VP300/500/700

Common exhaust: VV3P3-41Stations 1-02 (G) (E) (T) (D, Y) N.C. N.O.

Table of Contents

(Inlet air pressure: 0.7 MPa, Inlet air temperature: 20C) HA How to Order AT ID 20 02 0 ID AMG ID400 Option B Bracket Z Adsorbent for low dew point Basic size AFF 20 30 40 60 Port size AM ID200 02 B 04 06 1 4 B 1 2 B 3 4 Nil Rc Thread type Misc.

SZ3000

External pilot LOCK FREE LOCK FREE Valve stations F: D-sub connector P: Flat ribbon cable connector (26 pins) Note Note Symbol 02 Stations Symbol 02 Stations 2 stations 2 stations Connector mounting position Double wiring specifications Double wiring specifications (1) 12 02 12 02 12 stations 12 stations Symbol D Mounting position 2 stations 2 stations D side Specified layout (2) (Up to 24

SZ3000

External pilot LOCK FREE LOCK FREE Valve stations F: D-sub connector P: Flat ribbon cable connector (26 pins) Note Note Symbol 02 Stations Symbol 02 Stations 2 stations 2 stations Connector mounting position Double wiring specifications Double wiring specifications (1) 12 02 12 02 12 stations 12 stations Symbol D Mounting position 2 stations 2 stations D side Specified layout (2) (Up to 24

Compact Manifold Regulator Series ARM5

Y X X Y X 5 5 5.5 5 X Y Fitting size Fitting size Fitting size Fitting size 4, 5/32 4, 5/32 6 6 3 11.5 19 19 20 6 6 8, 5/16 8, 5/16 3 11.5 19.5 20 23 1/4 1/4 10, 3/8 10, 3/8 7 11.5 22 22 26 1/4 1/4 19 20.5 515 Series ARM11A/B End Block Pressure Gauge ARM11E L Part no.

Vacuum Pad

Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model ZP2-R3507WK ZP2-R4010WK ZP2-R5010WK ZP2-R6010WK ZP2-R4030WK ZP2-R5030WK ZP2-R6030WK ZP2-R8030WK ZP2-R4020WK ZP2-R5020WK ZP2-R6020WK ZP2-R8020WK 2 x 1.5 0.5 0.5 0.5 10 11 2 x 2.5 2.5 0.8 0.8

Vacuum Pad

Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model ZP2-R3507WK ZP2-R4010WK ZP2-R5010WK ZP2-R6010WK ZP2-R4030WK ZP2-R5030WK ZP2-R6030WK ZP2-R8030WK ZP2-R4020WK ZP2-R5020WK ZP2-R6020WK ZP2-R8020WK 2 x 1.5 0.5 0.5 0.5 10 11 2 x 2.5 2.5 0.8 0.8

Vacuum Pad

Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model ZP2-R3507WK ZP2-R4010WK ZP2-R5010WK ZP2-R6010WK ZP2-R4030WK ZP2-R5030WK ZP2-R6030WK ZP2-R8030WK ZP2-R4020WK ZP2-R5020WK ZP2-R6020WK ZP2-R8020WK 2 x 1.5 0.5 0.5 0.5 10 11 2 x 2.5 2.5 0.8 0.8

Vacuum Pad

Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model ZP2-R3507WK ZP2-R4010WK ZP2-R5010WK ZP2-R6010WK ZP2-R4030WK ZP2-R5030WK ZP2-R6030WK ZP2-R8030WK ZP2-R4020WK ZP2-R5020WK ZP2-R6020WK ZP2-R8020WK 2 x 1.5 0.5 0.5 0.5 10 11 2 x 2.5 2.5 0.8 0.8

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

t u i q Series t P, E port location r Valve stations 1 2 3 U D B For 32-output SI unit 10-SV1000 10-SV2000 10-SV3000 U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Symbol 02 Stations Note 2 stations Double wiring Note 1) w SI unit specifications 16 02 16 stations y SUP/EXH block assembly 2 stations Symbol Communication connector Number of outputs Specified

Booster Regulator/Air Tank

For VBATlS1 (Stainless Steel) Model VBAT05S1-l VBAT10S1-l VBAT20S1-l VBAT38S1-l Accessory kit Drain valve (When selecting an option) VBAT5S-Y-4 VBAT-V1 VBAT10S-Y-4 VBAT20A-Y-4 Model VBAT05Al-SV-Q VBAT10Al-SV-Q VBAT20Al-RV-Q VBAT38Al-RV-Q Accessory kit Safety valve Drain valve VBAT5A-Y-2 VBAT-S (Set pressure: 2 MPa) VBAT-V1 VBAT10A-Y-2 VBAT20A-Y-2 VBAT-R (Set pressure

5 Port Solenoid Valve

1 e VV5QC 4 1 16 SDQ 02 S Kit VQC4000 series y i o !

Secondary Batteries

Example) 90-AW30K-03B-1N q w e r t y Series compatible with secondary batteries 90 Material restriction q Symbol Body size Description 30 40 60 w K With backflow function With backflow function + Nil N F Thread type Rc NPT G e + 02 03 04 06 10 1/4 3/8 1/2 3/4 1 r Port size + Nil B Note 2) Note 1) Mounting Without mounting option With bracket With set nut (for panel fitting) a Option t H +

Fieldbus System

(No.4-40 UNC) 5 Joint bracket Links Units to one another. 6 Connector for Unit (Plug) Transmits signals to the neighboring Unit and supplies power. y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

ZP

C B Y C D H Model Model Misc.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R)

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

A A1 E1 L1 M10 x 1.25 +0.058 0 0.2 0.4 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 16 25 30 30 40 50 55 M8 x 1.25 16 20 36 44 56 64 11.5 14 14 20 27 31 21 25.6 41.6 50.6 64 72 8 10 10 14 18 22 8.5 10.5 16 20 23 24 8 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 M14 x 1.5 34 41 42 56 71 79 20 25, 32 40 50, 63 80 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

VCC

mountable number 3 port valve mountable number 00 02 04 00 02 04 No 2 port valves used 2 pcs.

Free Mount Cylinder

ZPT U N 02 B4 ZP U N 04 X11 Dia. (mm) Vacuum entry (Mounting thread diameter) Dia. (mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Stainless Steel One-touch Fittings Series KG

L1 L2 M Nylon Urethane Weight (g) D 1 8 KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 5.6 15 23 11 16 14 11 13 15 17 13.1 13.1 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 10 5.6 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14 14 15 8 18.0 18.5 26.1