Air Cylinder CP Series Cylinder Positioner Assembly

I n e zz 1 3 8 (35) 170) 2 0 5 (52) 0.79 l2D) 140) 0.39 ( 1 0 ) 3.94 (100) r 5 0 (38) (62) 1.38 (35) 0.43 ( 1 1 ) M l 8 i 1 . 5 I 1 8 (30) 1.22 ( 3 1 ) 3.4 (90) 2 2 4 (58) 6 2 6 1159) 2.05 (s2) 11.2) 2.60 166) s T o 6 5 7 (167) 1 3 8 (35) 3.35 (85) 2 5 2 (64) 0.79 l2D) 1.57 (40) 0.39 (10) 3.94 (100) 1.50 (38) 2.44 (62) 1.38 (35) 0.55 (14) M 1 8 x l 5 1.22 ( 3 r ) 1.22 ( 3 1 ) 3.86 (s8) 2.24

AZ1000

200 300 400 500 600 700 800 Flow rate (slpm, N2) 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AZ1402TA Inlet pressure: 2 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg) -21 600 Delivery pessure (kPa) -35 500 -48 400 Connections inch A (mm) -61 300 FV4 MV4 FV6 MV6 TW6 FV8 MV8 TW8 4.30 (109.2) -75 200 5.22 (132.6) -88 100 4.00 (101.6) 0 -101 5.22 (132.6) 0 1 2 3 4 5 6 7

CEx-OMQ0011

. 2. 2. 2. 50% 50% 50% 50% ( ( ( ( 6 6 6 6 ) ) ) ) 1. 1. 1. 1. () 2. 2. 2. 2. 3. 3. 3. 3. 3. 3. 3. 3. 4. 4. 4. 4

JXCx-OMT0032CN

JXC-OMT0032CN TM) (GW)(DeviceNet / LEC-GDN1 . 4 2. . 6 2.1 . 6 2.2 . 6 2.3 . 7 2.4() . 8 (1) . 8 (2) . 8 (3)(LEC) . 8 (4) . 8 (5) . 8 (6) . 9 (7) . 9 3. . 10 3.1 . 10 3.2 . 12 3.3 . 13 (1)(LECGDN1) . 13 (2)DIN(LECGDN1D) . 13 3.4 . 14 (1) . 14 (2) . 14 4. . 15 4.1 (NODE ADDRESS,B RATE) . 15 4.2(CN2SW) . 15 4.3(LEC) . 16 5. . 18 5.2 CN3 . 18 5.3 CN1CONT . 18 5.4 CN2PC/TB . 19 .CN4 . 20

Fluoropolymer Piping Equipment

Applicable Fluids Material and fluid compatibility check list for high purity fluoropolymer fittings Chemical Compatibility LVC Acetic acid 100% LVA Acetone 100% Note 1,2) LVH Ammonium fluoride 40% Ammonium hydroxide 30% LVD Butyl acetate 100% LVQ Methylne chloride 100% LVP Hydrochloric acid 38% LVW Hydrofluoric acid 50% LQ1 LQ1 Hydrogen peroxide 60% LQ3 LQ3 Methanol 100% LVN LVN

1

18-3 4 SMC Actuators: Copper-free Air Cylinders 6, 8, 10, 12, 15, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160 Air Cylinders 20-series has been added by design modification. (98.6.1) Series Application Bore size (mm) 6 8 12 (10) 16 (15) 20 25 32 40 50 63 80 100 125 140 160 Series variation Standard Copper-free Stroke reading cylinder Series CE1 Standard type 20-CE1 Stroke reading cylinder

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

MHF2

Hmm 0.3MPa 0.7MPa 0.3MPa 60 0.7MPa 0.4MPa 60 0.4MPa 40 40 20 20 100 80 60 40 20 0 100 0 80 60 40 20 Gripping point L mm Gripping point L mm 12-3-6 7 Model Selection Series MHF2 Confirmation of External Force on Fingers: Series MHF2 Step 3 MHZ L L MHF MHL Mr Mp Fv My MHR MHK MHS L MHC MHT MHY L: Distance to the point at which the load is applied (mm) MHW Maximum allowable moment Allowable

