CLA

.:>: ~,j 61 71 327 347 65 12.5 80 336 356 I 100 1 14 40 'I, 56 .5 15 25 80 25 226 36 0 I ",', 000'" 0 64 72 356 381 65 14.0 81 365 390 Trunnion Type/CLAT Name plate to 1rl'JlCate loclO'Jng BP lock releasl rt \ P Frorll C I'I(jQr port , GA BO lock ()f!

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

Specifications Air 1.5 MPa 1.0 MPa 0.05 MPa 5 to 60C (No freezing) 8 turns 0.8 mm2 Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Number of needle rotations Effective area of residual exhaust valve How to Order JIS Symbol 01 AS 2 000 E Body size Port size 2 3 4 Port size Applicable series 01 02 03 04 1/8, 1/4 standard 3/8 standard 1/2 standard

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

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x @ 0 1 N V : Capacity 2 0 : T ube I.D cm L : Tube length em V= 1000X4D2X L .Burst'prdof 0 x @ 0 Wat"'-o..wt(Wat..) 0 0 x @ 1 = 1 000 X"4 (O.6) 2X100 =O.02BR @ . llnte or no Influence o .

LG1H

Yawing 71 79 75 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a = 1000 a 4000 a = 2000 L1 (mm) Pitching Mep m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 3000 2000 m L1 10 20 30 0 Transfer load m (kg) L2 600 400 L2 (mm) Mer m Rolling Yawing 200 L2 Mer m 10 20 30 0 Transfer load m (kg) 4000 a =1 000

Speed Controller: Standard Type Series AS In-line Type 1

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

Please contact us for the latest version.sales@ocaire.com, MFLD, VFR3*000 SERIES/SIDE POR, VALVE, VV*FR* MANIFOLD VFR SERIES, PM, VV*FR* BASE MT 1/4, 6.94456 lb

Type: 000 (Lever Type Feedback), Pressure Gauge: 3 (1.0MPa), Construction: 1 (w/Terminal Box), Accessories: BF (B+F)

Type: 000 (Lever Type Feedback), Pressure Gauge: 2 (0.3MPa), Construction: 0 (No Terminal Box)

Type: 000 (Lever Type Feedback), Pressure Gauge: 2 (0.3MPa), Construction: 1 (w/Terminal Box)

Type: 000 (Lever Type Feedback), Pressure Gauge: 0 (None), Construction: 1 (w/Terminal Box)

Type: 000 (Lever Type Feedback), Pressure Gauge: 0 (None), Construction: 1 (w/Terminal Box), Accessories: AE (A+E)

Type: 000 (Lever Type Feedback), Pressure Gauge: 0 (None), Construction: 1 (w/Terminal Box), Accessories: AEG (A+E+G)

Type: 000 (Lever Type Feedback), Pressure Gauge: 0 (None), Construction: 1 (w/Terminal Box), Accessories: AFG (A+F+G)

Type: 000 (Lever Type Feedback), Pressure Gauge: 0 (None), Construction: 1 (w/Terminal Box), Accessories: AG (A+G)

Type: 000 (Lever Type Feedback), Pressure Gauge: 0 (None), Construction: 1 (w/Terminal Box), Accessories: B (ø1.0 Output Restriction w/Pilot Valve)

Type: 000 (Lever Type Feedback), Pressure Gauge: 0 (None), Construction: 1 (w/Terminal Box), Accessories: BF (B+F)

Type: 000 (Lever Type Feedback), Pressure Gauge: 0 (None), Construction: 1 (w/Terminal Box), Accessories: BFG (B+F+G)

Type: 000 (Lever Type Feedback), Pressure Gauge: 0 (None), Construction: 1 (w/Terminal Box), Accessories: BG (B+G)

Type: 000 (Lever Type Feedback), Pressure Gauge: 0 (None), Construction: 1 (w/Terminal Box), Accessories: EG (E+G)