Vacuum Equipment If the leakage volume is 30 /min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 /min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.
Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Connection Female Thread: G Chamfered area for female
40 60 80 100 Load N 0 20 40 60 80 100 Load N 0 50 100 150 200 250 8-9-10 10 Air Slide Table Long Stroke Type Series MXY Construction @3 y w q r u #0 MX MTS !
Construction VHS20/30 VHS40/40-06/50 y i u w w t t r q IN OUT OUT IN q e o EXH. EXH. VM Component Parts No.
M16 x 1.5 16 M5 x 0.8 M6 x 1.0 76 60 41 32 25 16 12.5 20 M20 x 1.5 16 l M5 x 0.8 M6 x 1.0 90 70 50 40 31.5 20 16 20 M24 x 1.5 20 C B series rod M6 x 1.0 M8 x 1.25 145 115 75 60 E 40 30 20 24 M30 x 1.5 31.5 dH10 L L M6 x 1.0 M8 x 1.25 145 115 75 60 40 30 20 24 M39 x 1.5 31.5 M8 x 1.25 M10 x 1.5 185 145 95 80 50 40 25 26 M48 x 1.5 40 H+0.4 +0.1 D M5 x 0.8 M6 x 1.0 76 60 41 32 25 16 12.5 20
The cushion effect (smooth start-up, soft stop) cannot be obtained in an intermediate stop or return from an intermediate stop using an external stopper, etc. When using an intermediate stop considering the above information, implement measures to prevent particulate generation and set the operating pressure to no more than 0.3MPa.
The cushion effect (smooth start-up, soft stop) cannot be obtained in an intermediate stop or return from an intermediate stop using an external stopper, etc. When using an intermediate stop considering the above information, implement measures to prevent particulate generation and set the operating pressure to no more than 0.3MPa.
The cushion effect (smooth start-up, soft stop) cannot be obtained in an intermediate stop or return from an intermediate stop using an external stopper, etc. When using an intermediate stop considering the above information, implement measures to prevent particulate generation and set the operating pressure to no more than 0.3MPa.
FGF FGF FGH Choose the vessel type and number of units. 2 elements FGF1-20 2 units FGF1-20 1 unit FGF1-20 2 units FGF1-20 3 units w Vessel type and number of units FQ1 or Choose a vessel that satisfies the number of elements obtained in step q.
9 y @7 @0 @6 @5 @4 Auto switch !8 @1 @2 !6 !1 @3 !7 !0 !5 !
Mounting Bolt for CQM/Without Auto Switch Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt CQMB12-5 -10 -15 -20 -25 -30 CQMB16-5 -10 -15 -20 -25 -30 CQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB32-5 -10 -15 -20 -25
An application which could have negative effects on people, property, or animals Compliance Requirements requiring special safety analysis. 4. Use in an interlock circuit, which requires the provision of double interlock for 1.
The cushion effect (smooth start-up, soft stop) cannot be obtained in an intermediate stop or return from an intermediate stop using an external stopper, etc. When using an intermediate stop considering the above information, implement measures to prevent particulate generation and set the operating pressure to no more than 0.3 MPa.
Page 319 Features 14 Single Axis Electric Actuator High Rigidity Direct Acting Guide Series LJ1H Series LJ1H Lead screw lead mm Mounting orientation Series Page Model Motor type Guide type Ground ball screw Rolled ball screw Slide screw 12 10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12
is at least 10 to 20 times the work piece weight.
20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.
20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.
C.O. type does not have a return spring y. 12 (P1) port 10(P2) port Working Principle (Vacuum pilot type is excluded) VNB0 , 1 (N.C.)
A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room
dew point) C -20 -10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 70 80 [Example] If air at 30C and 60% humidity is pressurized to 0.7MPa, the dew point of the air will be 62C. ( ) If this is cooled to 25C, the amount of condensed water generated will be 15.2g/m3. ( ) Therefore, with an air flow rate of 3m3/min (22kW equivalent compressor), the amount of condensed water per unit of time is 15.2