AS-FG/ASD-FG

M5 type U10/32 type AS3311FG-02 Parts List No.

CNG

CNS D-H7C D-B5, D-B6, D-B59W CLS HS HS Auto switch Auto switch 12 8.5 CLQ 24.5 16 MLGP A B A B 33 38.2 RLQ MLU Proper Auto Switch Mounting Position Auto Switch Mounting Height ML1C Auto switch model D-C7/C80 D-H7 D-H7W D-H7NF D-H7BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7/C80 D-C73C D-C80C D-B5/B64 DD-B5/B64 D-B59W D-G5NTL D-H7C D-C73C D-C80C D-G5NTL D-B59W -X Bore size (mm) A B A B A B A B

Cylinder with Lock Series CNG

HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)

LJ1H

(B contact) 2 pcs.

CJP

Applicable bore (mm) 6 Applicable bore (mm) 6 NX NDH10 B L1 R1 R2 U A Part no. A B L L2 MM R1 R2 U L2 MM L1 NDd9 3 NDH10 3 NX Part no.

CJP

Applicable bore (mm) 6 Applicable bore (mm) 6 NX NDH10 B L1 R1 R2 U A Part no. A B L L2 MM R1 R2 U L2 MM L1 NDd9 3 NDH10 3 NX Part no.

MQQ

A B C Part no. B C d H D E F MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 20.5 M5 x 0.8 8 9.2 6 15.5 5 9.2 4 10 10 8 22.5 M6 x 1.0 8 9.2 8 16.5 6 11.5 5 16 16 10 24.5 M8 x 1.25 8 9.2 10 18.5 6 15 5 20 20 13 33.5 M10 x 1.25 10 11.5 12 22.5 11 19.6 6 25 25 17 40.5 M14 x 1.5 14 16 16 28.5 12 25.4 8 28 28 22 Applicable bore size (mm) Part no.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

0.3 Note 1) 10-32UNF has the same specification as M5.



the External Pilot VEX1 3 3 B A M5 G 1.

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

0.3 Note 1) 10-32UNF has the same specification as M5.

KJ

(inch) Connection thread M R Model H (Width across flats) L A M Min. port size KQ2H01-M5 KQ2H07-M5 KQ2H01-M5 M5> Weight (g) D Note) Applicable tubing KQ2H01-M5 2 9 16 6 11 12 3.3 10 15 M5 x 0.8 13.6 18 7 16.7 22 12.7 KQ2H01-01S 1 8 1 8 10 15.5 2.5 1 4 KQ2H01-02S 19.5 13.5 14 2.5 M5 x 0.8 KQ2H05-M5 10.3 20.5 18 15 15.3 18.5 17 10.7 11 14 11 24 22 21 18.4 22.5 23 16.5 1 8 3 16

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

C D Side support B MY-SB 2-J 2-H C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 G 6.5 8 9.5 11 A 61 67 81 100 120 142 172 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B M10 x 1.5 55 14.8 8.5 9 14 80 MY-S40A B M12 x 1.75 70

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10 16 4.3 2-3.2 Mounting holes Manual override 24.5 7.8(C3, C4, C6) (M5: 5.7) Cover dia 1.6 Cross section 0.34mm2 (Lead wire) 34 35 300 (53) 27.5 16.3 18 1.2 13.8 13.6 7 (7.8) (24.5) 2-3.4 Mounting holes 41 Foot bracket M5 X 0.8 P port M5 X 0.8 R port R 3 P 1 10.7 9 M5 X 0.8 External pilot port 32 (Only external pilot style (R)) L plug connector (L): VQZ115-lLl-C3, C4, C6, M5-PR M plug connector

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

27 27 34.5 37.5 Metric M5 x 0.8 M6 x 1 M8 x 1.25 M6 x 1.25 A 30.5 30.5 39 42.5 B 22 22 24.5 27.5 12 16 20 25 5.4 5.4 7 10 12 16 20 25 8 8 8 9.5 11.5 11.5 12.5 14.5 5 to 30 5 to 30 5 to 50 5 to 50 #8-32UNC #8-32UNC #10-32UNF 1/4-28UNF 6.8 6.8 6.9 8.1 (All dimension are common except "A" and "B").

Modular Type Lubricators Series AL

level gauge B B B B B B B Dimensions B Barb fitting Applicable tubing: T0604 Model Standard specifications Optional specifications Bracket mount P M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 A 25 40 53 70 75 90 95 B 77 115 142 176 176 250 268 C 26 36 38 40 38 41 45 D 12.5 20 26.5 35 35 45 47.5 E 30 38 38 45 G 35 60 80 110 110 110 110 J 12.5 20 26.5 35 35 45 47.5 M 30 41 50

PSxx-OMM0006CN

(M8(3 )11 ) 01 X M ISE40A 2 K ISE40A -0.11.000 MPa ZSE40A 0.0-101.3 kPa ZSE40AF -100.0100 kPa 1 01 R1/8 (M5) A A N01 NPT1/8 (M5) W1 Rc1/8 B B WF1 G1/81 D D M5 M5X0.8 () E C4 4 C6 6 F + 1IS0228-1 P10/1 X NPN2() Y PNP2() 1 R NPN2 +/ T PNP2 +/ M SI2 P (psi)1 S NPN2 +/ 1 2kPaMPa V PNP2 +/ -9No.PS-OMM0006CN-E /1 1 01 N01 W1 WF1 M5 C4 C6 A A ZS-24-A X X X B B ZS-24-B X X X X X D

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

A Black zinc chromated MY-16B-Stroke B Nickel plated MY-16BW-Stroke 8-12-17 18 Series MY1W Dimensions: 16, 20 L (LL) 4-MM depth M 4-B counterbore depth C LD through-hole bottom side J depth K PA YW PB QW LW PG Q+ Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) W CH LH Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-

Series M Miniature Fittings M3, R(PT) 1/8, M5

A B C D E 19.5 20.5 8.5 9.5 1.8 3 6.5 8.5 7 8 2.1 5.5 7.1 7.7 M-01H-4 M-01H-6 90 Miniature Fittings M3, R(PT) 1/8, M5 Series M Series M5 Barb fitting for nylon tube: M-5AN-4, -6 Weight (g) 1.6 1.7 Effective orifice(mm2 Part No. A B C ) 2.1 4.0 12 14 5 8 1.8 2.5 M-5AN-4 M-5AN-6 Barb fitting for soft tube: M-5AU-3, -4, -6 Part No.