Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 340, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Without magnet, Port thread type: Rc, Auto Switches

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 340, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 340, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushions on both sides + with damper cushions, Specification: Without

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 340, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushions on both sides + with damper cushions, Specification: Built-in

Cylinder (Tube) Inner Diameter(φ): 125, Stroke(mm): 340, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: Presence, Cushion: Without cushion, Operating Pressure(MPa): 0.05 to 0.97, Port thread type: Rc, Auto Switches: Without auto

Clean Air Module

Note 2) Refer to the specifications of display unit for the flow rate value per pulse. 340 Clean Air Module LLB Series Dimensions LLB3-1-PRVSF V2 49.5 HAA HAW Mounting hole for 4 x M4 AT 45 37 35 IDF IDU 1.5 4 20.5 278.5 50 IDF FS A Valve open and locked position Rc 1/4 (NPT 1/4) Rc 1/4 (NPT 1/4) IDFA 90 (Lever operating direction) Max. 91 IDFB A Hand valve Valve closed position 5.5 39 IDH

Fieldbus System

PNP input, between the pin for input terminal and supplied voltage of 0 V) OFF voltage 0.5 mA/input Note 2) 2 wires Open circuit detection current 0.5 mA/connector Note 2) 3 wires Current consumption 55 mA or less 50 mA or less 70 mA or less Enclosure IP67 (Manifold assembly) Standards CE marking, UL (CSA), RoHS recognition EX600-DXlCl 0.6 lbs (300 g) 0.6 lbs (275 g) Weight 0.75 lbs (340

99

Use a commercially available belt wrench etc. for mounting and removing clamp rings. 68 High Precision Filter for Liquids FGH Series Dimensions FGD FGE FGG FGA FGC FGH100/200 FGH300 FGF FGH FGH 2 x Rc 2 x Rc M6 M6 FQ1 FN EB ES Pull-out dimension Pull-out dimension Dimensions A B Element length Port size (Rc) Model 3/8, 1/2 235 FGH100 70 x L117 211 3/4, 1 240 364 3/8, 1/2 FGH200 70 x L246 340

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

FH34 -12 FH341-16 FH440-03 FH44 -04 FH44 -06 FH44 -08 FH44 -10 FH44 -12 FH441-16 FH441-20 FH441-24 FH540-03 FH54 -04 FH54 -06 FH54 -08 FH54 -10 FH54 -12 FH541-16 FH640-03 FH64 -04 FH64 -06 FH64 -08 FH64 -10 FH64 -12 FH641-16 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 5 213 57 275 156 80 50 1.8 96 105 2 x M8 x 1.25 19 0 236 61 340

Suction Filter with Case FH99 Series

kg) S T U V W X Model Threaded without flange With flange FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 23 M8 x 1.25 Thread depth 8 35 6 84 180 2.4 3.4 28 35 M8 x 1.25 Thread depth 8 50 8 91 240 3.6 5.0 44 50 M8 x 1.25 Thread depth 9 62 10 103 300 5.4 7.8 62 77 M10 x 1.5 Thread depth 12 10 118 360 9.7 13.5 90 102 M10 x 1.5 Thread depth 12 5 133 340

Suction Guard (Produced upon receipt of order) FHG Series

T dimension) 0 1 5 None Differential pressure indicator Differential pressure indication switch Note) 1 2 3 4 5 1 2 3 4 1 2 3 4 340 410 480 550 620 430 530 630 730 560 650 750 850 04 (1/2B) 06 (3/4B) 08 (1B) 30 FH FH Note) N.C. and N.O. common Note) When the differential pressure indication 1 or 5 is selected, the connection method is 2 to 5. (0 and 1 cannot be selected.)

Hydraulic Filters

34) F OUT Removal dimension K H F OUT D E C H Differential pressure indication switch FH FH 62 HOW (65) F IN 4 x I OUT A J G (mm) A B C D E F G H I J K Model Weight (kg) FHIA-04 FHIA-06 FHIA-08 FHIA-10 FHIA-12 FHIA-16 FHIA-20 FHIA-24 FHIA-28 FHIA-32 22.2 90 72 116 154 38 60 11 M8 x 25 56 260 1.8 27.7 110 80 133 177 44 70 11 M8 x 25 70 290 2.7 34.5 43.2 128 95 185 234 49 86 15 M10 x 30 86 340

HRL

Required ventilation rate [m3/min] Heat radiation amount [kW] Differential temp. of 3C between inside and outside of installation area Differential temp. of 6C between inside and outside of installation area Model HRL100-A-Approx. 18 305 155 HRL200-A-Approx. 35 590 295 HRL300-A-Approx. 45 760 380 340 HRL Series Specific Product Precautions

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 68 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101 117 133 149 165 181 197 213 229 245 261 277 293 309 325 341 357 373 389 405 421 437 100 116 132 148 164 180 196 212 228 244 260 276 292 308 324 340

Slider Type Ball Screw Drive/11-LEFS Series

motor Lead Stroke [mm] Symbol [mm] Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 H 20 1500 1200 900 700 550 A 12 900 720 540 420 330 B 6 450 360 270 210 160 LEFS25 100 W /l40 (Motor rotation speed) (4500 rpm) (3650 rpm) (2700 rpm) (2100 rpm) (1650 rpm) H 24 1500 1200 930 750 610 510 A 16 1000 800 620 500 410 340

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

.: 4 : 6 : 8 45.7 48.8 P=17.5 Dimensions Formula: L1 = 17.5n + 46, L2 = 17.5n + 60 n: Stations (Maximum 16 stations) L n 16 326 340 437.5 448 423.0 15 308.5 322.5 425 435.5 410.5 14 291 305 412.5 423 385.5 13 273.5 287.5 387.5 398 373.0 12 256 270 375 385.5 348.0 11 238.5 252.5 350 360.5 335.5 10 221 235 337.5 348 323.0 9 203.5 217.5 325 335.5 298.0 8 186 200 300 310.5 285.5 7 168.5 182.5

Environment

motor Lead Stroke [mm] Symbol [mm] Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 H 20 1500 1200 900 700 550 A 12 900 720 540 420 330 B 6 450 360 270 210 160 LEFS25 100 W /l40 (Motor rotation speed) (4500 rpm) (3650 rpm) (2700 rpm) (2100 rpm) (1650 rpm) H 24 1500 1200 930 750 610 510 A 16 1000 800 620 500 410 340

Intrinsically Safe Valve

191.2 170.6 157.6 95.6 71.7 Max. 10 L (Lead wire length) L (Lead wire length) 39 41.7 67 67 Stations n 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations 11 stations 12 stations 13 stations 14 stations 15 stations 16 stations 17 stations 18 stations 19 stations 20 stations 388 L1 L2 55 74 93 112 131 150 169 188 207 226 245 264 283 302 321 340

Vacuum Filter AFJ Series

Ambient and fluid temperature 5 to 60C (No freezing) Proof pressure 0.5 MPa Operating pressure range 100 to 0 kPa Vacuum release pressure 0.5 MPa or less Note 6) Nominal filtration rating Note 1) to Note 4) 5 m, 40 m, 80 m Drain capacity [cm3] 8 25 45 Bowl material Polycarbonate Bowl guard Standard (Polycarbonate) 5 m 80 100 180 230 200 310 370 Water drop removal type (-S) 40 m 100 130 210 340

Cylinder, Compact. 340 lb. 503.