Dual Speed Controller with One-touch Fitting Series ASD

L3 M L2 L3 M D2 D2 L1 L1 L4 L4 H (Hexagon width across flats) H (Hexagon width across flats) D3 D3 L5 A1 A2 L5 A1 A2 D1 D1 T T Metric Size L4 L5 A1 A2 M Max.

Air Catch Sensor Series ISA

ZSM 2.5 10 m 1.2 Response time (sec) Response time (sec) 8 m 2 0.9 5 m 8 m 1.5 0.6 5 m 1 3 m 3 m 0.3 0.5 1 m 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 1 m 0 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Detection distance (mm) Detection distance (mm) Piping tubing lengthResponse time Piping tubing lengthResponse time Nozzle Shape Please keep the nozzle shape as illustrated below.

Table of Contents

With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator light/surge voltage suppressor, and the voltage is 24 VDC. kit (Serial transmission unit) kit (Lead wire cable) The dust-protected type SI unit is applicable

Stainless Steel 316

Connection thread R M Weight (g) A D L2 L1 (mm) L1 L1 2 x Applicable tubing M M KQGT04-M5 KQGT04-01S KQGT06-M5 KQGT06-01S KQGT06-02S KQGT08-01S KQGT08-02S KQGT08-03S KQGT10-02S KQGT10-03S KQGT12-03S KQGT12-04S 18 23.1 26 4.5 M5 x 0.8 4 10.6 20.5 18 1/8 21.5 25.6 27 6 D 10 A 19 25 39 4.5 M5 x 0.8 L2 6 13 22.5 1/8 22.1 27.5 41 18.8 11 H Connection thread (In case of R) 14 26.5 1/4 29.5 50 12

Table of Contents

M2 W1 CC W3 : Collision speed (mm/s) L1 : Distance to the center of load gravity (m) ME : Dynamic moment (Nm) g : Gravitational acceleration (9.8 m/s2) YES m : Load weight (kg) F : Load (N) FE : Load equivalent to impact (at impact with stopper) (N) a : Average speed (mm/s) Pitch moment Yaw moment NO M1 = W4 x L3 M2 = W1 x L2 RB M1e = We x L3 x 1 3 M3e = We x L2 x 1 3 NO Do not use it

High Purity Chemical Valve

Dimensions LLAmA-mm-C Stations 4 x Mounting hole for W Y Dimensions (mm) A S K Model LLA2A LLA3A LLA4A LLA5A 11.5 L1 24 L2 L3 29 Sensor (Breathing port) U 34.5 2 x R (mm) H G Station 2 3 4 5 Model C Symbol P N L1 L2 L3 L1 L2 L3 L1 L2 L3 L1 L2 L3 62 93 124 155 E V LLA2A 75 106 137 168 Pitch = B A (OUT) port n x Q 118 149 180 211 P (IN) port 2 x Q 74 111 148 185 (Max.

Compact Vacuum Unit

plug connector With lead wire Note 5) M 0 Without exhaust port 3 For manifold M-type plug connector Without connector Note 5) Silencer exhaust (Individual exhaust) MO No distinction Exhaust direction 1 Note 4) All with light and surge suppressor.

Series VQ Metal Seal/Rubber Seal Body Ported

6 Voltage 1 to 6 L M 2 3 (VQ0) (VQ1000) (VQ2000) L M 2 3 (VQ0) (VQ1000) (VQ2000) VQ110L VQ110L Double (latching) Double (latching) Voltage 1 to 6 Voltage 1 to 6 The direction of the L and M connectors of a pilot valve is opposite to that of the single and double styles.

Prevents Micro-Bubbles

Dimensions LLAA--C Stations 4-Mounting hole for W Y Dimensions (mm) A S K Model LLA2A LLA3A LLA4A LLA5A 11.5 L1 24 L2 L3 29 Sensor (Breathing port) U 2-R 34.5 (mm) H G Station 2 3 4 5 Model C Symbol P N L1 L2 L3 L1 L2 L3 L1 L2 L3 L1 L2 L3 62 93 124 155 E V LLA2A 75 106 137 168 Pitch = B A (OUT) port n-Q 118 149 180 211 P (IN) port 2-Q 74 111 148 185 (Max.

IR1000/2000/3000

N01 Connection NPT 1/8 N02 Connection NPT 1/4 Port size N03 Connection NPT 3/8 Option specifications Application Size Symbol N04 Connection NPT 1/2 IRV3000 IRV2000 IRV1000 F01 Connection G 1/8 01 02 03 04 1/8 1/4 3/8 1/2 F02 Connection G 1/4 F03 Connection G 3/8 F04 Connection G 1/2 Accessory (Option) Part No. Part no.

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: F01 (Screw-in G1/8), VAC: F02 (Screw-in G1/4), EXH: F02 (Screw-in G1/4)

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: S (-90 kPa), SUP: F01 (Screw-in G1/8), VAC: F02 (Screw-in G1/4), EXH: F02 (Screw-in G1/4)

Series VS

492 634 563 705 776 370 482 426 538 594 650 L1 208 350 L1 158 201 244 502 287 373 330 416 459 L1 202 258 314 587 445 516 658 729 800 374 498 442 386 554 610 232 666 L2 303 170 L2 213 256 299 514 385 342 428 471 218 L2 274 330 17 Series VS R8b S MANIFOLD DEVICENET SI UNIT FOR DEVICENET SYSTEM M12 5 PIN CONNECTOR (INPUT NO. 4-F) L2 L2 L1 L1 M12 5 PIN CONNECTORS (INPUT NO. 0-3) MANUAL OVERRIDE

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Please contact SMC regarding water-resistant types with the above model numbers. * Solid state auto switches marked with v are produced upon receipt of order. * Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ * Since there are other applicable auto switches than listed above, refer to page 185 for details. * The D-A9l

0.

M-type plug connector (M) P.2 (A) 2 M-type plug connector (M) Rubber Metal VQZ100 + 1 (P) 3 (R) N.O.

VZS

M plug connector 2 position double: VZS2250-M(Z)-01 3 position closed center: VZS2350-M(Z)-01 3 position exhaust center: VZS2450-M(Z)-01 3 position pressure center: VZS2550-M(Z)-01 DIN terminal 2 position double: VZS2250-D(Z)-01 3 position closed center: VZS2350-D(Z)-01 3 position exhaust center: VZS2450-D(Z)-01 3 position pressure center: VZS2550-D(Z)-01 Applicable cable O.D.: 3.5 to 7 MAX

Stainless Steel One-touch Fittings Series KG

L1 M L2 D2 D1 Part No.

KG

Tube Cap: KGC M Weight (g) Applicable tubing O.D.

3 Port Solenoid Valve Series SYJ300/500/700

H -M5 M5 x 0.8 (A port) 14 5 10 2-3.2 (For mounting) 26.4 17 3 2.5 Manual override A 11 G: Approx. 300 H: Approx. 600 (Lead wire length) 48.6 [50.8] (Light/surge voltage suppressor) 41.5 [48.5] + M5 x 0.8 (X port) 35.6 28.5 26.1 X R P 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 17.5 23 L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (W0): SYJ34-W0-M5 Approx.

VZ5000

Round head combination screw VQ7 ( ) M3 x 8 With spring washer EVS Blanking plate VZ5000-68-1A VZ5000-68-1A VFN Manifold gasket Applicable Plug Assembly (D-sub connector cable assembly) Cable length 1.5 m 3 m 5 m 8 m Assembly part no.