CJ5-S M26 x 1.5 24 31 79 24 40 72 55 64 24 31 M26 x 1.5 IY-G10SUS Knuckle Joint Pin Pivot Bracket Material: Stainless steel 440 (Pin) Stainless steel 304 (Bracket, Snap ring) Material: Stainless steel 440 (Pin) Stainless steel 304 (Snap ring) LL CDd9 (CX) LY Dd9 d t m t LH l m L LT (LX) LG LF 4-LD (LV) LP LE Part no.
55 60 60 10 12 11 14 5 5 6 6 40 45 55 65 22 22 28.5 30 11 13 14 16 5 5 5 7 66 82 100 120 86 106 125 150 70.5 82.5 101 121 Other dimensions are the same as basic style.
55 55 57.5 57.5 57.5 99.5 38 47.5 46 47 52 50.5 51.5 68.5 71 71 71 73.5 73.5 73.5 78.5 88.5 87 90 93 91.5 94.5 102 102 102 104.5 104.5 104.5 2 3 12 Direct Operated 2 Port Solenoid Valve Series VXN Air Air Medium vacuum Medium vacuum Oil Water Dimensions/Body Material: C37, Stainless Steel mm VXN Conduit Faston type Specifications Specifications For Air/ D z 280 Q F 11 Q F D 23 G1/2 Water
24 31 24 55 24 31 64 72 Y-G10 22 32 100 79 Knuckle pin and snap ring are included.
M26 x 1.5 24 31 79 24 40 72 55 64 24 31 M26 x 1.5 IY-G10SUS Knuckle Joint Pin Pivot Bracket Material: Stainless steel 440 (Pin) Stainless steel 304 (Bracket, Snap ring) Material: Stainless steel 440 (Pin) Stainless steel 304 (Snap ring) LL CDd9 (CX) LY Dd9 d t m t LH l m L LT (LX) LG LF 4-LD (LV) LP LE Part no.
24 31 24 55 24 31 64 72 22 32 79 Knuckle pin and snap ring are included.
) 26 36 (43) 0 (17) D-F9W, D-F9WV 10 (17) 0 0 38 38 (55) 26 36 (43) 0 (17) D-A9, D-A9V 0 (15) 0 0 40 40 (55) 32 32 (47) 0 (15) 25 D-M9, D-M9V 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-F9W, D-F9WV 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-A9, D-A9V 0 (15) 0 0 50 50 (61) 38 38 (53) 0 (11) 32 D-M9, D-M9V 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-F9W, D-F9WV 10 (17) 0 0 50 55 (63) 38 48
L Pin hole B = (0.045 + L x 0.0016) [mm] 55 Series MGP-XA Compact Guide Cylinder/Guide Rod Configuration How to Order M 32 50 A1 Z73 X MGP Compact guide cylinder Guide rod end configuration pattern symbol Bearing type Refer to pages 2 and 3. Number of auto switches M Slide bearing 2 pcs. Nil L Ball bushing S 1 pc.
for deflection data. 8 Standard Motor/Horizontal Mount Specification Series LJ1H20 Dimensions/LJ1H202PA Scale: 10% 12.5 9.5 Work piece mounting reference plane 110 4-M6 x 1 thread depth 15 67 20 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane 8H8 depth 8 Z section detail 130 200 52 52.5 Stroke + 150 (table movement range) 22 190 Z section 92 3.3 55
(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95
SET1~3[SEt] [SEt]()[P_1][n_1]() () UPDOWNSET()(55) UP DOWN SET (delay)( )(55 ) UP DOWN ON/OFF 0.01[sec.]0.0060.00[sec.]
69 48 43 60 54 38 49 116 100 88 79 71 MGPM 65 25 45 82 38 33 68 132 29 118 93 77 80 70 62 MGPL 55 CNA F 91 203 80 71 64 164 182 159 142 127 MGPM 116 106 32 137 191 121 108 98 157 164 144 203 MGPL 186 171 158 CB MGPM 91 203 80 71 64 164 182 159 142 127 116 106 40 MGPL 137 190 121 108 97 157 163 144 203 185 171 158 CV/MVG MGPM 142 296 125 111 101 245 273 241 216 195 179 164 50 MGPL 181 208
NN S 50 63 12 55 13 36.5 9.5 M8 x 1.25 11 8 30 32 63.5 15 55 13 36.5 15 M8 x 1.25 13 8 30 32 63.5 Metal cover type Leave sufficient space to open and close the metal cover when operating the manual release.
Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95
flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.
data. 148 3 Standard Motor/Horizontal Mount Specification Series LG1H20 Dimensions/LG1H202PA 110 4-M6 x 1 thread depth 10 67 4-M8 x 1.25 thread depth 10 20 8H10 depth 10 LJ1 LG1 LC1 LX LC6D/LC6C Switches Encoder signal line Bending radius 80 Motor power line Bending radius 80 35 8H10 depth 8 85 130 Stroke + 145.7 (table movement range) 77.3 77 107 10 95 Work piece mounting reference plane 55
CY1B6 CY1B10 CY1B15 ZZ 81 81 103 Port size M5 x 0.8 M5 x 0.8 M5 x 0.8 CY1B20 to 40 CY1B50, 63 (mm) B 36 46 60 70 86 100 MM x J M4 x 0.7 x 6 M5 x 0.8 x 8 M6 x 1.0 x 8 M6 x 1.0 x 10 M8 x 1.25 x 12 M8 x 1.25 x 12 C 32 38 D 22.8 27.8 35 43 53 66 E 30 32 G 8 8 9 11 14 14 H 20 20.5 22 29 33 33 I 28 34 40 50 58.2 72.2 K 8 10 15 16 25 26 L 66 70 80 92 110 122 N 15 15 17 21 25 25 NA 24 30 36 46 55
M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13
Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68
Bore size [mm] Stroke C D Mounting bolt part no. 5 35 CQ-M3 x 35 L 10 40 CQ-M3 x 40 L 15 45 CQ-M3 x 45 L 20 50 CQ-M3 x 50 L 25 55 CQ-M3 x 55 L 30 60 CQ-M3 x 60 L Material: Chromium molybdenum steel Surface treatment: Zinc chromated 12 5.6 5 35 CQ-M3 x 35 L 10 40 CQ-M3 x 40 L 15 45 CQ-M3 x 45 L 20 50 CQ-M3 x 50 L 25 55 CQ-M3 x 55 L 30 60 CQ-M3 x 60 L 16 4.6 5 40 CQ-M3 x 40 L 10 45 CQ-M3 x