 78 1 60 0.2 60 0.2 60 0.2 0.2 80 64 35 6.3 5 2-R3.5 2-6.9 through 2-11 counterbore depth 6.3 8 12 14 4-M6 x 1 (Through-hole) 4-M5 x 0.8 thread depth 7.5 2-M6 x 1 x 18.5l, 2-M6 x 1 (Hexagon bolt) (Hexagon nut) 2-M6

CXT

0 3.5 5.5 5 7.5 3.5 3 6.5 8.5 8 10.5 1.5 2 6 7 8 12 1.5 (4) 4.5 5 9 10 11 15 2 (4.5) Bore size (mm) 1.5 (1) 3.5 (1) 3 (0.5) 5.5 (3) Long Stroke 12 16 20 25 32 40 1 0.5 6 8 10.5 16.5 11 10.5 16 18 20.5 26.5 9 9.5 13 14 12.5 16 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5 22.5 5 (2.5) 8 8.5 12 13 11.5 15 10 9.5 15 17 19.5 25.5 8 8.5 3.5 1 1.5 7.5 4.5 (2) Bore size (mm) 10 (7.5) 12 (9.5) 14.5 (12)

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Scraper Cylinder bore 8 12 20 25 32 Nil S No Yes 8 mm 12 mm 10 mm 25 mm 32 mm Number of auto switches Nil S 2 pcs. 1 pc.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J (mm) DNA Model P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 RB 7 8 12 12 17 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 6 7 10 12 15 9 12.5

•

B ZZ -t2 xstrokes.1 12 + 2X!

7

VDC Grommet (With surge voltage suppressor) Nil A B C D E F G H K L Z Rc, With One-touch fitting2 VXB G NPT Rc, With One-touch fitting2 Grommet VXE Grommet (With surge voltage suppressor) 1E 12 VDC G NPT G NPT Rc, With One-touch fitting2 1F 1G 1H 1V 1J 1K 1L 1M 1W 1N 1P 1Q 1R 1Y 1S 1T VXP 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 48 VAC 220 VAC 240

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

LOCK FREE LOCK FREE Pilot type Nil Internal pilot R External pilot Valve stations F: D-sub connector P: Flat ribbon cable connector (26 pins) Note Note Stations Stations Symbol Symbol 02 02 2 stations 2 stations Connector mounting position Double wiring Note 1) Double wiring 12 12 12 stations 12 stations Symbol Mounting position 02 02 2 stations 2 stations D D side Specified layout (Up to

reduces flow setting time

Model AS1ll1FS-M5l AS2ll1FS-01 AS2ll1FS-02 AS3ll1FS AS4ll1FS Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

JXCx-OMT0061CN

->/P.12 3. ->/P.19 5. ->/P.32 10.1 ->/P.12 3. PLC 5 (PLC) 15ms30ms ->/P.55 12.4 () () (LED() ->/P.13 3.2 ) ->/P.47 11. ->/P.47 11. ->/P.47 11. ->/P.12 3. (CN1: EMG ->/P.12 3. ) 92 - 22. 10.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Model AS1ll1FSGl-M5 AS2ll1FSGl-01 AS2ll1FSGl-02 AS3ll1FSGl AS4ll1FSGl Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

CXT

16 20 25 32 40 5.5 6 2.5 0.5 1 1.5 4.5 4 7.5 9.5 9 11.5 5.5 6 10 11 12 16 14.5 15 11.5 9.5 10 7.5 0 0 3.5 5.5 5 7.5 3.5 3 6.5 8.5 8 10.5 1.5 2 6 7 8 12 1.5(4) 4.5 5 9 10 11 15 2(4.5) Bore size (mm) 1.5(1) 3.5(1) 3(0.5) 5.5(3) Long stroke 12 16 20 25 32 40 1 0.5 6 8 10.5 16.5 11 10.5 16 18 20.5 26.5 9 9.5 13 14 12.5 16 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5 22.5 5(2.5) 8 8.5 12 13 11.5 15 10

Stability of suction position,

ZP3EA-PT6-B12 [Weight: 126 g] ZP3EA-PT6-B18 [Weight: 116 g] A 32 Width across flats 24 A 32 Width across flats 24 12 24.5 12 24.5 B B 1 1 66.3 81.5 Dimensions Dimensions Part no. A B ZP3EA-PT5-B12 M12 x 1.75 12 ZP3EA-PT5-B18 M18 x 1.5 18 Part no. A B ZP3EA-PT6-B12 M12 x 1.75 12 ZP3EA-PT6-B18 M18 x 1.5 18 Applicable pad part no. ZP3E-125UM ZP3E-100BM Applicable pad part no.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Rated voltage 5 6 24 VDC 12 VDC Note 1) Light/surge voltage suppressor is built-in.

7ND9071en

125 5 12 12 6.5 8 150 6 10 8 11.5 16 9 13.5 8 13.5 13 200 8 9 7 8.5 12 6.5 9.5 7 11.5 250 10 9 7 7.5 13.5 9.5 7 10.5 300 12 8 6 6.5 9.5 7.5 6 9.5 350 14 6 6 5 9.5 5.5.11 HART version Select if device is used as HART 6 or HART 7 device by using the + and keys.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

a2 = m 12 a2 = m1 +m2 3 a12 3 a22 12 4a12 + b2 = m1 CRBU2 12 4a22 + b2 + m2 CRB1 7.

Table of Contents

F9BWV Relay, PLC 2-wire IC circuit No 5 V, 12 V 100 V or less 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) IC circuit 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Solid state switches marked with are produced upon