Model Selection 1

In the case of liquid: P Q = 1.9 x 106Av (9) G Q : Flow rate [l/min] Av : Flow coefficient [m2] P : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 8.3 x 106Av P(P2 + 0.1) (10) Q : Flow rate [m3/s] Av : Flow coefficient [m2] P : Pressure difference [Pa] P1 : Relative density [MPa]: P = P1 P2 P2 : Relative density [MPa] Front matter 4

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only, Fixed Unit: kPa, MPa), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: D [Panel Mount Adapter + Front Protection Cover, (ZS-46-D)]

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only, Fixed Unit: kPa, MPa), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A2 [Bracket B, Horizontal Mounting (ZS-46-A2)]

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only, Fixed Unit: kPa, MPa), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only, Fixed Unit: kPa, MPa), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: A2 [Bracket B, Horizontal Mounting (ZS-46-A2)]

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: SI Unit Only, Fixed Unit: kPa, MPa, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: D [Panel Mount Adapter + Front Protection Cover, (ZS-46-D)], Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: SI Unit Only, Fixed Unit: kPa, MPa, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: A2 [Bracket B, Horizontal Mounting (ZS-46-A2)], Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: SI Unit Only, Fixed Unit: kPa, MPa, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: -, Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: SI Unit Only, Fixed Unit: kPa, MPa, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: A2 [Bracket B, Horizontal Mounting (ZS-46-A2)], Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only, Fixed Unit: kPa, MPa), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A2 [Bracket B, Horizontal Mounting (ZS-46-A2)], Operation Manual: K (Operation Manual, Calibration Certificate)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only, Fixed Unit: kPa, MPa), Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only, Fixed Unit: kPa, MPa), Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type), Bracket: A5 [Bracket E for M12 Connector Type (ZS-46-A5)], Operation Manual: T (w/o Operation Manual, Calibration Certificate)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only, Fixed Unit: kPa, MPa), Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type), Bracket: None, Operation Manual: T (w/o Operation Manual, Calibration Certificate)

VCC

.: XT13-406-X200) Note) Applicable to special manifold, too. 644 Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve) VCC Series VCC Series I N D E X P.646 How to Order P.648 Specifications/Weight P.650 Dimensions Single valve unit P.651 Manifold P.652 SUS316L Stainless steel fittings P.654 Special Tools VNA VNB Disassembly/Assembly/ Maintenance Procedure P.656 SGC

S070

Grommet type 16.5 3 7 15 21 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with

25

Process Pump (Diaphragm Pump) PB Series Compact, large capacity diaphragm pump, suitable for transferring and collecting a wide range of fluids Compact, large capacity diaphragm pump, suitable for transferring and collecting a wide range of fluids o t p m s l a i PA z P e Built-in solenoid valve only RoHS Smaller, lighter, 25% reduction in volume Smaller, lighter, 25% reduction in volume

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

L Rubber stopper screw Switch rail Mounting tap L Stud fastening: After a temporary tightening, tighten an additional 1/4 turn. Metal stopper screw L Shock absorber 8-9-16

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

C D 4-O MX MTS T MY Q CY 2-P S U W E B K L MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX DAA AB I AP A R X Y + Stroke Z + Stroke -X J V 20Data 8-AF AC AD AE 100 piston rod end connection Stroke range (mm) Bore size (mm) AF AE AD AC AB AA G F N E M D L C K

ITV

Flat bracket Dimensions L-bracket Description Part no.

TABLE OF CONTENTS

V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Model LW53 3 Way Normally Closed Piped Exhaust LW53GG8XGB LW53GH8XGB (G or L) LW53GJ8XGB (G or L) LW53GV8XGB (G or L) LW53GK8XGB (G or L) LW53HH8XGB (G or L) LW53HJ8XGB (G or L) LW53HV8XGB (G or L) LW53HK8XGB (G or L) LW53JJ8XGB (G or L) LW53JV8XGB (G or L) LW53JK8XGB (G or L) LW53VV8XGB (G or L) LW53VK8XGB