60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

I

/NVF323O-OD,NVF3330-OD,NVF343O-OD NVF3530-OD ( ) :3 position ( ):3 pcition X:with indicator light and surge voltage supfressor f]:with indicator light and surge voltage suppressor @ Series NVF3OO inch (mm) ( vF3r22-OG-02-F) Series Manifold B Mount Type/Dimensions inch(mm) Cornmoi ExhausVNWsF3-30-O01 (c) (D) < ):3 pqsilion f]:with indicator light and surge voltage suppressor 4 7 a 10 l l

3M/SMseries

/NVF323O-OD,NVF3330-OD,NVF343O-OD NVF3530-OD ( ) :3 position ( ):3 pcition X:with indicator light and surge voltage supfressor f]:with indicator light and surge voltage suppressor @ Series NVF3OO inch (mm) ( vF3r22-OG-02-F) Series Manifold B Mount Type/Dimensions inch(mm) Cornmoi ExhausVNWsF3-30-O01 (c) (D) < ):3 pqsilion f]:with indicator light and surge voltage suppressor 4 7 a 10 l l 12

ALF400 to 900, ALT-5/-9

VE 3 4 1 3 4, 1 1 1 1 4 1 2 , 2 VY1 G Dimensions: Auto Feed Tank PPA AL Float switch Contact point capacity: AC: 15 VA, DC: 15 W Contact point construction: 1a, 1b Width across flats 12 Float switch Lubrication plug Model A 174 174 234 234 B 70 70 108 108 C 16 16 30 30 D 7 7 7 7 E 91 91 121 121 F 182 182 242 242 G 15 15 16 16 H 24 24 40 40 I 382 382 422 422 J 414 414 472 472 K 428 428 L

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

ZB-OM00301

DC+COM A(-) C(+) COM B(-) 1N.C.ON 2 ZNR/ 3AB 23 - No.ZB-OM00301 (10ms ) 1 210ms 2 330m/s 4() A-C ON B-C ON N.C. A-C ON OFF 10msec ON 10 A B OFF 50 A B 10 1 50 3 3 24 - No.ZB-OM00301 ZB / / Assy /HNBR Assy //HNBR 25 - No.ZB-OM00301 2 ()() 5kPa () ZFAZFBZFC ON ZB1-VQ110U N.C (0.3 0.4 0.5 0.6) ZB1-VQ110L (0.30.4) ZB1-VQ120U N.C ZB1-VQ110N.C.

NVEPA|VEFseies

5 1 l 3 = % =V2 0 1 0 3 NVEP 31 4 Size I Pressure Size Code PSIG (Kg7cm2) NPTF (Base mount type) 2 1 7-90 (0.s-5.5)O2=t/c 03=% 2 15-135 (1-9) 4 1 o.7 -22.5 (0.051.s) 03=% O4=th 06 =Vr Subplates (NVEF2120; NVEFII20; NVERI I20) Part No.

LG1H

A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4sec.)

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 20 (2), Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: 1 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G2 [G46-10-02X3 (Stainless Steel at Wetted Parts)]

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 20 (2), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 1 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 20 (2), Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: 50 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]

Material: L (Body: Stainless Steel 304; Gasket/O-ring: FKM), Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 20 (2), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G2 [G46-10-02X3 (Stainless Steel at Wetted Parts)]

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 10 (1), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 20 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 10 (1), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 20 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G2 [G46-10-02X3 (Stainless Steel at Wetted Parts)]

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 20 (2), Element Type: S (Sintered Metal, Stainless Steel Material), Nominal Filtration Accuracy: 2 μm, Element Seal Material: N (NBR), Pressure Gauge: G2 [G46-10-02X3 (Stainless Steel at Wetted Parts)]

Material: S (Body: Stainless Steel 304; O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: X50 (0.5 μm), Element Seal Material: Vessel Replacement or Fiber Element Types, Option: G2 (G46-10-02X3, Stainless Steel at Wetted Parts)

Material: S (Body: Stainless Steel 304; O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Element Type: S (Sintered Metal, Stainless Steel Material), Nominal Filtration Accuracy: 5 μm, Element Seal Material: A (Non-asbestos), Option: G2 (G46-10-02X3, Stainless Steel at Wetted Parts)

Material: S (Body: Stainless Steel 304; O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 5 μm, Element Seal Material: Vessel Replacement or Fiber Element Types, Option: G2 (G46-10-02X3, Stainless Steel at Wetted Parts)

Material: S (Body: Stainless Steel 304; O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Element Type: B (Sintered Metal, Bronze Material), Nominal Filtration Accuracy: 1 μm, Element Seal Material: N (NBR), Option: G1 (G46-10-02M, Brass at Wetted Parts)

Material: L (Body: Stainless Steel 304; O-ring: FKM), Element Length: C [ℓ750 (ℓ250 x 3)], Element Type: M (Micromesh, Stainless Steel 304/Epoxy Material), Nominal Filtration Accuracy: 105 μm, Element Seal Material: V (FKM), Option: G2 (G46-10-02X3, Stainless Steel at Wetted Parts)