Multi-Axis Step Motor Controller

Connector A B1 (Terminal no.) 1 2 5 6 B 15*1 A1 (14) (18) (17.7) (10.2) C 20*1 A6 B1 B3 A1 A3 B6 (13.5) *1 Produced upon receipt of order (Robotic cable only) 1 2 15 16 Connector B Connector D (14.7) (30.7) L (11) (10) With lock and sensor Signal Connector A terminal no. A B-1 A A-1 B B-2 B A-2 COM-A/COM B-3 COM-B/ A-3 Cable color Connector C terminal no.

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n-1/4, 3/8 2, 4 port PA L-side R-side L-side R-side D-side D-side 89 3 89 16 141 (Single) 141 (Single) 55 44 186 (Double) 186 (Double) 196 (3 position) 196 (3 position) 77.5 Bottom ported M12 connector L: Dimensions n: Stations 141.5 L n 1 Formula 2 3 4 5 6 7 8 9 10 121 5 1 12

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

MHR2-10/MDHR2-10 MHR2-20/MDHR2-20 50 60 Overhang distance H (mm) Overhang distance H (mm) 50 40 Pressure 0.2 MPa Pressure 0.2 MPa 40 30 30 0.3 MPa External grip 0.3 MPa 0.4 MPa 20 0.4 MPa 20 0.5 MPa 0.5 MPa 0.6 MPa 10 0.6 MPa 10 0 10 20 30 40 50 0 10 20 30 40 50 60 Gripping point L (mm) Gripping point L (mm) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

0.5MPa Holding force (N) Holding force (N) 0.4MPa 20 20 0.4MPa MHZ2 0.3MPa 0.3MPa MHZJ2 10 10 0.2MPa 0.2MPa MHQ MHL2 0 10 20 30 40 50 0 10 20 30 40 50 L: Holding point length mm Holding point L (mm) Holding point L (mm) MHR MHR2-20/MDHR2-20 MHR2-20/MDHR2-20 MHK Indication of effective holding force The holding force shown in the tables represents the holding force of one finger when all

Series PF2W Digital Flow Switch For Water

min) Flow rate (L/min) Flow rate (L/min) PF2W711, 511 0.035 0.030 0.025 Pressure loss (MPa) 0.020 0.015 0.010 0.005 0 10 20 30 40 50 60 70 80 90 110 100 Flow rate (L/min) Wetted Parts Construction/Sensor Unit w w r q e Parts list No. 1 2 3 4 Description Material Stainless steel NBR PPS PPS Attachment Seal Body Sensor Flow direction 306 Series PF2W For Water Digital Flow Switch Dimensions:

SMC Electronic Switch Series Variations

ZS-20-A 16 NPN Open Collector 2 output w/o analog output, 3 revolution adjustment ISl IWith lead wire ZS-20-5A 17 NPN Open Collector 2 output w/o analog output, 200 revolution adjustment Note) When ordering switch with 5m long lead wire, indicate both part numbers. Ex.) ZSE1-01-15CN1 pc. ZS-20-5A-501 pc.

HEC_W-E

Cooling capacity W 2000 Fluid: Water 1500 1000 Fluid: Fluorinert FC-77 500 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig. 6-5 Cooling capacity of HEC012 2) Heating capacity Radiating Water Temp.20 oC Radiating Water flowrate10L/min 3000 2500 Heating capacity W Fluid: Water 2000 1500 1000 Fluid: Fluorinert FC-77 500 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig. 6-

Cylinder with Lock Series CNG

seal A Urethane 56 20 Same as cushion seal A except for 20, 25 standard strokes Steel ball B Carbon steel 21 Cushion seal B Urethane 57 Tooth ring Stainless steel 22 Damper Urethane Cushion ring gasket A NBR 58 23 Same as cushion ring gasket A except for 20, 25 standard strokes C type snap ring for taper ring Carbon steel 24 Cushion ring gasket B NBR 59 C type snap ring for unlocking cam

Compact Type

32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0.01 0 0 20 40 100 60 80 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph V = over 400 mm/s; up to 50 mm stroke 13 CXSJM CXSJL Graph V = up to 400 mm/s; up to 50 mm stroke 12 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 15 15 10 10 0.01 0 20 40 100 60 80 0.01 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 5 Compact

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

40 60 80 100 Load N 0 20 40 60 80 100 Load N 0 50 100 150 200 250 8-9-10 10 Air Slide Table Long Stroke Type Series MXY Construction @3 y w q r u #0 MX MTS !

