EXxx-OMN0027CN

8 ) 1 0 8DI 10h EX600-DXC1 (8 ) () 1 0 8DI 10h EX600-DXD (16 ) 2 0 16DI 11h EX600-DXE (16 ) 2 0 16DI 11h EX600-DXF (16 ) 2 0 16DI 11h EX600-DYB (8 ) 0 1 8DO 20h EX600-DYE (16 ) 0 2 16DO 21h EX600-DYE1 (24 ) 0 3 24DO 22h EX600-DYF (16 ) 0 2 16DO 21h EX600-DME (8/8 ) 1 1 8DX 30h EX600-DMF (8/8 ) 1 1 8DX 30h EX600-AXA 4 (2 byte/1 ) 0 2AI 51h (2 ) (2 ) 0 4 EX600-AYA (2 byte/1 ) 2AO 61h

CEx-OMQ0010

200 NO 100 80 YES 100 100 80 kgf kgf 63 NO 63 50 50 40 40 YES 100 100 300 300 200 400 500 200 400 500 NO mm/s mm/s OK YES NO NO YES YES NO NO 14.5m T YES YES NO NO YES YES (C EU 1 C EU 5) NO YES A 12 A NO YES NO YES NO NO YES () () NO YES YES NO YES NO 5m m+ 5m m+ YES 3 0m m 3 0mm NO YES NO NO YES NO YES YES C EU 2 13 4 4-1 40 50 63 80 100 1.5MPa

CYP

(Cylinder: CYP32-200, Work piece weight: 5kg, Average speed: 2000mm/s) Note 5) The data above provide a guide for selection but is not guaranteed. Cylinder tube Piping port variations provide a high degree of freedom Piping port positions can be selected to accommodate the installation.

3 Port Solenoid Valve Rubber Seal Series SY100 1

For 200 VAC: SY100 30 2A For other voltages of AC: SY100 30 3A To detach a connector, remove the pawl from the groove by pushing the lever downward with your thumb, and pull the connector straight out.

Digital Flow Switch

) Air N2 1 L/min 10 100 2 L/min 20 200 5 L/min 50 500 PF3A7 H Thermal type (Platinum sensor) 2 L/min 30 3000 p. 9 Air N2 PFG300 5 L/min 60 6000 p. 14 12000 Bypass flow type 10 L/min 120 0.2 PFM 0.01 L/min 10 Dry air N2 Ar CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 PFG300 20 2000 PFMC 5 500 Thermal

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

14 10 210.5 200 181 15 11 223 212.5 191.5 16 12 235.5 225 202 17 13 248 237.5 212.5 18 14 248 237.5 223 12.5 15 260.5 250 233.5 13.5 16 273 262.5 244 14.5 L1 L2 L3 L4 External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 135.5 125 107.5 14 3 148 137.5 118 15 4 160.5 150 128.5 16 5 173 162.5 139 17 6 173 162.5 149.5 12 7 185.5 175 160 13 8 198 187.5 170.5 14 9 210.5 200 181 15

High Pressure Coolant Valve

VNH1 VNH2 VNH3 VNH4 VNH1-16 VNH2-16 VNH3-16 VNH4-16 Description Bracket (With bolt and washer) B How to Order Pilot Solenoid Valves VO307 1 Q D 5 CE-compliant Nil Q CE-compliant Rated voltage 2 200 VAC 50/60 Hz 1 100 VAC 50/60 Hz Light/surge voltage suppressor CE-compliant 3 110 VAC 50/60 Hz D DIN terminal DZ DIN terminal with light/surge voltage suppressor 4 220 VAC 50/60 Hz 5 24 VDC 6

VCW

W (44) (Y) Z (X) (V) T R T 25 IN port 23/8 l =280 l =300 : Thread type 2.5 (N) E Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 H H P = J (Pitch) 2 n-1/8 : Thread type L Dimension

VNH

VNH1 VNH2 VNH3 VNH4 Description Bracket (With bolt and washer) B VNH1-16 VNH2-16 VNH3-16 VNH4-16 How to Order Pilot Solenoid Valves VO301-00 T X302 Light/surge voltage suppressor Rated voltage Nil S Z L With indicator light None With surge voltage suppressor With light/surge voltage suppressor 2 200 VAC 50/60 Hz 1 100 VAC 50/60 Hz 3 110 VAC 50/60 Hz 4 220 VAC 50/60 Hz 5 24 VDC 6 12 VDC 7

RB/RBL/RBQ

/Bumper 16 Cushion Short type Applicable model Bumper 16-RBQC1604 20-RBQC2007 25-RBQC2508 30-RBQC3009 32-RBQC3213 Nil C Basic type With bumper Option None With stopper nut Addl 1 of hex. nut (Total: 3 pcs. ) Nil S O.D. threadStroke absorption 2 mounting hexagon nuts are attached as standard. Bumper cannot be mounted for basic type.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

Smooth Cylinder Series CQSY

Bore size 12 16 20 25 12 mm 16 mm 20 mm 25 mm Bumper/Rod end thread Cylinder stroke (mm) Rubber bumper & Rod end female thread C Refer to "Standard stroke table" on page 2.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

54.5 5 74 65 7 95 86 9 116 107 11 137 128 12 147.5 138.5 13 158 149 14 168.5 159.5 15 179 170 16 189.5 180.5 17 200 191 18 210.5 201.5 19 221 212 31 Series SYJ3000 Manifold Drawings Type 41 Manifold: Side Ported/SS5YJ3-41Station M5T, N3T (mm) Grommet (G), (H) N3T(Built-in One-touch fitting) NPTF (P port) 10 61.9(GZ:62.6) [63.6] 60.9(GZ:61.6) [62.6] 10 10 78.8(GZ:80.2) [82.2] 91.7(GZ:93.1

ML1

C-6 AS568-048 NLP-32A RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 NLP-40A RCS-12 GMY40 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR C-7 SO-015-22 SO-015-16 8.3 X 4.5 X 1.9 SO-010-16 SO-010-16 C-100 NLP-25-19A RCS-8 GMY25 $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 %9 Hard anodized Hard anodized Hard anodized M1L025-17A82076 M1L032-17A82077 M1L040-17A82078 Anodized

SL5200

Installation unit gauge port Pressure range Unit Regulator Code 2) Part number 3) Lower mount material Select compatible materials of construction for the gas Gas V15 V3 L 1 H V2 2 4 10 30 40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig

Guide Table Series MGF

5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 Load weight m0 (kg) MGF63 Load weight m0 (kg) Load

EXxx-OMN0029CN

) 0 2 EX600-SDNA (8 ) 0 1 EX600-DXB (8 ) 1 0 EX600-DXC (8 ) 1 0 EX600-DXC1 (8 ) 1 0 () EX600-DXD (16 ) 2 0 EX600-DXE (16 ) 2 0 EX600-DXF (16 ) 2 0 EX600-DYB (8 ) 0 1 EX600-DYE (16 ) 0 2 EX600-DYE1 (24 ) 0 3 EX600-DYF (16 ) 0 2 EX600-DME (8/8 ) 1 1 EX600-DMF (8/8 ) 1 1 EX600-AXA 4 (2 byte/1 ) 0 (2 ) EX600-AYA (2 ) 0 4 (2 byte/1 ) EX600-AMB 4 4 (2/2 ) (2 byte/1 ) (2 byte/1 ) -59No.EX-OMN0029CN-D

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Maximum of 16 stations for SI type.

ZPT/ZPX

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 0 0 1 1 0 5 8 16 27 53 84 0 0 0 1 1 3 1 1 2 3 5 8 Misc.