Coolant Valve (mm) Model Conversion Cv 1.2 1.3 1.5 3.9 5.0 4.5 5.8 7.0 11 9.1 15 17 23 17 23 26 34 30 40 41 62 41 66 49 70 73 100 Threaded Note) Flange Kv VNC1-6A VNC1-8A VNC1-10A VNC24-10A VNC2-10A VNC24-15A VNC2-15A VNC34-20A VNC3-20A VNC44-25A VNC4-25A VNC54-32A VNC5-32A VNC54-32F VNC5-32F VNC64-40A VNC6-40A VNC64-40F VNC6-40F VNC74-50A VNC7-50A VNC74-50F VNC7-50F 1 8 1 4 1.1 1.1 1.3 3.4 4.3 3.9 5.0
Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-
Auto Switch Internal Circuit D-F9NW, F9NWV DC (+) Brown Weight Unit: OZ, ( ):g Switch main circuit Switch main circuit Switch main circuit OUT Black D-F9NW(V) D-F9PW(V) D-F9BW(V) Model 20 (0.5) 0.25 ( 7) 0.25 ( 7) 0.25 ( 7) DC () Blue Lead wire length in (m) 118 (3 ) 1.20 (34) 1.20 (34) 1.13 (32) 197 (5 ) 1.98 (56) 1.98 (56) 1.83 (52) D-F9PW, F9PWV Dimensions Unit: in DC (+) Brown ( ): mm
.: 6 (NPT thread: 1/4 inch) (86) Purge air outlet for dehumidification (34) (67) (25) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Hexagon width across flats 14 Hexagon width across flats 17 IDG3, 5 IDG3H, 5H With fitting for purge air discharge (Option: P) 73
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (mm) 32 6 10, 15 20, 25 CXS06-34 -A5157 CXS10-34A 28747 CXS20-34A 28749 CXS32-34A 28751 Part no. A B Qty. 1 Disassembly and Maintenance Caution A Section AA Bolt holder (movable) B Section BB 1. Never use a cylinder with its plate removed.
NDH10 125 140 160 I-12 I-14 I-16 0.1 0.3 25 32 +0.084 0 2033 27 46 54 100 M30 x 1.5 E1 0.1 0.3 28 36 +0.084 0 39 30 48 54 105 M30 x 1.5 NX 0.1 0.3 32 40 +0.100 0 Data 39 34 55 60 110 M36 x 1.5 L1 U1 RR1 Rod End Nut Material: Rolled steel 30 d Applicable bore size (mm) d H B C D Part no.
Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 35 26 79 59 141 105 220 165 343 251 563 422 879 659 30 22 68 50 121 90 188 141 294 215 482 362 754 565 25 19 57 42 101 75 157 118 245 179 402 302 628 471 20 15 45 34 80 60 126 94 196 143 322 241 502 377 15 11 34 25 60 45 94 71 147 107 241 181
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9.5 34 6 24.5 63.5 64.5 34 34 32 7 32 7 6 20 20 11 6 15 NS 15.5 52.5 + Stroke 68 + Stroke 32 4-M5 x 0.8 depth 8 10 + Stroke 15 20 (mm) Stroke (mm) LB LT NS LA J 5 64 20 4 10 10 20 64 4 10 15 25 20 74 4 20 74 25 20 4 25 84 40 4 30 30 40 84 4 30 40
Area: (800) 258-9200-www.stevenengineering.com Reed switch (2-wire, 3-wire) Solid state switch (2-wire, 3-wire) 2-color indication solid state switch (2-wire, 3-wire) Auto switch CX +1 0 mm Stroke length tolerance DMXP16 Theoretical Output -X (N) 20Operating pressure (MPa) Piston area (mm2) 0.2 Bore size (mm) 0.3 0.4 0.5 0.6 0.7 Data 6 28 6 8 11 14 17 20 10 79 16 24 32 40 47 55 12 113 23 34
MY50-16A-Stroke 14 Seal belt 1 MY50-16B-Stroke MY63-16B-Stroke MY80-16B-Stroke MY100-16B-Stroke Dust seal band 15 1 MYB50-15CA7165B MYB63-15CA7166B MYB80-15CK2470B MY100-15CK2471B Side scraper 27 2 14, 15, 27 and 34 are not included in the seal kit. Order them as required with by individual part numbers.