MHF2

0.5MPa 100 Pressure 0.2MPa Pressure 0.2MPa 80 0.5MPa 0.6MPa 80 0.6MPa Overhang Hmm Overhang Hmm 0.3MPa 0.7MPa 0.3MPa 60 0.7MPa 0.4MPa 60 0.4MPa 40 40 20 20 100 80 60 40 20 0 100 80 60 40 20 0 Gripping point L mm Gripping point L mm 12-3-6 7 Model Selection Series MHF2 Confirmation of External Force on Fingers: Series MHF2 Step 3 MHZ L L MHF MHL Mr Mp Fv My MHR MHK Courtesy of Steven Engineering

3 Port Solenoid Valve Series VQ100 1

-www.stevenengineering.com 1 W (83 mA) 12 VDC 1 W (83 mA) 0.7 W (58 mA) (3) Power consumption (Current) 0.6 VA (6 mA) 100 VAC 0.5 VA (5 mA) 0.65 VA (5.9 mA) 110 VAC 0.55 VA (5 mA) 1.2 VA (6 mA) 200 VAC 1.0 VA (5 mA) 1.3 VA (5.9 mA) 220 VAC 1.1 VA (5 mA) Plug-in, L plug connector, M plug connector (With light/surge voltage suppressor) Electrical entry (1) Note 1) Grommet is available

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Cross sectional area 0.23mm2 3.5 to 7 85.5 78 60 M type plug connctor (M) R 3 1 P (Lead wire length) 82.5 94.5 61.5 300 Cover diameter 1.5 Cross sectional area 0.23mm2 Indicator light R 3 1 P Equation L1=19n+11 L2=19n+23 n: Stations (Max. 20 stations) Dimensions L n 2 49 61 87.5 98 3 68 80 100 110.5 4 87 99 125 135.5 5 106 118 137.5 148 6 125 137 162.5 173 7 144 156 187.5 198 8 163 175 200

Prevents Micro-Bubbles

LVQ Metric sizes 4 04 06 4 6 N.C.

EXxx-OMY0006CN

IoT 5. 6. 8 7. PC 8. OS 9. /IDS/IPS 10.

XL-OMV0002

O O O O 50 4 5 6 3 3 2 1 4 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6 -63 15 -80 20 -100 25 -160 O O O O , O , 13 XL-OMV0002 6-3.O 1 2 3 4 5 3 2 1 4 162540 50,63,80,100,160 O O 50 O ( ) 3 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6 -63 15 -80 20 -100 25 -160 O O ,O , 14 XL-OMV0002 VR 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81

PA3000/5000/PAX1000

The result is approximately 50l/min. 100 50 1 0 2 3 4 5 6 7 Cycle (Hz) Viscosity characteristics (flow rate correction for viscous fluids) Caution 100 1. These flow rate characteristics are for fresh water (viscosity 1mPas, specific gravity 1.0). 2.

MHL2

MHL2-40D MHL2-40D1 MHL2-40D2 SMHL2C, #4 SMHL2C, #5 SMHL2C, #6 (#6+#7) 2.2-12

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2

ITV0000

6.

ZSE30A(F)/ISE30A

ZSE20 ISE20 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range ZSE30 ISE30 ZSE30 ISE30 Switch ZSE40 ISE40 For vacuum pressure 101 kPa 0 ZSE30A 10 kPa 105 kPa ZSE10 ISE10 For compound pressure 100 kPa 100 kPa ISE70 ZSE30AF 105 kPa 105 kPa ZSE80 ISE80 For positive pressure 100 kPa 1 MPa ISE30A 105 kPa (0.105 MPa) 1.05 MPa PS Rated pressure range of switch Set pressure range of switch ISA3 ISA2

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Flow Rate and Sonic Conductance AS1001F AS2001F AS3001F AS2051F AS4001F Model Metric size 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Tubing O.D.