Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: ø6 One-touch Fitting, Elbow Type, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 73 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 73 lb

1

V V V V V V V V V V Standard CM2 V V V V V V V V V V V D CG1 v CJ2l-lA MB V v v v Note 8) 10-, 11CA2 CQ2 CQS v v v v v v v v v v v 25ALuberetainer 20JA v v v v v v v v v XB6 MXH v v v v v v v v XB7 MXQ v XB9 MGP XB13 CY CX v v v v XC3 CK1 C(L)K v v v v v v v XC8 C(L)KU v v v Note 9) XC9 CKQ v v v v v v v v v XC10 CKZ2N v v v Note 9) XC11 WRF v v v v v v v v

2

Example) IS10M-30-6LP Symbol Description Nq Body size 20 30 40 50 a Set pressure range Nil 0.1 to 0.4 MPa V V V V 6 Note 1) 0.1 to 0.6 MPa V V V V + Semi-standard Nil 0.5 m V V V V L 3 m V V V V Z 5 m V V V V + b Lead wire length Nw 23 15 (13) c Pressure unit of the scale plate Nil MPa V V V V P Note 2) MPa/psi dual scale V V V V (23) (5000) (3000) (500) Note 1) Set pressure range of 6P (

CATALOG

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

Compact 5-Port Solenoid Valve

Enclosure IP67*1 Pitch width [mm] Different pressures Reverse pressure Negative common Positive common 6.5 9 V G G V V v p. 132 v p. 132 v p. 132 v p. 133 v p. 133 v p. 133 v Individual SUP V External pilot External pilot 11.5 V 16 V *1 Refer to Manifold Specifications on pages 17 and 18 for details on IP67.

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Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

A

I S T O N R O D C L E V I S GKM: S T E E L, Z I N C C H R O M AT E P L AT E D Cyl.

V

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

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D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style .

Made to Order

P.1729 P.1731 P.1732 P.1733 P.1738 P.1739 P.1742 P.1743 P.1744 P.1747 P.1748 P.1752 P.1755 P.1756 P.1760 P.1765 P.1766 P.1769 P.1770 P.1776 P.1781 P.1786 P.1794 P.1796 P.1801 P.1802 P.1803 P.1804 P.1806 P.1806 P.1807 P.1809 P.1817 P.1818 P.1819 P.1820 P.1822 P.1823 P.1829 P.1829 P.1830 P.1831 P.1832 P.1832 P.1833 P.1836 P.1838 P.1839 P.1839 P.1841 P.1844 P.1844 P.1845 P.1848 P.1849 P.1850

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Rated voltage S L Z For VX21: VVX21-3A-P For VX22: VVX22-3A-P For VX23: VVX23-3A-P Voltage With surge voltage suppressor With light and surge voltage suppressor AC/ DC Voltage symbol 1 2 3 4 7 8 J 5 6 With light 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V Seal material: PTFE AC How to Order Manifold Assemblies (Example) Enter the valve and blanking plate to be mounted under the manifold

Battery-less

LEFS v v E339743 v v v v 11-LEFS v v E339743 v v v v 25A-LEFS v v E339743 v v v v LEFB v v E339743 v v v v LEJS v v E339743 v v v v 11-LEJS v v E339743 v v v v 25A-LEJS v v E339743 v v v v LEJB v v E339743 v v v v LEY25/32/63 v v E339743 v v v v LEY100 v LEYG v v E339743 v v v v LESYH v v AC servo motor Compatible

Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EB-(T/Y)1JB10 V V V V V V ZP3EB (T/Y)1JB30 V V V V V V ZP3EB-(T/Y)1JB50 V V V V V V ZP3EB-(T/Y)2JB10 V V V V V V V V ZP3EB-(T/Y)2JB30 V V V V V V V V ZP3EB-(T/Y)2JB50 V V V V V V V V * Select "T" when selecting a T type buffer assembly.

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Standard equipped with shock absorber -X 75 100 125 150 200 250 300 20 25 32 40 50 63 80 100 20 25 32 40 50 20Series MGC P . 8-21-6 Data Series MGG V V V V V V V V V V V V V V Guide Cylinder Guide Table Cylinder with Turntable Series MGC Long stroke Bore size (mm) Standard stroke (mm) Compact type of series MGG Lightweight, space-saving 250 300 350 400 450 500 600 700 800 900 1000 1100 1200