ITV

Count Pressure Characteristics Flow Characteristics Supply pressure: 0.6 MPa Set pressure: 0.25 MPa 600 1 500 kPa 500 Output deviation factor (% F.S.) 0.5 Set pressure (kPa) 400 kPa 400 Out 300 kPa 300 0 Return 200 kPa 200 0.5 100 kPa 100 50 kPa 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 2 1 3 4 5 6 0 7 1.0 Supply pressure (MPa) Flow rate (l/min (ANR)) 14-8-6 7 Compact Electro-pneumatic Regulator

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.1 0 VX211 VX22 VX23 VX2 4 VX2 5 VX2 60-02 VX2 602 50 100 150 200 250 300 350 3 100 200 300 400 500 600 4.5 200 400 600 800 1,000 1,200 3 2 3 2 3 2 3 2 03 04 6 500 1,000 1,250 8 500 700 900 10 500 700 900 10 700 1,000 Flow rate Q l/min (ANR) How to read

V

) / / / / L Type 400 (400) 10 20 34 68 Air Consumption S Type 660 (100) 10 20 34 68 L Type 360 (400) H O W T O O R D E R ZH V A C U U M E J E C T O R *Vacuum pressure is quoted as mmHg below atmospheric (Torr Absolute) 1 Torr = 0.0197PSI D ZH D I M E N S I O N S M A X I M U M S U C T I O N F L O W R AT E/ A I R C O N S U M P T I O N U N I T (ln/min) N O Z Z L E D I A M E T E R E X H A U S

Table Accuracy: Basic, Size: 10, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller

Table Accuracy: Basic, Size: 10, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller

Table Accuracy: Basic, Size: 50, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller

Table Accuracy: Basic, Size: 50, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller

Table Accuracy: Basic, Size: 30, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller

Table Accuracy: H (High Precision), Size: 10, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length for LEC: w/o Cable

Table Accuracy: H (High Precision), Size: 30, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length for LEC: w/o Cable

Table Accuracy: Basic, Size: 10, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 5, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Option: DIN Rail

Table Accuracy: Basic, Size: 50, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 5, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Option: DIN Rail

Table Accuracy: Basic, Size: 30, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 5, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Option: DIN Rail

Table Accuracy: High Precision, Size: 10, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 5, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Option:

Oscillation Angle A: 320°, Torque (Range)(N⋅m): 10 to Less than 20, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 10, Size: 50, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Standard cable, Actuator

CG5-S

1.5 0 20 to 63 to 1000 mm, to 1200 mm Stroke length tolerance 80, 100 to 1000 mm, to 1500 mm Basic type, Axial foot type, Front flange type, Rear flange type, Integral clevis type Mounting JIS symbol Double acting/Single rod Standard Strokes (mm) Note 1) Standard stroke Long stroke Bore size 20 25, 50, 75, 100, 125, 150, 200 201 to 350 Minimum stroke for mounting auto switches 25 301 to 400

CJ5-S

R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I MM AL A Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

CJ5-S

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Standard Stroke MK(2) Standard stroke Long stroke Note) Bore size (mm) RS Q G 20 25, 50, 75, 100, 125, 150, 200 201 to 350 25 301 to 400 RS H A 32 301 to 450 40 301 to 800 Made to Order Specifications (For details, refer to page 10-21-1.) 25, 50,

RSH/RS1H

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1100 1100 0.5 RHC 1000 1000 0.4 900 900 0.3 MK(2) 63 80 Load weight m [kg] Load weight m [kg] Load weight m [kg] Load weight m [kg] 0.2 800 800 50 0.1 700 700 RS Q G 600 600 0 500 100 200 300 400 RS H A 63 Lateral load F [N] 500 500 50 400 400 RZQ RS1H50