3

AB B MK MK Basic (mm) MK2T A B C D E F Yh9 G 45 52 64 77 H 16 16 20 20 I 9 9 11 14 J 7 7 8 10.5 K M6 x 1.0 M6 x 1.0 M8 x 1.25 M10 x 1.5 L 10 10 14 18 S 31.5 29 34 34.5 T 10.5 9 11.5 10.5 W 14 15 19 19 X 3 3 3.5 3.5 Z 6.5 6.5 7.5 7.5 AA 4.5 5 7 7 AB 1 1 1 1.4 AC 5.5 5.5 6.6 9 AE 1/8 1/8 1/4 1/4 Model 30 30 37 48 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 0 0.062 0 0.062 0 0.062 0 0.062 49.5 57 71 84

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature specifications Indicator Valve size 16 25 40 50 General use Without XLA16-30-1-2 XLA25-30-1-2 XLA40-30-1-2 XLA50-30-1-2 With XLA16A-30-1-2 XLA25A-30-1-2 XLA40A-30-1-2 XLA50A-30-1-2 High temperature Without XLA16-30-1H-2 XLA25-30-1H-2 XLA40-30-1H-2 XLA50-30-1H-2 With XLA16A-30-1H-2 XLA25A-30-1H-2 XLA40A-30-1H-2 XLA50A-30-1H-2 Temperature

Guide Cylinder Series MGG

Rc 3/8 230 M14 x 2 depth 30 125 80 245 190 153 85 304 80 M14 310 175 16 16 226 200 326 300 30 32 Rc 1/2 280 For long strokes Bracket mounting strokes Bore size (mm) Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Z Y X W V U T S R Q Y R 63 80 100 63 80 100 63 80 100 350 to 1100 308 107 54 86 108 192 30 72 14 29 119 16 300mm or more 350 to 1200 355 131 66 104 128 224

Series MXP Precision Air Slide Table

Allowable moment coefficient : Graph 2 Max.allowable moment M max. : Table 4 3=Me/Mea Calculate load rate (3) of kinetic moment. Examine for Mey (30+10.5) Mey=1/333.6 =0.45 1000 We=33.6 A1=10.5 Meay=1.19 (Same as Meap) '3=0.45/1.19=0.378 3-4 Sum of load rate 1+2+3+'3= 0.167+0.013+0.252+0.378=0.81<1 And it is possible to use.

BP1000

No code 0 V3 L 1 H 2 4 No gauge port No pressure gauge Ports -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa Code Ports 2 ports 3 ports 2PW 3PW Porting Configuration e w q w q 1) Other range available.

Table of Contents

F9PWV F9BWV 2-wire Relay, PLC IC circuit 100 V or less No 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) 2-wire 12 V Grommet Relay, PLC Yes 24V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Solid state switches marked with are produced upon

MHY2/MHW2

light at ON Green light at ON MRHQ Finger fully closed Finger fully open 2 2 4 2 3 MHY2 -10D Auto switch 4 4 7 4 5 Finger fully closed 2 2 4 2 2 MHY2 -16D Finger fully open 3 3 6 3 4 Finger fully closed 2 2 3 2 2 MHY2 -20D Finger fully open 3 3 5 3 3 Finger fully closed 1 MHY2 -25D 1 3 1 2 Finger fully open 2 2 5 2 3 2.8-15 Series MHW2 20, 25, 32, 40, 50 180 Angular Gripper Rack & Pinion

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table displacement mm Table displacement mm Table displacement mm 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load N 150 100 50 200 250 Load N 150 100 100 400 500 Load N 300 200 3 Precision Air Slide Table Series MXP Table Accuracy Clean Series: Precision Air Slide

CJ2X/CUX/CQSX/CQ2X/CM2X

Standard Stroke Bore size (mm) Standard stroke (mm) Auto switch Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Nil Without auto switch (Built-in magnet) 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Rod end thread For the applicable auto switch model, refer to page 10-3-12.

CJ2X/CUX/CQSX/CQ2X/CM2X

Data Low speed cylinder Conventional cylinder Low speed cylinder Time 10-3-2 10-3-3 3 Low Speed Cylinder Specific Product Precautions Be sure to read before handling.

