CM2

30 M26 x 1.5 1/8 26 0 0.033 32 45 8 13 12 30 19 30 14 22 9 10 5.5 9 19.5 17 25 6 37.5 M10 x 1.25 15 34.5 M26 x 1.5 1/8 26 0 0.039 40 50 11 16 14 38 30 39 18 24 10 15 7 11 21 22 41.2 8 46.5 M14 x 1.5 21.5 42.5 M32 x 2 1/4 32 Dimensions by Stroke Built-in One-touch Fittings 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) Stroke Q P Symbol S ZZ Z S ZZ Z S ZZ Z Z ZZ S

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

) 10-SS5YJ5-20SA-05(-Q) Z With light/surge voltage suppressor With light/surge voltage suppressor (Non-polar type) R P R U 1 2 3 Stations Power saving circuit is only available for the Z type.

CA2

S H L l Z ZZ e f h Z ZZ CS1 40 50 63 80 100 84 30 M14 x 1.5 27 1/4 10 16 165 51 165 175 43 11.2 59 1/4 stroke 173 183 90 35 M18 x 1.5 30 3/8 12 19 183 58 183 195 52 11.2 66 1/4 stroke 191 203 C76 98 40 M18 x 1.5 31 3/8 16 23 196 58 196 212 52 11.2 66 1/4 stroke 204 220 116 48 M22 x 1.5 37 1/2 20 28 235 71 235 255 65 12.5 80 1/4 stroke 244 264 C85 126 58 M26 x 1.5 40 1/2 25 36 256 72 256 281

IDX-OM-W094

11-2 12 T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 13-1 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDFA60/70/80/90 Series IDX-OM-W094 1 1.1 z z z z z z z z z () 6.2 z 1.1.1 3 IDFA60/70/80/90 Series 1-1 IDX-OM-W094 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFA60/70/80/90 Series 1-2 IDX-OM-W094 1.2.4 IDFA60/70/80/90 Series 1

CXS

12 30 (30) Z 6 30 2-M8 x 1.25 x 6 (Hexagon socket head set screw) 2-6.9 through 2-11 counterbore with depth 6.3 2-R3.5 28 1 8 78 1 60 0.2 60 0.2 60 0.2 0.2 35 80 64 6.3 5 2-R3.5 8 12 14 4-M6 x 1 (Through) 4-M5 x 0.8 with depth 7.5 2-M6 x 1 x 18.5 (Hexagon head bolt) 2-M6 x 1 (Hexagon nut) 2-M6 x 1 x 14 (Hexagon socket head cap screw) (mm) 8-M5 x 0.8 with depth 7.5 (Opposite side: Same) Z

HRX-OM-X071

Maintenance handle for particle filter 1 Use this handle only to loosen the case. Do not use to tighten the case. 1 pc. Particle filter element 1 1 pc. For option DM DI filter 1 pc. For HRR050-AF-20/40G thread adapter set 1 set For HRR050-AN-20/40NPT thread adapter set 1 set 1 In the case of option Z, not included.

Table of Contents

IN side Straight, Elbow OUT side Straight, Elbow Also available in inch sizes. 14-4-19 2 Compact Manifold Regulator Common Supply Type Series ARM11A How to Order ARM11A 1 A 1 A Z 1 07 1 2 3 4 5 6 7 1. Handle position 2.

Hydraulic

1/2 57 127 11 25 26 100 80 38 6.5 118 90 35.5 35 27 19 16 M12 x 1.75 27 13 34 M27 x 2 35 32 1/2 66 137 12 32 34 125 80 38 6.5 140 112 35.5 35 27 19 16 M14 x 2 27 15 34 M27 x 2 35 32 1/2 77 137 12 32 34 160 100 42 9 174 140 45 38 36 22 18 M16 x 2 28 17 38 M33 x 2 40 36 3/4 94 155 12 36 43 (mm) Without rod boot With rod boot Bore size (mm) W l Z TR TT TX TY TZ V H Z ZZ e f h ZZ 40 R0.5 24 70

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W G 1 N.C. (B contact) 2 pcs.

CJ2

1 !

10

1 !4 !0 !3!8 !6 !5 12-2 12-1 7-2 7-1 1-2 1-1 1-1 Width across flats Rod view 32 (2:1) Component Parts No.

HRX-OM-W002

BL BR BR BR BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BL BL Option U other than T1/Z/Z1 (CN2) (CN1) 1 1 3 3 2 2 4 4 3 2 1 3 2 1 4 4 2 1 1 3 2 1 6 8 3 5 7 2 4 2 1 1 3 2 USB Board PCB4 Display Board PCB3 BK BR RD RD RD RD BL BK BK RD RD WH Not connected at option Z 24COM AOUT +24V + OUT (CN1) 3 6 2 5 4 1 BR BR BL BL Option DM DI Sensor

Thermo-chiller/Rack Mount Type

refrigeration Z1*1 Without a flow sensor Pipe thread type *1 Only Option Z or Z1 can be selected.

Battery-less

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Confirm the total of x, y, and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

Solid State Auto Switches

2 G 1/2 4 x Z 4 x Z (Applicable cable O.D. 6.8 to 9.6) (Applicable cable O.D. 6.8 to 11.5) Hexagon socket head cap bolt Hexagon socket head cap bolt Indicator light Most sensitive position Most sensitive position 1640 Reed Auto Switch Direct Mounting Style D-Z73/D-Z76/D-Z80 Refer to SMC website for the details of the products conforming to the international standards.

HRX-OM-X084

For HRR010-AF-10/20G thread adapter set 1 set (5) For HRR010-AN-10/20NPT thread adapter set 1 set 1 In the case of option Z, not included.

Proposals for Energy Saving

/ indicator light T NPTF F G S L N NPT Z Refer to Table 1 below for applicability.

Best Pneumatics Vol. 14

C J N R W Z AW10 AW30 to 40 B C D E G H -1 -2 -6 -8 -C -J -N -R -W -Z Accessory Optional specifications 14-2-67 68 Series AW10 to 40 Standard Specifications AW10 M5 x 0.8 AW20 1/8, 1/4 AW30 1/4, 3/8 Air 1.5 MPa 1.0 MPa 0.05 to 0.85 MPa AW40 1/4, 3/8, 1/2 AW40-06 3/4 Model Port sizes Fluid Proof pressure Maximum operating pressure Set pressure range Pressure gauge port size (1) 0.05 to 0.7

Modular F.R.L. Unit

gauge in imperial units (PSI, F) -Z Attachments Port size Function M5 x 0.8 1/8, 1/4, 3/8, 1/2, 3/4, 1 Piping adapter Allows installation/removal of the component without removing the piping.