34 38 38 38 44.5 44.5 8 9 9 13 13 13 15 15 0.5 0.5 0.5 0.75 0.75 0.75 1 1 300 800 800 1250 1250 1250 3100 3100 0.03 0.05 0.05 0.11 0.11 0.11 0.22 0.22 JC20-8-100 JC25-10-150 JC32-10-100 JC40-12-125 JC40-12-150 JC40-12-175 JC50-16-150 JC63-16-200 8 10 10 12 12 12 16 16 1 1.5 1 1.25 1.5 1.75 1.5 2 D-X Technical Data 1139 JC Series Dimensions of Accessories Rod end nut (mm) d: Thread nominal
13.8 15.6 13.8 15.6 16 17.8 20.4 10 14 10 14 12 16 20 24 27 38 41 51 37 41 50 41 45 57 42 43 53 72 78 KA 4 2.5 1.8 1.6 10 8 13.5 5 4 3 KQG2 2.3 2.6 Applicable tubing L1 M 6 4 6 10 10 15 5.8 3.3 KG H1 12 d 8 6 KFG2 KFG2 5.3 12 14 17.4 6.6 16 22.2 A L2 23 H2 MS 25.6 10 7.5 6.8 26 Connection thread 27.5 15 17 20.9 7.6 KKA 27 25.6 10 8 7.3 30 KP 27.5 27 25.6 12 9 8 LQ 35 27.5 16 17 23.5 8.5 34
3 2 1 n DIN rail clamping screw C8: 8 One-touch fitting C8 [3(R) EXH port] DIN rail clamping screw (12) 30 56.6 8 R R 11.5 63.5 62.5 3 3 12 X 12 X 40.5 B B B B B B B B P P 25 1 A 1 A A A A A A A 18.5 7.5 9.5 7.5 C3, C4, C6, M5 [4(A), 2(B) port] C8: 8 One-touch fitting C8 [1(P) SUP port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 20.5 P = 10.5 34
View port View port G1/2 Refer to page 529 for Microswitch for differential pressure indication switch. 504 A Suction Filter with Case FH99 Series Dimensions Differential pressure indication switch Blanking cap Differential pressure indicator 8 x T 16 (65) N I (34) E F U OUT X H O 62 B U U R S 4 x K OUT OUT Q P IN Differential pressure indicator Differential pressure indication switch G
M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The
VDC) Clean Room Specication Dimensions: Ball Screw Drive 11-LEFS25 (102) ( ) +0.025 0 3H9 depth 3 4 x M5 x 0.8 thread depth 8.5 64 Body mounting Note 1) reference plane 45 LEF 38 LEJ ( ) +0.025 0 LEL 3.5 50 3H9 depth 3 LEM L Cable length 250 (52) A (Table traveling distance) Note 2) 52 (115.5) LEY 54 [(56)] (56) [54] Stroke 65 10 (2.4) [Origin] Note 4) Origin Note 3) 38 58 2 [4] 4 [2] 34
CXSJ10 / CXSJ10 11122122Note 2) D B Note 3) (mm) D-M9 34 (35.5) 3.5 (2) 24 (25.5) 6.5 (8) D-A93 30 (31.5) 25.5 (27) 5 (6.5) Symbol A B C D Note 1) The above mentioned values are indicated as a guide for auto switch mounting positions for stroke end detection. When actually mounting an auto switch, adjust the position after confirming the operating state of the auto switch.
34 13.2 18.5 (17.5) AS221F-02-10 AS221F-02-09 10 5/16" 18.3 44.5 35.3 18.5 21 27.2 21 36.4 18.2 36 36 15.2 1/4 1/4 AS321F-02-06 AS221F-02-11 6 3/8" 12.8 17 35.3 21 18.8 44.5 27.8 36 60 18.5 39.3 AS321F-02-08 AS321F-02-07 8 1/4" 15.2 18.5 27.8 17 41 29.5 39.3 63 13.2 60 48.3 43.3 42.8 37.8 21.3 23 AS321F-02-10 AS321F-02-09 10 5/16" 23 18.5 21 43.3 31.8 37.8 67 18.5 63 29.5 43.3 42.8 15.2
18.5 35.2 25.3 32.1 30.2 32.4 8 15.2 3/16" 11.4 27.1 16.5 14.2 AS221FG-01-10 AS221FG-N01-07 23.9 31 21 21 32.1 14.1 39.2 10 18.5 1/4" 13.2 17 19 AS221FG-02-04 AS221FG-N01-09 14.1 25.3 32.4 16 25.2 34.4 4 10.4 5/16" 15.2 18.5 21 32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 17 25.2 17.7 34.4 6 12.8 5/32" 10.4 16 18.5 29.4 34.9 39.9 17 34.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 17.7 24.9 34.2 34
52-SY9000 Dimensions 29 30 2-position double L plug connector (L) 52-SY9240 (R) -L03 04 17.5 106 51.2 86.5 Manual override 2 x 5.4 (Mounting holes) 1/8" (External pilot port) Insulation Black () 25 27 5 15.5 4A 2B 28.5 PE 57 47 A B X Insulation Red (+) 3EB 1P 5EA 96.5 27 25 1/8" (Pilot EXH. port)