Air Slide Table Series MXQ

Nil S n L Auto switch type Nil Without auto switch Cylinder bore size (stroke mm) Refer to the table below for auto switch part numbers. 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil F R Note 2) Standard With buffer With

Compact manifold regulator ARM5 Series

PBT 2 B Port plug 2 Bonnet PBT, HNBR Refer to page 705.

3 Port Solenoid Valve Metal Seal Series VZ200 1

Cv C[dm3/(sbar)] b Cv 0.60 0.43 0.15 0.52 0.35 0.13 0.60 0.43 0.15 0.52 0.35 0.13 0.90 0.25 0.21 0.85 0.35 0.22 Flow characteristics 1 2 (P A) VKF 2 3 (A R) VQZ Body ported Max. operating frequency (c/s) (AC/DC) (1) 20 17/17 or less 0.085 20 17/17 or less 0.155 VZ Response time (ms) (AC/DC) (2) Weight (kg) (3) VS Note 1) Minimum operating frequency: as per JIS B 8373 (Once in 30 days)

15

Bumper bolt (resin tipped): Mounted on both sides Nil Bore size 6 10 15 20 25 32 40 Bumper bolt (Same as the opposite side) 6 mm Port thread type Adjustment bolt (Same as the opposite side) 10 mm Bore size (mm) Symbol Type 15 mm Shock absorber/ Adjustment bolt (metal ended): Mounted on both sides 6,10,15 M thread B 20 mm Nil Rc 25 mm TN TF 20, 25, 32, 40 NPT 32 mm Shock absorber (Same as

Mechanical Valves Series NVM, NVFM, NVZNI

4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' P T 20" O T 30' T T 50" 'Length from center to center of r o i l e r : 1 5 I n ( 3 8 l m m ) 'Length lrom cenler to end ol vane = 5 56 in (141 2mm) A B c D E F G H 0.57 14,6) 2.64 (621 1.86 ',47.2)1.45 136.8) 1 3 0 (33) 0.59 (1 5) 1.03 (26.2\ 1 0 0 r25.4', Millimeters in Parentheses A B c D E F G H 5.56 141.2 0.57 14.61 0.25 (6.4) 2 . 1 5 '54.7

IDG

IDG50L (Type B products group) IDG30L (Type B products group) 0 0 P1 = 0.3 MPa P1 = 0.3 MPa Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) 10 10 20 20 P1 = 0.5 MPa P1 = 0.5 MPa 30 30 40 40 P1 = 0.7 MPa P1 = 0.7 MPa 50 50 60 60 70 70 0 0 20 40 60 80 100 160 40 80 120 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) Courtesy

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 40 119 137.5 141 6 19.5 13.5 25 28 50 53 ZPT32F10

240

8.0 10.5 B 2.5 7.5 8.0 10.5 W 5.5 0 0 2.5 W 7.5 2.0 2.0 0.5 B 2.5 7.5 8.0 10.5 B 2.5 7.5 8.0 10.5 A 16.5 15.0 22.0 30.0 W 9.5 4.0 4.0 1.5 W 7.5 2.0 2.0 0.5 W 3.5 (6) 2.0 (0.5) 2.0 (0.5) 4.5 (2) A 12.5 11.0 18.0 26.0 B 3.5 4.0 6.5 Note 1) Negative figures in the table W indicate that an auto switch is mounted inward from the edge of the cylinder body.

HRX-OM-R016

-(BJMT) . 9-5 9.3.2 HRS030-W-20-(BJMT) . 9-5 9.4 Cooling capacity . 9-6 9.4.1 HRS030--20-(BJMT) . 9-6 9.5 Heating capacity . 9-6 9.5.1 HRS030-A-20-(BJMT) . 9-6 9.5.2 HRS030-W-20-(BJMT) . 9-6 9.6 Pump capacity. 9-7 9.6.1 HRS030--20-(BJM) . 9-7 9.6.2 HRS030--20-T . 9-7 HRS Series HRX-OM-R016 Contents 9.6.3 HRS030--20-MT . 9-8 9.7 Required facility water flow (for water-cooled type) . 9-8 9.8