High Vacuum Angle Valve, XL Series

(10-32 nominal) Rc(PT) 1/8 XLF Actuation port size M5 (10-32 nominal) Ports P, R Rc(PT) 1/8(Port P): M5(10-32 nominal) (Port) XLFV 0.06 0.09 0.11 0.15 0.4 0.5 Actuating solenoid valve recommended Cv factor (XLF) Service life (Million cycles) 3 2 0.25 (0.55) 0.45 (0.99) 1.1 (2.43) 1.6 (3.52) 3.0 (6.61) 4.8 (10.58) XLF Weight kg (lb) XLFV 0.29 (0.64) 0.49 (1.08) 1.14 (2.51) 1.66 (3.65) 3.06

5 Port Solenoid Valve SY Series

For R and U, DC voltage is only available. Power saving circuit is only available in the "Z" type.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

0 i r !3 q !4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

VFR

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

R.

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

2 x M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 7 7 10 10 502 Series MHR2/MDHR2 Rotary Actuated Air Gripper 2-Finger Type With auto switch (Built-in magnet) : MDHR2-30R 76 73 B 3 x M5 x 0.8 thread depth 10 MDHR2-30E Port Location P.C.D.43 (Mounting thread) 80 120 120 15.5 A C 54 M5 x 0.8 M5 x 0.8 Finger closing port Finger opening port 14 M5 x 0.8 Finger opening port

Bernoulli Gripper

The pressure sensor is shipped together with the product but does not come assembled. 12 ZNC Series Dimensions: 30, 40, 60 Basic type M5 x 0.8 thread depth 4 Air supply port PB1 M5 x 0.8 thread depth 4 Multi-port2, 4, 6 4 x H thread depth J R 16.5 Counterbore diameter P, depth Q Counterbore diameter P, depth Q 6.5 45 45 30 M5 x 0.8 thread depth 4 Air supply port PA1, 4 120 120 A Counterbore

Sine Rodless Cylinder Series REA/REB

Table (3) Recommended Speed Controller Bore size (mm) Model Elbow type Straight type In-line type AS1001F-04-X214 AS1001F-04-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 AS1201F-M5-04-X214 AS1301F-M5-04-X214 10 15 20 25 32 40 50 63 Caution AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 1.

ZQ

ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP

Parallel Style Air Gripper: Wide Type Series MHL2

0.7 M5 x 0.8 M6 x 1 M8 x 1.25 488

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

X 0.8 thread depth 10 P.C.D43 (Mounting thread) 80 120 15.5 120 C A 54 M5 X 0.8 Finger opening port M5 X 0.8 Finger closing port 14 M5 X 0.8 Finger opening port M5 X 0.8 Finger closing port 25 25 6-M5 X 0.8 thread depth 10 (A, B, C common view) 50 3-5 +0.02 0 depth 10 16h9 0 0.043 (A, B, C common view) 2 10 38.5 22 (76) 70 11 25 2 12 0 -0.05 5 0 0.03 5 0 0.03 4 Open: 37 Closed:19 2-M5 X

CG1

/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)1/2 69 (77) 11 11 11 12 13 13 M5 106 (114) 16 16 16 16 18 18 22 22 15 (16) 8 10 12 16 20 20 25 30 14 11 11 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 Up to 200 201to350 23 30 16.5 20 26 32 38 50 60 M5 Depth 7.5 5.5 M6 X 0.75 19.5 10 (12) 40 69 (77) 111 (119) 15 (16) Up to 300 301to400 25 25 M5 Depth 8 35.5 44 55 69 80

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

R.

Modular Type Filter Regulator Series AW

r r u u u Drain Drain Drain Parts list Material No.

Check Valve Series AK

q t y e w r q PBT Body q NBR, Aluminum alloy Valve w Stainless steel Spring e Brass Electroless nickel plated Spacer r Cassette t NBR Seal y Male connector type: AKH Bushing type: AKB R 1/4, 3/8, 1/2 NPT 1/4, 3/8, 1/2 R 1/8 NPT 1/8 M5 type U10/32 4, 6 8 x R 1/8 5/32, 1/4 5/16 x NPT 1/8 8, 10, 12 5/16, 3/8, 1/2 Free flow Female thread Male thread t r t r Free flow One-touch fitting Male

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

M5 x 0.8 (External pilot port) 15.5 15.5 4 48 Manual override 4 Insulation: Black () B A 17.5 17.5 A B PE X P EB EA Insulation: Red (+) 35 17 17 56 65.4 62.5 M5 x 0.8 (Pilot EXH. port) 153.6 L 66.5 (For E type) (Lead wire length) 1.55 0.3 mm2 22 18 18 9.5 28 5 x 1/4" (Piping ports) L plug connector with cover (LL) 52-SY5240 (R) -LL-02 L 143.4 (Lead wire length)

Compact Vacuum Ejector Series ZQ

Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

Air Slide Table

M5 x 0.8 5.4 7.4 MXQ16B M5 x 0.8 5.4 10.3 MXQ20B M6 x 1 9.2 14.5 MXQ8C M3 x 0.5 1.1 6.3 MXQ12C M4 x 0.7 2.7 8.5 8.