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140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

Flow Characteristics/Weight 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Weight (kg) Port size Model Type of actuation C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 4.5 5.1 5.6 4.5 5.1 5.6 4.0 4.5 5.0 4.2 (4.0) 4.8 (4.5) 5.5 (4.8) 0.33 0.28 0.28 0.33 0.28 0.28 0.29 0.23 0.23 0.29 (0.28) 0.24 (0.27) 0.23 (0.30) 16 19 21 16 19 21 15 18

Colors indication Color Black Clear Blue White Symbol B C BU W Color Yellow Red Green Orange Symbol Y R G YR Colors other than Black are made to order only.

Line A IDG5 Fitting: Oil-free one-touch fitting Piping: Urethane tuing Oil-free: Wetted parts oil-free AME AMF Oil-free regulator Oil-free solenoid valve SUP Oil-free needle valve Line A Line B Example of clean air equipment Line B Line C Fittings: Clean one-touch fittings Piping : Polyolefine tubing Clean: Oil-free, Assembled in clean room Line C Clean precision regulator Stainless steel

AR 30 q 03 t y K r BE B Option/Semi-standard: Select one each for a to g. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

K J E Size variations Standard strokes Model Auto switch 20 30 40 50 100 60 70 80 90 C(D)U20 20 to 32 Direct mounting type auto switch C(D)U25 C(D)U32 Features 2 Free-Mounting Cylinder with Air Cushion Series CU 20, 25, 32 How to Order CU 32 32 50 50 A A F9BW With auto switch CDU Without auto switch Number of auto switches With auto switch (built-in magnet) 2 pcs. Nil S 1 pc.

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

glycol 1, 4-dioxane 49.5 (43) Ether MTBE TAME INLET OUTLET Pyridine Amine Butyl amine Fuel C: Methanol = 75/25 Gasohol Fuel C: Methanol = 50/50 Fuel C: Methanol = 25/75 Consult SMC for fluids other than those listed. 6 Series FQ1 Made to Order Consult SMC for detailed dimensions, specifications and lead times. 4 Nonstandard Elements for Precision Cleaning -X0 X0 FQ101 Option Element size

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

(Example) SS3YJ7-20-03 . 1 set (manifold base) SYJ712-5LZ-01 . 2 sets (valve) SYJ700-10-1A . 1 set (blanking plate assembly) SS3YJ7-42R-03-01 . 1 set (manifold base) SYJ714R-5G . 2 sets (valve) SYJ700-10-2A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

Insert bushing Insert bushing LQ-2B07 Nut LQ-2B03 Nut LQ-2N07 LQ-2N03 Tubing Collar Tubing O.D. 1/4" LQ-2U07 (Basic size) Tubing O.D. 1/8" LQ-2U03 (Reducer type) How to order fitting parts Tubing LQ 2 U 03 Type U is recommended when changing the tubing size. Tubing size Symbol Tubing O.D.

Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

L O L ZX G H F K ZR J ZM ZH E D I A ZU B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL 2-4.5 ZY ZQ A B C D E F G H I J K L Model 4 ZFC100-04 ZF 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 ZP 1/4" ZFC101-07 6 ZFC200-06 ZCU 8 ZFC200-

Accessory Option specifications C C D -J -R Applicable model Accessory (Option) D J R AMG150 AMG250 AMG350 AMG450 AMG550 AMG650 AMG850 N.C. auto-drain N.O. auto-drain Drain guide B Accessory 1 4 Option IN-OUT reversal direction 14-20-3 2 Series AMG Flow Characteristics Element initial condition Note) Compressed air over max. flow line in the table below may not meet the specifications of

Nil Rc Thread type F G N NPT Accessory/Option Combinations Available Not available Depends on model Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Accessory Option specifications C C D -J -R D J T AMH150 R AMH250 AMH350 AMH450 Applicable model Accessory (Option)

Flow Rate Characteristics Operating Frequency Port size Valve flow rate characteristics 70 Ambient and fluid temperatures (Upper limit) [C] 1, 5, 3 (P , EA, EB) 4, 2 (A, B) 1 R 4/2 (P R A/B) 4/2 R 5/3 (A/B R E) Model 60 C [dm3/(sbar)] b C [dm3/(sbar)] b DXT1215 1/8 1/8 1.3 0.37 1.3 0.23 50 Calculation of effective area S and sonic conductance C: S = 5.0 x C 40 30 20 10 0 0 200 Operating