LEF-OM006xx

INC 100 -10.00 3000 3000 0 0 0 100 10.00 20.00 0.50 30[mm] No.1 No.1INC 10INC) C :10(INC) 50[mm] 0 10 20 30 40 50 [mm] [mm] -10INC) C :-10(INC) 10[mm] 0 10 20 30 40 50 [mm] [mm] -24- ) 1. 2. 3.No.1 4.No.2 5. 1 SVON(ON SVRE(READY 2 SETUP SETON INP(IN ) OUT0 OUT1 OUT2 3)4) OUT3 OUT4 OUT5 INP BUSY IN0 IN1 IN2 IN3 IN4 IN5 DRIVE 3)5) No.1 3 OUT0 OUT1 OUT2 3)

CE

VDC, 50 mA NPN open collector Max 30 VDC, 50 mA 3 PNP open collector Max 30 VDC, 50 mA PNP open collector Max 30 VDC, 50 mA 3 Output transistor mode Power supply voltage 90 to 264 VAC 21.6 to 26.4 VDC 90 to 264 VAC 21.6 to 26.4 VDC 90 to 264 VAC 21.6 to 26.4 VDC 90 to 264 VAC 21.6 to 26.4 VDC 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10

Prevents Micro-Bubbles

33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 Stainless steel 36 47 81 13 19 110.5 112.5 37 26 37 Rc 1/4, 3/8, NPT 1/4, 3/8 M6 x 1 (SUS) 46 60 99 16 20.5 138 142 47.5 33.5 50 Rc 3/8, 1/2, NPT 3/8, 1/2 M8 x 1.25 30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 (n 2) 2 100 + 100 Same side 100 + 100 (n 2) n = 4, 6, 8 n = 2, 3, 4 1 pc. 75 90 80 10 Different sides 35 75 90 80 Same side 55 75 90 80 90 + 30 (n 2) 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n

LEH_C

1 1.5 1 40 40 3 3 3 3 5 5 5 K K 5 (mm) NPN NPN 10 LECP6 ( PNP PNP 4 4 10 LECP1 1 LECP1 ( 1 NPN NPN 6 6 16 16 1P 1P PNP PNP 20 10 20 10 25 14 25 14 AN LECPA ( AP AN LECPA NPN NPN A A 32 22 32 22 AP PNP PNP B B (m) 40 30 40 30 C C 8 8 8 8 A A 1.5 1 1.5 1 10 10 B B 3 3 3 3 15 15 ( C C 5 5 5 20 20 F F 5 () () R R S S A B C / P.42 7.3 (NPNPNP) 12 - 2.1.3 3 10 2 5 1 4 7 6

RHC

15 30 6 10 1/4, 3/8 = 0.7 500 4 20 0.5 0.1 0.3 10 10 1/4, 3/8 32 1000 8 1/4, 3/8 3/8 3/8 3/8 1500 2000 2500 3000 12 16 20 24 0 1,000 2,000 3,000 Maximum speed Vmax (mm/s) 40 8 10 1/4, 3/8 500 6 40 = 0.7 30 40 3/8, 12 3/8, 12 3/8, 12 3/8, 12 3/8, 12 1000 1500 2000 2500 3000 12 18 24 30 36 0.5 0.1 0.3 20 10 Note) Refer to page 10-6-7 for maximum absorbed energy since cushioning ability may

7

D-X 429 CK1 Series Dimensions CK140, 50, 63 Band mounting type 3 x 1/4 (Rc, NPT, G) (Piping port) Cushion valve Top width across flats 3 (Tube cover side only) 10 W S + Stroke N 2 x Speed controller valve Top width across flats 3 52 3 x 1/4 (Rc, NPT, G) (Piping port) 30 20 17 45 45 45 3 14 11.5 M16 x 1.5 30 IA IB 40 35 20 38 Width across flats 17 0.050 d9 0.093 +0.027 H8 0 Shaft: 12 Hole:

MIW/MIS

Kit components main parts MIS12-10D MI-A1201-10 MI-A1202-10 MI-A1203-10 MIS12-20D MI-A1201-20 MI-A1202-20 MI-A1203-20 MIS12-30D MI-A1201-30 MI-A1202-30 MI-A1203-30 MIS20-10D MI-A2001-10 MI-A2002-10 MI-A2003-10 MIS20-20D MI-A2001-20 MI-A2002-20 MI-A2003-20 MIS20-30D MI-A2001-30 MI-A2002-30 MI-A2003-30 Standard Finger Tapped on upper and lower faces Tapped on all faces 3 12 13 14 20 Seal kit

rep-modular-e

Industrial Filters 407 Series AR(K) Replacement Procedure of Diaphragm 3 3.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Industrial Filters 407 Series AR(K) Replacement Procedure of Diaphragm 3 3.